SMC Pneumatic Clean Series Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
HEC006 8 to 15L/min And HEC012 10 to 15L/min When the flow rate of the radiating water is not enough, cooling capacity will decline. Meanwhile, when the flow rate is extremely small, alarm (Err14) may occur and the temperature of the radiating water might be extremely high. If a resin tubing is used for piping under these circumstances, the tubing might get softened and exploded.
MHR3-10R/MDHR3-10l MHR3-10R/MDHR3-10l 10 10 Pressure 0.6MPa 0.6MPa Pressure 8 8 0.5MPa External hold 0.5MPa Holding force (N) Holding force (N) 6 6 0.4MPa 0.4MPa 4 4 0.3MPa 0.3MPa 0.2MPa 2 2 0.2MPa L 0 10 20 30 40 50 0 10 20 30 40 50 Holding point L (mm) Holding point L (mm) Internal hold MHR3-15R/MDHR3-15l MHR3-15R/MDHR3-15l 20 20 Pressure 0.6MPa Pressure 0.6MPa 15 15 L 0.5MPa 0.5MPa Holding
Retraction locking Extension locking 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more commercially available) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (head side) to unlock.
Caution 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more commercially available) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (head side) to unlock. 1. In order to maintain good performance, operate with clean unlubricated air.
Lock ring Lock ring Retraction locking Extension locking 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more on the market) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (rear side) to unlock. 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more on the market
Control method PID control Ambient temperature andhumidity and altitude 12 Temperature:5 to 40,Humidity:30 to 70%,Altitude: Less than 3000m Circulating fluid*3 Tap water, 15% ethylene glycol aqueous solution Operating temperature range1 5 to 35 Cooling capacity (50/60Hz) 4 W 4600/ 5100 4800/ 5800 Heating capacity (50/60Hz) 5 W 1000/ 1200 1100/ 1200 Temperature stability 6 0.1 7 MPa 0.34(at 15L
Caution 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more commercially available) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (head side) to unlock. 1. In order to maintain good performance, operate with clean unlubricated air.
Retraction locking Extension locking 2) Supply air pressure of 0.2MPa or more to unlocking port shown in the drawing on the left. 1) Remove the dust cover. 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a conventional bolt of M3 x 0.5 x 15l or more) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (rod side) to unlock. 2) Screw
Retraction locking Extension locking 1) Remove the dust cover. 1) Remove the dust cover. 2) Screw in the manual unlocking bolt (commercial bolt size M3 x 0.5 x 15l or more) into the lock ring threads, and lightly push it in the direction of the arrow (rear), as shown above, to unlock. 2) Screw in the manual unlocking bolt (commercial bolt size M3 x 0.5 x 15l or more) into the lock ring threads
Retraction locking Extension locking 1) Remove the dust cover. 1) Remove the dust cover. 2) Screw in the manual unlocking bolt (commercial bolt size M3 x 0.5 x 15l or more) into the lock ring threads, and lightly push it in the direction of the arrow (rear), as shown above, to unlock. 2) Screw in the manual unlocking bolt (commercial bolt size M3 x 0.5 x 15l or more) into the lock ring threads
Interface plate for ZSM Ejector P31806-01 (blank) P31806-02 (use with switch) CD-P11 Contact protection box 0 NZM Ejector Mounting 1 1 8 PT T1 1/8 NPTF S W I T C H T Y P E 15L Solid state (NPN) 21L Contact reed FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT REQUEST CATALOG REFERENCE E802 & N400 CONTACT PROTECTION BOX/INTERNAL CIRCUIT Courtesy of Steven Engineering, Inc. !
Interface plate for ZSM Ejector P31806-01 (blank) P31806-02 (use with switch) CD-P11 Contact protection box 0 NZM Ejector Mounting 1 1 8 PT T1 1/8 NPTF S W I T C H T Y P E 15L Solid state (NPN) 21L Contact reed CONTACT PROTECTION BOX/INTERNAL CIRCUIT Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 !
. '/4 92 CX cz Without boot With boot H Z ZZ os f h , i9"'" size MM N P PG PH PL PW RR S U W .co 1110 (mm) X1US Z ZZ i 40 7 115 20 27 Y. 42 11 20 45 10 153 16 8 10'g' '-'"'' 15l:'. 29.5 51 234 244 43 112 59 242 252 50 30 % 46 10 21 50 12 168 19 0 'v 0 63 V. 16 31 % 48.5 13 23 60 16 182 23 0 W O , 80 37 'I, 55 15 23 70 20 208 28 0 I "u', '0 OJ 38 58 261 273 52 11 .2 66 1/4 "'M 49 58 280 296
Stroke (mm) Pulling force (N) Thread size Bore size (mm) M2 x 0.4 x 15l or more 12, 16 20, 25, 32 40 1.5 2 M3 x 0.5 x 30l or more 3 2 M3 x 0.5 x 30l or more 4 3 Remove the bolt for normal operation. It can cause lock malfunction or faulty release. Operating Pressure Caution 1. Apply air pressure of at least that shown in the table below to the port on the lock mechanism side.
Fluid Note4) PEEKPP Body Diaphragm Check valve Fluid contact material EPDMFKM EPDMFKM Repeatability Note1) 1%(2% when the dispense volume is 5 to 15L) *Under SMC's measuring conditions Dispense pressure Note2) 10kPa 15kPa 35kPa Suction pressure Dry Wet Max.operating frequency Note3) 2Hz(Minimum ON time 200msec/Minimum OFF time 300msec) Fluid temperature 10 to 50(No freezing) Ambient temperature
Measuring conditions 10-CQSXB20-50D Chamber volume Cleanliness of air supplied to chamber 15l (0.53ft3) Same quality as supply air Hitachi Electronics Engineering Corporation TS-6200 Min. measurable particle dia. 0.1m Intake rate 28.3l/min (0.99CFM) Sampling time: 5min Interval time: 55min Operation frequency: 30cpm Average piston speed: 100mm/s (3.9inls) Mounting: Horizontal no-load Supply