Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

x 0.7, depth 4.5 Bottom hole diameter 4.2 22 0.05 W 8 0.05 33 D B Operating port 2-M5 x 0.8 10 J 5 Mounting base side B D 12 9.5 Across AA MXP12-25B Without magnet and switch rail 2-M3 x 0.5, depth 3.5 2-M2 x 0.4, depth 3 For magnet mounting For rail mounting 8 5.7 3.5 6-M4 x 0.7, depth 4.5 20 20 L (mm) Model H M W J S Z K MA V L MXP12-15B 40 29 55 68 15 76 22 9 59 24 MXP12-25B 60 49 75

Table of Contents

How to Order . 60 61 62 63 64 66 67 69 69 70 71 72 74 75 76 76 77 78 78 80 81 82 84 88 89 90 91 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 92 93 94 94 95 95 95 95 96 96 96 96 96 97 97 98 98 99 99 99 100 100 102 103 103 104 106 106 107 109 111 111 Caution .

1

, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 * Manufacture of intermediate strokes at 1 mm intervals is possible.

MXQ

MXQ8-75 MXQ8-75 MXQ8-10 MXQ8-10 MXQ8-20 MXQ8-20 MXQ8-30 MXQ8-30 MXQ8-10 MXQ8-20 MXQ8-30 0.03 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.06 MXQ8-50 MXQ8-40 MXQ8-50 MXQ8-50 MXQ8-40 MXQ8-40 MXQ8-20 MXQ8-20 MXQ8-20 0.010 MXQ8-30 MXQ8-30 MXQ8-40 MXQ8-40 MXQ8-30 MXQ8-40 MXQ8-75 MXQ8-75 MXQ8-75 0.02 MXQ8-75 MXQ8-75 MXQ8-75 0.04 MXQ8-20 MXQ8-40

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

MXW

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (Stroke (mm)) 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Auto switch Nil Without

Magnetically Coupled Rodless Cylinder

75 30 1 5.5 11 62 12.5 73 14 28 87 RJ0806LN CY1S20-Z M10 x 1 M6 x 1 Rc1/8 NPT1/8 G1/8 40 70 89 90 38 1.5 4.5 9 73 16.5 87 18.5 37 106 RJ1007LN CY1S25-Z M14 x 1.5 M6 x 1 Rc1/8 NPT1/8 G1/8 40 70 98 90 42 1.5 4.5 9 73 16.5 96 18.5 37 106 RJ1412LN CY1S32-Z M20 x 1.5 M8 x 1.25 Rc1/8 NPT1/8 G1/8 40 75 118 110 50 3 5.5 11 91 18.5 116 18.5 37 128 RJ2015HN CY1S40-Z M20 x 1.5 M8 x 1.25 Rc1/4 NPT1/

Compact Cylinder

Fix the cylinder by using the OA thread that are provided with the cylinder tube. 50 55 60 65 70 75 80 85 90 95 55 60 65 70 75 80 85 90 95 100 110 130 150 M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 60 65 70 75 80 85 90 95 100 105 115 135 155 M6 x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 105 l x 115 l x 135 l x 155

CE

CEP1 3-point Preset Counter (CEU1) CE1 CE2 Output terminal: 3 points DIN rail mountable Hold output, Comparison output, One shot output ML2B C J G5-S CV MVGQ CC RB Series Variations J Series CE1 Standard stroke (mm) Series CEP1 Standard stroke (mm) Bore size (mm) Manufacturable stroke range Bore size (mm) D250 400 500 300 175 200 150 125 100 75 100 50 75 25 50 25 12 12 equivalent 25 to

CE

ML2B C J G5-S CV MVGQ Power supply voltage 12 to 24 VDC Abundant stroke variations Improved noise resistance CC RB Series Variations J System Configuration Series CE1 Standard stroke (mm) Series CEP1 Standard stroke (mm) Bore size (mm) Manufacturable stroke range Bore size (mm) DExtension cable Series CE1-R 250 400 500 300 175 200 150 125 100 75 100 50 75 25 50 25 12 12 equivalent 25 to

CE

ML2B C J G5-S CV MVGQ Power supply voltage 12 to 24 VDC Abundant stroke variations Improved noise resistance CC RB Series Variations J System Configuration Series CE1 Standard stroke (mm) Series CEP1 Standard stroke (mm) Bore size (mm) Manufacturable stroke range Bore size (mm) DExtension cable Series CE1-R 250 400 500 300 175 200 150 125 100 75 100 50 75 25 50 25 12 12 equivalent 25 to

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Standard Nil A Both ends adjuster P Note) Axial piping CS Extension

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Electrical entry 3 (L) 5 (Z) Perpendicular In-line 3-wire (NPN) 5 V, 12 V M9N M9NV IC circuit 3-wire (PNP) M9P M9PV Solid state switch M9B M9BV 2-wire 12 V Relay PLC Grommet Yes 24 V 3-wire (NPN) F9NW F9NWV 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 3-wire (PNP) F9PW F9PWV F9BW 12 V F9BWV 2-wire Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL

ZCUK

A93 A90 M9N M9P M9B F9NW F9PW F9BW A93V A90V M9NV M9PV M9BV F9NWV F9PWV F9BWV 2-wire Relay, PLC IC circuit No 5 V, 12 V 100 V or less 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) IC circuit 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Electrical entry 3 (L) 5 (Z) Perpendicular In-line 3-wire (NPN) 5 V, 12 V M9N M9NV IC circuit 3-wire (PNP) M9P M9PV Solid state switch M9B M9BV 2-wire 12 V Relay PLC Grommet Yes 24 V 3-wire (NPN) F9NW F9NWV 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 3-wire (PNP) F9PW F9PWV F9BW 12 V F9BWV 2-wire Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL

MHK2

connector In-line 0.5 (Nil) 3 (L) 5 (Z) DC AC Auto Switch model Special function Electrical entry Indicator light Wiring (Output) Type Perpendicular 3-wire (NPN) 3-wire (PNP) 24 V 12 V M9NV M9N IC circuit Solid state switch M9PV M9P Relay, PLC Standard Grommet Yes 2-wire M9BV M9B Water resistant F9BA (2-color indication) Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL

MHK2

connector In-line 0.5 (Nil) 3 (L) 5 (Z) DC AC Auto Switch model Special function Electrical entry Indicator light Wiring (Output) Type Perpendicular 3-wire (NPN) 3-wire (PNP) 24 V 12 V M9NV M9N IC circuit Solid state switch M9PV M9P Relay, PLC Standard Grommet Yes 2-wire M9BV M9B Water resistant F9BA (2-color indication) Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Example) -M9NL Symbol Nil A B C Mounting position Valve open/closed Valve open Valve closed Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3 S1 T1 U1 4079 SS592 SS630 SSE38 1232-70 3310-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

Compact Cylinder Series NCQ8

L M9NL 197in (5 m) .