Air Fittings & Tubing

A B Effective area (mm2) Weight (g) M-5ALHN-4 M-5ALHU-3, -4 12 14 11.5 12.3 14.3 8.5 10.5 8 8.8 10.8 5 7 4.5 5 7 1.8 2.5 1.6 1.8 2.5 1.4 2.4 1.1 1.4 2.4 3.2 3.7 3.2 3.3 3.9 M-5ALHN-4 M-5ALHN-6 M-5ALHU-3 M-5ALHU-4 M-5ALHU-6 SM5B, #11 to #15 Kl M-5ALHN-6 M-5ALHU-6 Ml Hl Dl MS Hose nipple: M-5H-4, -6 Tl C D Part No.

Table of Contents

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

Antistatic Tubing TA  Series

1208 12 8 BU C B Blue (Translucent) Clear (Material color) M-3AU-2, M-3AU-4 M-5AU-2, M-5AU-4 M-5AU-6, M-5H-4 M-5H-6 MS-5AU-4, MS-5AU-6 MS-5H-4, MS-5H-6 Black (Translucent) 500

IDG

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

2

(mm) D Weight (g) Nylon Urethane Note) D L1 L2 A M Q O N 4 1/8 KQ2D04-01P 12 8.2 15.8 22.6 21.5 13.3 5.7 6 3.2 6 6 3.6 9.1 1/4 KQ2D04-02P 17 8.2 15.8 26 22.5 13.3 5.7 6 3.2 6 6 3.6 19 O N L1 M 6 1/8 KQ2D06-01P 12 10.4 16.8 23.6 23.6 13.3 6.7 6 3.2 13.9 11 5.4 9.7 1/4 KQ2D06-02P 17 10.4 16.8 27 24.6 13.3 6.7 6 3.2 13.9 11 5.4 19.3 3/8 KQ2D06-03P 21 10.4 16.8 26.5 24.1 13.3 6.7 6 3.2 13.9 11

Series IDG

Tightening torque for mounting of membrane module and case (for IDG5, 10, 20, 5H, 10H, 20H) Tighten within the prescribed tightening torque range. Tightening outside of this range can cause damage to the membrane module, case and mounting screws, or cause poor sealing, etc. (Confirm the tightening torque range in the instruction manual.) 6.

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

M-5G1 Applicable model Material Applicable thread PVC Stainless steel 304, NBR M-5G2 Stainless steel 316, Special FKM M-5G3 Gasket M5 MS-5ALHU-6 MS-5HLH-4 MS-5HLH-6 MS-5ATHU-6 M-5GH Nylon 66, GF30% MS-5H-4 MS-5HL-4 MS-5HLH-4 MS-5-4-P01 Stainless steel 316 Cap nut MS-5H-6 MS-5HL-6 MS-5HLH-6 MS-5-6-P01 Stainless steel 316 Precautions Be sure to read this before handling the products.

CJP

Panel Mounting Style CJPB M5 x 0.8 Exhaust port 5: C0.5 10, 15: C1 Hose nipple Refer to page 6-2-13. Mounting dimensions of CJ-5H-6. ( ) denotes the dimensions of CJ-5H-4. Rod end nut (Refer to page 6-2-13.)

CJP

Panel Mounting Style CJPB M5 x 0.8 Exhaust port 5: C0.5 10, 15: C1 Hose nipple Refer to page 6-2-13. Mounting dimensions of CJ-5H-6. ( ) denotes the dimensions of CJ-5H-4. Rod end nut (Refer to page 6-2-13.)

