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15

on page 800 for details about motor mounting and included parts.

Table of Contents

, 300, 350 400, 450, 500 15 1000 (2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Please contact SMC if the maximum stroke will be exceeded.

2

10 10 P1 = 0.5 MPa P1 = 0.7 MPa IDG 20 20 P1 = 0.7 MPa IDG100 IDG75 30 30 IDG75H IDG100H 40 40 50 50 0 200 400 600 800 1000 0 400 800 1200 1600 Outlet air flow rate (L/min [ANR]) Outlet air flow rate (L/min [ANR]) Standard dew point40C [Symbol: L], 60C [Symbol: S] IDG30LA, IDG50LA IDG60LA, IDG60SA Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C)

MY1

MY1B16/20 Stroke (LL) L PA 2 x 2-B counterbore depth C LD through-hole 4-MM depth M YW QW NW PB PG Q + Stroke Floating bracket mounting thread (2-JJ thread depth from bottom of counter bore KK) PC 1 LW M5 x 0.8 (Port) 2-T counterbore depth E M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

High Vacuum Angle Valve

Uniform baking temperature 108 300 10.6 300 138 315 18.5 800 Common to all series.

1

Mounting bracket Bore size (mm) 6 10 16 Foot CJ-L006B CJ-L010C CJ-L016C Ordering Example of Cylinder Assembly Flange CJ-F006B CJ-F010C CJ-F016C T-bracket* CJ-T010C CJ-T016C Cylinder model: CDJ2D16-45SZ-NW-M9BW-B * T-bracket is used with double clevis (D).

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

Mechanically Jointed Rodless Cylinder Series MY1

( * * % # NW A GB N Z & ' ( . WW WW /*#! ( * * % # . . . 0 0 /*#! ( * * % # XX XX Centralized piping type Centralized piping type VV VV . . /*#! ( * * % # /*#!

Modular F.R.L. Units

Example) AF30-03B-2R-A-X430 X430 Low temperature X440 High temperature Symbol Description Nq Body size 20 30 40 50 60 Symbol Description Nq Body size 30 40 50 60 Nil Rc N*1 NPT F*2 G + Nw Pipe thread type Nil Rc N*1 NPT F*2 G + Nw Pipe thread type 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Ne Port size Nr Option (Mounting) Nil Without mounting

XL

1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure 1MPa = 145 psi

MY1

NG 51 59 82 103 NW 92 112 140 176 NH 75 95 124 157 P Rc 3/8 Rc 3/8 Rc 1/2 Rc 1/2 MM M8 x 1.25 M8 x 1.25 M10 x 1.5 M12 x 1.75 YW 92 112 140 176 T 15 16 "P" indicates cylinder supply ports.

High Vacuum Angle Valve, XL Series

1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure 1MPa = 145 psi

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load weight (kg) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com m1 m2 m3 Moment (Nm) M3 = F3 x L3 F3 M1 = F1 x L1 F1 M2 = F2 x L2 F2 L1 L2 L3 1.

CATALOG

Outside Local Area: (800) 258-9200 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Horizontal mounting MX MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2.

A

Outside Local Area: (800) 258-9200 !

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

MY3B Basic type M3: Yawing Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm/s) Maximum operating speed Applicable unit 500 800 1000 1500 External guide Stroke positioning None MY3A Cylinder stroke end None MY3B Note 2) Use of X416, X417 holder mounting brackets