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Compact 7.7 (40.9) (40.9) 8 8 0.5 0.5 Auto switch Auto switch 8 MXZ Series Dimensions: MXZ20 MXZ20Standard (Pilot port location: Front) 4 x M3 x 0.5 depth 5.5 4 x 6 21 21 2 x 3.4 (Through holes for mounting) 47.4 (2) 15 2 x M5 x 0.8 (Pilot port) 37.8 + Stroke 39.5 + Stroke 36.3 29.7 + Stroke 4 9 2 15 30 20.7 + Stroke 17.4 30 (49.4) 4 x M3 x 0.5 depth 2.5 21 8 +0.1 9 0 depth 2.5 21 Auto switch MXZ20R
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.
HEC006 8 to 15L/min And HEC012 10 to 15L/min When the flow rate of the radiating water is not enough, cooling capacity will decline. Meanwhile, when the flow rate is extremely small, alarm (Err14) may occur and the temperature of the radiating water might be extremely high. If a resin tubing is used for piping under these circumstances, the tubing might get softened and exploded.
Take safety margins into consideration in the customers machine. 9.5.1 Performance of HED003 Conditions; Recirculating fluid: water (flow rate 15L/min), Facility water flow rate: 5L/min, Ambient temp.: 25oC 1) Cooling capacity 800 Facility water 10oC Facility water 25oC 600 Cooling capacity W Facility water 35oC 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig. 9-7 Cooling
MHR3-10R/MDHR3-10l MHR3-10R/MDHR3-10l 10 10 Pressure 0.6MPa 0.6MPa Pressure 8 8 0.5MPa External hold 0.5MPa Holding force (N) Holding force (N) 6 6 0.4MPa 0.4MPa 4 4 0.3MPa 0.3MPa 0.2MPa 2 2 0.2MPa L 0 10 20 30 40 50 0 10 20 30 40 50 Holding point L (mm) Holding point L (mm) Internal hold MHR3-15R/MDHR3-15l MHR3-15R/MDHR3-15l 20 20 Pressure 0.6MPa Pressure 0.6MPa 15 15 L 0.5MPa 0.5MPa Holding
Control method PID control Ambient temperature andhumidity and altitude 12 Temperature:5 to 40,Humidity:30 to 70%,Altitude: Less than 3000m Circulating fluid*3 Tap water, 15% ethylene glycol aqueous solution Operating temperature range1 5 to 35 Cooling capacity (50/60Hz) 4 W 4600/ 5100 4800/ 5800 Heating capacity (50/60Hz) 5 W 1000/ 1200 1100/ 1200 Temperature stability 6 0.1 7 MPa 0.34(at 15L
min 4 15 30 40 (1.1 [gal]/min) (4.0 [gal]/min) (7.9 [gal]/min) (10.6 [gal]/min) Facility water minimum necessary flow rate L/min 10 15 25 40 (2.6 [gal]/min) (4.0 [gal]/min) (6.6 [gal]/min) (10.6 [gal]/min) Operating temperature range C 20 to 90 Temperature stability *1 C 0.3 Circulating fluid *2 Ethylene glycol solution60% 0.35 / 0.55 0.45 / 0.65 0.40 / 0.60 0.35 / 0.55 (At 4L/min) (At 15L
Manually unlocking For 20 to 32 Dust cover holding bolt Dust cover Manual unlocking bolt Manual unlocking bolt Lock ring Locking direction Locking direction Lock ring Rod side Head side Rod side Head side MLGP--F: Extension locking MLGP--B: Retraction locking 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15L of more commercially available) into the lock
Caution 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more commercially available) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (head side) to unlock. 1. In order to maintain good performance, operate with clean unlubricated air.
Retraction locking Extension locking 2) Supply air pressure of 0.2MPa or more to unlocking port shown in the drawing on the left. 1) Remove the dust cover. 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a conventional bolt of M3 x 0.5 x 15l or more) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (rod side) to unlock. 2) Screw
Retraction locking Extension locking 1) Remove the dust cover. 1) Remove the dust cover. 2) Screw in the manual unlocking bolt (commercial bolt size M3 x 0.5 x 15l or more) into the lock ring threads, and lightly push it in the direction of the arrow (rear), as shown above, to unlock. 2) Screw in the manual unlocking bolt (commercial bolt size M3 x 0.5 x 15l or more) into the lock ring threads
Retraction locking Extension locking 1) Remove the dust cover. 1) Remove the dust cover. 2) Screw in the manual unlocking bolt (commercial bolt size M3 x 0.5 x 15l or more) into the lock ring threads, and lightly push it in the direction of the arrow (rear), as shown above, to unlock. 2) Screw in the manual unlocking bolt (commercial bolt size M3 x 0.5 x 15l or more) into the lock ring threads