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Table of Contents

to 100 MGPL32 to 100 i !

CATALOG

-080-24A 80 36 11 72 85 45 110 CG-100-24A 100 50 12 93 100 60 130 Courtesy of Steven Engineering, Inc. !

A

-080-24A 80 36 11 72 85 45 110 CG-100-24A 100 50 12 93 100 60 130 Courtesy of Steven Engineering, Inc. !

CQS

Rubber bumper is standard equipment for long stroke type. 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 Action 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 D Double acting 25 For "Manufacture of Intermediate Strokes", refer to page 7-4-5. Applicable Auto Switch/Refer to page 7-9-1 for further information on auto switches.

CQS

Thus, it can be used in a Class 100 clean room.

Table of Contents

Caution 5 150 100 200 300 1.

Hydraulic

Refer to page 100.

MXS

MXS12-75 MXS12-50 MXS12-75 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N

MXS Series Air Slide Table

MXS12-75 MXS12-50 MXS12-75 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 Table deflection mm Table deflection mm Table deflection mm 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load N 1N = 0.2248 lbf

Rotary Table/

type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6 4 2 Load N Load N MSQ50 MSQB7A MSQB50 (Basic type) 100 200 Displacement m Displacement m 90 150 80 120 50 MSQA50 (High precision type) 70 60 0 0 20 40 60 80 100 120 6 8 10 14 12 2 4 Load N Load N 5 Rotary Table Air Consumption Air consumption is the volume

Microspeed Cylinder

The chamber is set up on a Class 100 clean bench.

Magnet: D (Built-in), Mounting: F (Front Flange), Bore Size: 32mm, Port Thread: Rc, Stroke: 100mm, Rod Boot: None, Lock Style: HL (With Rear End Lock Locking Style), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence, Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port thread type: Rc,

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence, Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port thread type: Rc,

Compact Cylinder

ClBQ2B20-10DC-Rl -15DC-Rl -20DC-Rl -25DC-Rl -50DC-Rl -75DC-Rl -100DC-Rl ClBQ2B25-10DC-Rl -15DC-Rl -20DC-Rl -25DC-Rl -50DC-Rl -75DC-Rl -100DC-Rl ClBQ2B32-10DC-Rl -15DC-Rl -20DC-Rl -25DC-Rl -50DC-Rl -75DC-Rl -100DC-Rl ClBQ2B40-10DC-Rl -15DC-Rl -20DC-Rl -25DC-Rl -50DC-Rl -75DC-Rl -100DC-Rl ClBQ2B50-10DC-Rl -15DC-Rl -20DC-Rl -25DC-Rl -50DC-Rl -75DC-Rl -100DC-Rl ClBQ2B63-10DC-Rl -15DC-Rl -20DC-Rl