1

INDEX 350 351 INFORMATION RoHS Foot Pedal Type 5 Port Mechanical Valve Directional Control Valves 5 port is added to the foot pedal type mechanical valve. Models with lock and without lock are available.

NCG/CG1

Other dimensions are the same as basic style. 18 Air cylinder: Standard Type Double Acting, Single Rod Series NCG/CG1 Basic Style with Single Clevis: NCGC ZZ + Stroke Z + Stroke CD 8-J LE TC L G B TH TW UL TA UE TS UT 4-TB Inch Bore size (mm) Standard stroke range CD J L LE TA TB TC TH TS TW UE UL UT Z ZZ G B 0.250 0.250 0.250 0.375 0.375 0.375 0.31 0.70 0.68 1.07 0.88 0.91 0.91 0.28 0.28

CATALOG

~ 500 14 88 32 350 ~ 600 14 90 40 350 ~ 800 15 101 50 350 ~ 1000 16 116 63 350 ~ 1100 16 119 80 350 ~ 1200 23 145 100 350 ~ 1300 23 145 B R A C K E T M O U N T I N G S T R O K E Bore Size (mm) Bracket Mounting Stroke 20 100st or more 25 125st or more 32 150st or more 40 200st or more 50 250st or more 63 300st or more 80 400st or more 100 500st or more Bore Size Stroke range (mm) A AA AB

A

~ 500 14 88 32 350 ~ 600 14 90 40 350 ~ 800 15 101 50 350 ~ 1000 16 116 63 350 ~ 1100 16 119 80 350 ~ 1200 23 145 100 350 ~ 1300 23 145 B R A C K E T M O U N T I N G S T R O K E Bore Size (mm) Bracket Mounting Stroke 20 100st or more 25 125st or more 32 150st or more 40 200st or more 50 250st or more 63 300st or more 80 400st or more 100 500st or more Bore Size Stroke range (mm) A AA AB

Cylinder with Lock

Unit model MWB32-UT MWB40-UT MWB50-UT MWB63-UT MWB80-UT MWB100-UT Applicable rod size 12 f8 16 f8 20 f8 20 f8 25 f8 30 f8 MWB-UT CP96N C96N Lock Unit Accessories Auto Switch Made to Order Double Acting, Single Rod Double Acting, Double Rod Double Acting, Single Rod Double Acting, Double Rod Material Carbon steel/Stainless steel Surface treatment Hard chrome plating: 10 m Chamfer the rod

Table of Contents

Vacuum Equipment Precautions . 349 350 350 352 353 354 359 359 359 360 360 360 361 361 361 362 363 366 369 370 370 371 374 375 377 379 381 383 385 387 389 391 393 395 397 399 401 403 405 405 405 406 407 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 Vacuum Equipment

Shock Absorbers and Rate Controls

9.5 9.7 I9.l tt6 350 ti/a f l{t?

Electric Actuator

Applicable stroke table 30 50 100 150 200 250 300 350 400 450 500 Stroke Model LEY25 LEY32 ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) 12 Electric Actuator/Rod Type Series LEY-X5 Specifications 2 6 2 6 3 7 3 7 Model LEY25S /LEY25DS LEY32DS (In-line) LEY32S (Top mounting) 30, 50, 100, 150, 200 30, 50, 100, 150, 200, 250 30, 50, 100, 150, 200, 250 Stroke [mm] 250, 300, 350, 400 300, 350, 400,

Mounting: B (Basic), Model: 100 (30mm), Thread Type: Rc

Mounting: Basic, Model: 30mm, Thread Type: Rc, Rod Length: -, Made to Order: -

5

, 400, 450, 500 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

VQZ1000/2000/3000

Cylinder side pressure (P2) I N I N O UT O UT Specifications 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m Maximum operating pressure Minimum operating pressure Ambient and fluid temp.

ZP

Front matter 30 Symbol/Type U: Flat C: Flat with rib UT: Thin flat B: Bellows Compact Pad 3, 4, 5, 6, 7, 8 Pad diameter 7 types of 3 to 8 are added.

Smooth Cylinder/Low Speed Cylinder

, 400, 450, 500 40 Symbol Specifications Change of rod end shape 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 -XA -XC6 Made of stainless steel 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 Tie-rod, cushion valve and tie-rod nut made of stainless steel -XC7 Note 1) Intermediate strokes not listed above are also available

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

63 YU-05 YA-05 YB-05 40 Material: Precision die-casting material equivalent to stainless steel 304 80 YU-08 YA-08 YB-08 90 Bore size (mm) O M J E D B Part no. 100 YU-10 YA-10 YB-10 160 K (Width across flats ) YB-03 32, 40 11.5 depth 7.5 34 9 25 7 12 H (With locking) YB-05 50, 63 14.5 depth 8.5 42 11 32 9 12 YB-08 80 18 depth 12 52 13 38 11 16 d1 d2 YB-10 100 21 depth 14 62 17 50 14 19 L UT

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

63 YU-05 YA-05 YB-05 40 Material: Precision die-casting material equivalent to stainless steel 304 80 YU-08 YA-08 YB-08 90 Bore size (mm) O M J E D B Part no. 100 YU-10 YA-10 YB-10 160 K (Width across flats ) YB-03 32, 40 11.5 depth 7.5 34 9 25 7 12 H (With locking) YB-05 50, 63 14.5 depth 8.5 42 11 32 9 12 YB-08 80 18 depth 12 52 13 38 11 16 d1 d2 YB-10 100 21 depth 14 62 17 50 14 19 L UT

Profi-E

Com m uni cat i on dat a al l ocat i on Set t arget val ue Resol ut i on : 12bi t ( 100% F. S. ) , O ccupi ed byt e : 2 Byt e Target val ue ( 0 area) 12bi t 0 0 0 0 Target value(Lower 12 bits) * b0 b15 b11 Put 0 i n upper 4 bi t s ( N ot e) M oni t or t he out put pressure. Resol ut i on : 12bi t ( 100% F.

ZP

M6 x 1 A6 Mounting M8 x 1 A8 U C Flat Flat with ribs M4 x 0.7 B4 M5 x 0.8 B5 D Deep M6 x 1 B6 B Bellows UT Thin flat CT Thin flat with ribs M8 x 1.25 B8 Material N S NBR Silicon rubber Table (1) Pad Diameter/Pad Type Dia.

Table of Contents

Caution 8-21-6 6 Guide Cylinder Series MGG Specifications JIS Symbol MX Standard Stroke Standard stroke (mm) Long stroke (mm) Model Bearing type Bore size (mm) MTS 20 250, 300, 350, 400 75, 100, 125, 150, 200 MY 25 350, 400, 450, 500 MGGM Slide bearing 32 350, 400, 450, 500, 600 CY 40 350, 400, 450, 500, 600, 700, 800 75, 100, 125, 150, 50 350, 400, 450, 500, 600, 700, 800, 900, 1000 MG Courtesy

NCQ2/CQ2

YB-03 YB-05 YB-08 YB-10 32, 40 50, 63 80 100 12 7 25 9 34 11.5 depth 7.5 UT L 12 9 32 11 42 14.5 depth 8.5 UA C Mounting and Auto Switches Made to Order 16 11 38 13 52 18 depth 12 19 14 50 17 62 21 depth 14 Material: Chromium molybdenum steel (Nickel plated) (mm) Applicable bore size (mm) Bore size (mm) Weight (g) T2 V W RS T1 Part no. UA C d1 d2 H K L UT Weight (g) Part no.