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Contents Bore size (mm) MXF8-PS 8 12 16 20 MXF8-PS MXF12-PS MXF16-PS MXF20-PS !7 !8 !9 Piston seal MXF12-PS MXF16-PS MXF20-PS Set of left nos. !7, !8, !9 Rod seal NBR O-ring Seal kit includes !7, !8, !9. Order the seal kit, based on each bore size. Replacement Parts: Grease Pack Grease pack part no.
Lr = 30 mm 0.10 0.08 0.08 MXF12-50 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 MXF12-50 0.06 0.06 MXF12-30 0.06 MXF12-30 MXF12-50 MXF12-20 MXF12-30 0.04 0.04 MXF12-20 0.04 MXF12-20 0.02 0.02 0.02 20 40 60 0 0 0 20 40 60 80 20 40 60 Load (N) Load (N) Load (N) 8-6-4 5 Low Profile Slide Table Series MXF Table Displacement due to Pitch Moment
Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 53 Recommended length Part No.
Max. tightening torque ft lbf (N m) Max. screw-in depth L (mm) Max. tightening torque ft lbf (N m) Max. screw-in depth L (mm) Model Model Bolt used Bolt used 6 6.5 0.7 {0.9} 0.7 {0.9} M3 x 0.5 M3 x 0.5 MXF8 MXF8 6 5.5 0.7 {0.9} 0.7 {0.9} M3 x 0.5 M3 x 0.5 MXF12 MXF12 10 6.5 1.5 {2.1} 1.5 {2.1} M4 x 0.7 M4 x 0.7 MXF16 MXF16 12 9.5 3.2 {4.4} 1.5 {4.4} M5 x 0.8 M5 x 0.8 MXF20 MXF20 18 Long
/60Hz) 2* 200VAC (50/60Hz) 3* 110VAC (50/60Hz) 4* 220VAC (50/60Hz) 5 24VDC 6 12VDC 9* Others Courtesy of Steven Engineering, Inc. !
A I L A B I L I T Y 12 25, 50, 100 20 25, 50, 100, 200 32 50, 100, 200, 300 40 100, 200, 300, 500 50 200, 300, 500 63 200, 300, 500 Courtesy of Steven Engineering, Inc. !
2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.
Cylinder Pad (ZP02 to 50) Rod dia. (mm) 2 4 6 8 10 13 16 20 25 32 40 50 Bore size (mm) Pad (ZPT02 to 50-B4 to 10) Cylinder 4 6 8 10 13 16 20 25 32 40 50 Rod dia. (mm) Model Thread dia.
speed 50 to 400 mm/s 50 to 1000 mm/s Relief port size Auto switch can be mounted.
2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.
100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N)
Because sizes 10, 20, 30 and 50 have the table press fit into an angular type bearing, they cannot be disassembled. 50 11-9-30
209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal XMC, XYC Series How to Order Angle type M9N A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.