KJ

-6 M-5ALHU-3 M-5ALHU-4 M-5ALHU-6 12 14 11.5 12.3 14.3 8.5 10.5 8 8.8 10.8 5 7 4.5 5 7 1.8 2.5 1.6 1.8 2.5 1.4 2.4 1.1 1.4 2.4 3.2 3.7 3.2 3.3 3.9 M5 x 0.8 M-5ALHN-6 M-5ALHU-6 Width across flats 7 M5 x 0.8 Hose Nipple: M-5H-4/-6 Effective area (mm2) Weight (g) A B C D E H Model M-5H-4 M-5H-6 7 8 2.1 4.0 2.7 3.9 15.5 16.5 8.5 9.5 7 8 1.8 2.5 6.5 8.5 M5 x 0.8 Width across flats 7 15-2-57 5 Series

KR

E Model L B D MS-5H-4 MS-5H-6 15.5 16.5 6.5 8.5 7 8 7 8 1.8 2.5 M5 x 0.8 Width across flats B Hose Elbow: MS-5HLH-4/6 Weight (g) 4.2 6.2 Effective area (mm2) 1.4 2.5 Model L A lB C D E F M N Width across flats 7 MS-5HLH-4 MS-5HLH-6 15.8 17.8 12 13.5 7 8 8.5 9.5 1.8 2.5 7 8 6.5 8.5 15 16 5.5 6 M5 x 0.8 Universal Elbow: MS-5UL Universal Tee: MS-5UT Width across flats 7 Width across flats 7

Series M Miniature Fittings M3, R(PT) 1/8, M5

A B Effective orifice(mm2 Weight (g) ) M-5ALHN-4 M-5ALHU-3, -4 M-5ALHN-4 M-5ALHN-6 M-5ALHU-3 M-5ALHU-4 M-5ALHU-6 1.4 2.4 1.1 1.4 2.4 1.8 2.5 1.6 1.8 2.5 8.5 10.5 8 8.8 10.8 5 7 4.5 5 7 12 14 11.5 12.3 14.3 3.2 3.7 3.2 3.3 3.9 M-5ALHN-6 M-5ALHU-6 Hose nipple: M-5H-4, -6 C D Part No.

Stainless Steel One-touch Fittings Series KG

L B D MS-5H-4 MS-5H-6 15.5 16.5 6.5 8.5 2.1 4.0 2.5 3.7 7 8 7 8 1.8 2.5 Hose elbow: MS-5HLH-4, -6 B Effective orifice(mm 2) Weight (g) Part No.

1

H4 4/2.5 With a fixed orifice (0.8) CJ-5H-4 H6 6/4 CJ-5H-6 MH4 4/2.5 Without fixed orifice M-5H-4 MH6 6/4 M-5H-6 JA CJ2W Double acting, Double rod Non-rotating rod type CJ2K Double acting, Single rod MXH Single acting (Spring return/extend) Built-in speed controller type CJ2Z Double acting, Single rod MXQ CJ2ZW Double acting, Double rod Dimensions (Dimensions other than below are the same

Made to Order

H4 4/2.5 CJ-5H-4 With a fixed orifice (0.8) H6 6/4 CJ-5H-6 MH4 4/2.5 M-5H-4 Without fixed orifice MH6 6/4 M-5H-6 Dimensions (Dimensions other than below are the same as standard type.) Hose nipple Width across flats 8(7) (12) The above figure shows the 6/4 hose nipple mounting dimensions.

1

Function 2-Hexagon socket head set screw H4 4/2.5 CJ-5H-4 With a fixed orifice (0.8) H6 6/4 CJ-5H-6 MH4 4/2.5 M-5H-4 Without fixed orifice MH6 6/4 M-5H-6 Dimensions (Dimensions other than below are the same as standard type.)

HRX-OM-Q026

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release Fan Breaker Trip alarm . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and

HRX-OM-M090

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-M090 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Drain pan

Bernoulli Gripper

5AN-6 V V Miniature fittings Barb fitting for soft tubing M-5AU-6 V V Hose nipple M-5H-6 V T Stainless steel One-touch fittings Male connector KQ2H04-M5G1 V V Hexagon socket head male connector KQ2S04-M5G1 V V KQ2S06-M5G1 V T Stainless steel 317 One-touch fittings Hexagon socket head male connector KQG2S04-M5 V V Metal parts: Stainless steel 303 Barb fitting for soft tubing MS-5AU-6 V V Miniature

HRX-OM-S004

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm buzzer stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector . 6-8 6.3.3 How to release the pump thermal trip . 6-10 6.4 Other Errors . 6-11 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control