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Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

0.005 0 0.05 MXY8 Table deflection mm Table deflection mm Table deflection mm MXY8 DMXY8 MXY6 0.04 MXY6 MXY6 0.03 -X 0.02 0.01 200 Load N 0 20 40 60 80 100 Load N 0 20 40 60 80 100 Load N 0 50 100 150 200 250 Data 8-9-9 9 Series MXY Table Deflection Table deflection due to pitch moment load Displacement at A when load is applied F Table deflection due to yaw moment load Displacement at A

smcmaintenancepartslist

Seal kit includes a grease pack (125 to 160: 40 g, 180, 200: 50 g, 250: 60 g). Order with the following part number when only the grease pack is needed.

Please contact us for the latest version.sales@ocaire.com, MXY6-200 E, ACTUATOR, MXY SLIDE TABLE, CD, 6MM MXY DOUBLE-ACTING, 1.21254 lb

01-mxy-e

Contents Bore size (mm) MXY6-PS MXY8-PS 6 8 12 MXY6-PS MXY8-PS MXY12-PS !0 !1 @2 @6 Wear ring A Resin A set of two of !0, !1, @2 and @6 each Wear ring B Resin MXY12-PS Cylinder scraper NBR As for MXY12, only one piston seal 26 is included. Piston seal NBR Replacement Parts: Grease Pack Grease pack part no. GR-S-010 (10 g) GR-S-020 (20 g) 124

1

Note 3) Refer to page 200 for dimensions of A or B port top-ported type.

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Table of Contents

100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

Table of Contents

220 320 85 121 171 MGPM (Slide bearing) A, DB, E Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB A E DB Bore size (mm) Bore size (mm) Over 200 st Over 50 st to 200 st Over 50 st to 200 st Over 200 st Over 25 st to 50 st Over 25 st to 50 st Over 200 st Over 50 st to 200 st Over 50 st to 200 st 50 st or less 50 st or less Over 200 st 25 st or less 25 st or less 80 100 115

ISO Cylinder

200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.

Secondary Batteries

Bore size 12 16 20 25 Cylinder stroke (mm) 32 40 50 63 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300 350, 400 20, 25 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 400 32 to 63 *Specifications and dimensions for the 90-series are the same as standard products.

MY1

(400) 200 l l MY1HT63 MY1HT50 100 2.

NCQ8

220 348 32.7 60.6 124 249 443 697 45.9 84.4 171 344 612 961 Inlet Outlet 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 0.76 0.67 1.42 1.33 2.50 2.47

Table of Contents

200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80

Smooth Cylinder/Low Speed Cylinder

NPN) A96 5 V IC circuit Yes A93 A90 A54 A64 A33C A34C A44C A59W IC circuit 100 V 100 V or less 100 V, 200 V 200 V or less B54 B64 A33 A34 A44 B59W Grommet No Yes No Relay, PLC 12 V 24 V 2-wire Terminal conduit DIN terminal Grommet PLC Relay, PLC Yes 100 V, 200 V Diagnostic indication (2-color) Water resistant type auto switches can be mounted on the above models, but in such case SMC

CXS

CXSJ10 D B (mm) D-A90, D-A96 25.7 29.7 3.2 D-A93 25.7 27.2 5.7 D-F9 29.7 2.8 19.7 7.2 Symbol A B Note) C D A C Note) For D-A90, D-A96, and D-A93, only outward electrical entry (D dimension) is available.