Table of Contents

Order the seal kit, based on each bore size. 8-15-75 75 Series CY1H Construction Double axes type: CY1HT !9 @0 !8 q !5 !4 !7 w Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com #3 !6 e #1 @9 #0 i !0 !3 !1 !

Aluminum High Vacuum Angle Valve

Stainless steel 432 Made to Order XLF Series How to Order Valve 100 XLFR M9N A 1K X Flange type Symbol Nil KF(NW) K(DN) D Temperature specifications Symbol Nil 5 to 60C 5 to 150C H0 Seal material Symbol Nil FKM EPDM Barrel Perfluoro Type Seal material 1349-80 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Compound No.

Modular F.R.L. Units

Example) AF30-03B-2R-A-X430 X430 Low temperature X440 High temperature Symbol Description Nq Body size 20 30 40 50 60 Symbol Description Nq Body size 30 40 50 60 Nil Rc N*1 NPT F*2 G + Nw Pipe thread type Nil Rc N*1 NPT F*2 G + Nw Pipe thread type 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Ne Port size Nr Option (Mounting) Nil Without mounting

1

, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 * Manufacture of intermediate strokes at 1 mm intervals is possible.

XM, XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Mechanically Jointed Rodless Cylinder Series MY1

( * * % # NW A GB N Z & ' ( . WW WW /*#! ( * * % # . . . 0 0 /*#! ( * * % # XX XX Centralized piping type Centralized piping type VV VV . . /*#! ( * * % # /*#!

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Principle materials Body: SCS13 (Conforms to Stainless steel SUS304) Bellows: Stainless steel SUS316L Bellows holder: Stainless steel SUS304.

MY1

53 NH 39 40.5 Rc 1/8 140 11 6.6 19 30 68 16 M8 x 1.25 6.8 140 70 110 13 M6 x 1 37 25 MY1H32 49 64 50 Rc 1/8 170 14 8.5 23 36.5 84 15 M10 x 1.5 8.6 170 85 121 13 M6 x 1 45 30.5 MY1H40 63 Rc 1/4 61.5 75 P indicates cylinder supply ports.

High Vacuum Angle Valve

Table 1: Suffix Symbol for Seal Material Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Seal material EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for Plasma Compound no. 2101-80*1 70W 4079 SS592 SS630 SSE38 1232-70*1 3310-75*1 *1 Produced by Mitsubishi Cable Industries, Ltd.

MY1

37 45 53 64 75 Z 160 200 220 280 340 (PE) 9 12 13 13 23 PG 3.5 4.5 7 8 9 Model MY1H16 MY1H20 MY1H25 MY1H32 MY1H40 "P" indicates cylinder supply ports.

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

CATALOG

, 100 25 10, 20, 30, 40, 50, 75, 100 32 10, 20, 30, 40, 50, 75, 100 10 75, 100, 125, 150 15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy of Steven Engineering, Inc. !

A

, 100 25 10, 20, 30, 40, 50, 75, 100 32 10, 20, 30, 40, 50, 75, 100 10 75, 100, 125, 150 15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy of Steven Engineering, Inc. !

Air Cylinder

42 M5 x 0.8 4.8 9.5 M10 x 1.0 45.5 54 66 78 84 108 126 138 SA X Y Z ZA 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st Bore size D6 34.5 (

5

9 9 80 92 108 75, 100 74 56 M FV 80 10 to 50 73.5 53.5 83.5 63.5 11 11 99 116 134 75, 100 83.5 63.5 100 10 to 50 85 63 95 73 11 11 117 136 154 75, 100 95 73 FT L B + Stroke A + Stroke 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 63 10 to 50 18 43.5 60 75, 100 80 10 to 50 20 53.5 77 75, 100 100 10 to 50 22 53.5 94 75, 100 L1 Flange bracket material: Carbon steel Surface treatment:

XMC/XYC Series

),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) ,CF KF(NW),K(D N) XYC KF(NW) KF(NW) KF(NW) KF(NW) K(DN) KF(NW) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa (G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 3 At 0.5MPa 38 91 430 280 500 1000 Port size M5 Rc 1/8 XMC 0.36 (0.40) 0.62 1.40(1.76) 2.10 3.80

XMA/XYA Series

),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) KF(NW), K(DN) ,CF XYA KF(NW) KF(NW) KF(NW) KF(NW) KF(NW) K(DN) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa(G) 0.4 to 0.7 Air consumption At 0.5MPa 19 46 200 360 660 1350 cm3 Note 3 Port size M5 Rc 1/8 Weight kg Note 4 XMA 0.33 (0.37) 0.61 1.40 (1.76) 2.00

XMD/XYD Series

) KF (NW),CF KF(NW) KF (NW), K(DN),CF KF(NW), K (DN) Flange type XYD KF(NW) KF(NW) KF(NW) KF(NW), K(DN) KF(NW), K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Actuation pressure MPa (G) 0.4 to 0.7 Main pumping 46 200 360 660 1350 Air consumption cm3 for 0.5MPa Note 3) Initial pumping 2.5 12 15.5 30 42 Port size M5

Magnet: None, Mounting: D (Double Clevis), Bore Size: 40mm, Thread: TN (NPT), Stroke: 350mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket), Rod End Bracket: W (Double Knuckle Joint)