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Note 3) Fitting is ordered separately. Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-Y2A(J/K)3-B5 ZP3B-Y2A(J/K)6-B5 ZP3B-Y2A(J/K)10-B5 ZP3B-Y2A(JB/K)15-B5 ZP3B-Y2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

Note 3) Fitting is ordered separately. Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-Y2A(J/K)3-B5 ZP3B-Y2A(J/K)6-B5 ZP3B-Y2A(J/K)10-B5 ZP3B-Y2A(JB/K)15-B5 ZP3B-Y2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

Note 3) Fitting is ordered separately. Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-Y2A(J/K)3-B5 ZP3B-Y2A(J/K)6-B5 ZP3B-Y2A(J/K)10-B5 ZP3B-Y2A(JB/K)15-B5 ZP3B-Y2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

5AN-4 N6 For 6 nylon tubing M-5AN-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 B Model 30 A B Vacuum inlet direction q Pad dia.

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Width across flats 7 E N S U F GN GS HS 04 06 08 UM U2 6.5 0.9 M-5AU-2 3 6 10 15 20 J JB K U4 8.5 1.8 M-5AU-4 ZP3 T U2 6.5 0.9 M-5AU-2 U4 8.5 1.8 M-5AU-4 U6 10.5 2.5 M-5AU-6 10 13 16 Construction p. 161 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber, HS: Semiconductive

8 2.1 5.5 7.1 7.7 M-01H-4 M-01H-6 15-2-56 4 Miniature Fittings Series M Series M5 Barb Fitting for Nylon Tubing: M-5AN-4/-6 Effective area (mm2) Weight (g) Model A B C 12 14 5 8 1.8 2.5 2.1 4.0 1.6 1.7 M-5AN-4 M-5AN-6 M5 x 0.8 Width across flats 7 Barb Fitting for Soft Tubing: M-5AU-3/-4/-6 K Effective area (mm2) Weight (g) Model C B A M M-5AU-3 11.5 4.5 1.6 1.7 1.5 1.8 2.5 2.1 4.0 1.6 5

A B C Effective area (mm2) Weight (g) M-5AU-3 11.5 4.5 1.6 1.7 1.5 M-5AU-4 M-5AU-6 12 14 5 7 1.8 2.5 2.1 4.0 1.6 1.8 SM5B, #3 to #5 Barb elbow for nylon tube: M-5ALN-4, -6 Barb elbow for soft tube: M-5ALU-3, -4, -6 Part No.

Operating Pressure 104 to 107 Surface resistance Note) Miniature fittings: Only the following types are available for M and MS series Max. operating pressure (MPa) M Series MS Series M-3AU-3, M-3AU-4, M-5AU-3, M-5AU-4 M-5AU-6, M-5H-4, M-5H-6 MS-5AU-3, MS-5AU-4, MS-5AU-6 MS-5H-4, MS-5H-6 How to Order 100 TAS1065 B Operating temperature (C) Length per roll Color Length 20 m roll 100 m reel

8 2.1 5.5 7.1 7.7 M-01H-4 M-01H-6 15-2-56 4 Miniature Fittings Series M Series M5 Barb Fitting for Nylon Tubing: M-5AN-4/-6 Effective area (mm2) Weight (g) Model A B C 12 14 5 8 1.8 2.5 2.1 4.0 1.6 1.7 M-5AN-4 M-5AN-6 M5 x 0.8 Width across flats 7 Barb Fitting for Soft Tubing: M-5AU-3/-4/-6 K Effective area (mm2) Weight (g) Model C B A M M-5AU-3 11.5 4.5 1.6 1.7 1.5 1.8 2.5 2.1 4.0 1.6 5

M-5GH P . 28 P . 28 15-3-26 3 Miniature Fittings Stainless Steel 316 Series MS Barb Fitting for Soft Tube: MS-5AU-3/4/6 Weight (g) 1.4 1.5 Effective area (mm2) 1.7 2.1 Model C D L MS-5AU-3 MS-5AU-4 4.5 5 1.6 1.8 11.5 12 Width across flats 7 M5 x 0.8 MS-5AU-6 7 2.5 14 4.0 1.7 Barb Elbow for Soft Nylon: MS-5ALHU-3/4/6 K Weight (g) 3.0 3.1 Effective area (mm2) 1.1 1.4 MS-5ALHU-3, -4 D L Model

the stud axis 4/2.5 x M5 4/2.5 x M5 MS-5HLH-4 MS-5ATHU-4 For soft nylon and polyurethane tube KG KFG2 6/4 x M5 6/4 x M5 MS-5ATHU-6 MS-5HLH-6 MS MS P.338 P.339 KKA KP LQ MQR T IDK 337 MS Series Barb Fitting for Soft Tube: MS-5AU-3/4/6 Weight (g) 1.4 1.5 Effective area (mm2) 1.7 2.1 Model C D L MS-5AU-3 MS-5AU-4 4.5 5 1.6 1.8 11.5 12 MS-5AU-6 7 2.5 14 4.0 1.7 Width across flats 7 Barb Elbow

M-5GH To seal M5 thread M-5G1 P. 134 P. 134 132 Miniature Fittings Series MS Barb fitting for soft nylon: MS-5AU-3, -4, -6 Effective orifice(mm 2) Weight (g) D L Part No. C MS-5AU-3 MS-5AU-4 4.5 5 11.5 12 1.7 2.1 1.4 1.5 1.6 1.8 MS-5AU-6 7 2.5 14 4.0 1.7 Barb elbow for soft nylon: MS-5ALHU-3, -4, -6 Effective orifice(mm 2) Weight (g) MS-5ALHU-3, -4 D L Part No.

A B C Effective orifice(mm2 Weight (g) ) M-5AU-3 11.5 4.5 1.6 1.7 1.5 M-5AU-4 M-5AU-6 12 14 5 7 1.8 2.5 2.1 4.0 1.6 1.8 Barb elbow for nylon tube: M-5ALN-4, -6 Barb elbow for soft tube: M-5ALU-3, -4, -6 Part No.

BO Edition B Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

1/4 1 1/4 2.59 1-14 1/2 5/8 3/4 3/4 5/8 3/4 D I M E N S I O N S O V E R S I Z E D R O D S I N G L E D E TA C H A B L E R E A R C L E V I S M O U N T I N G T Y P E NC A1C (XB5) XD BORE (INCH) KK A AA B C D DD E EA EE FA G J M MM P ZD WF CD LR F L LF CB CW Y 6 1/8 5/16-24 200 (2) 1 1/8 2.6 1.5 1/2 2 1/2 0.3 1.26 1.06 1 2.40 6 5/8 1 3/8 3 5/8 2.09 3/4-16 7/8 3/8 3/8 1/2 1/2 5/8 3/8 3/4 3/4 1

T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T

Barb one-touch Reducer 3.2, 4 Port size 3 5 32 04 M3 x 0.5 M5 x 0.8 3.2 4 15-6-28 5 Miniature Fittings Series M Barb fitting: M-3AU-2, M-5AU-2 Applicable tubing O.D. x I.D.

(mm) Thread Weight g A B C D E F H Model Applicable tubing M3 x 0.5 M5 x 0.8 M-3AU-2 M-5AU-2 0.9 0.7 1.5 4.5 7 9 10 3 4 5 7.7 4 2 x 1 .2 3 2 1 4 Thread Parts list Material Brass Brass No. 1 2 3 Description Sleeve Barb fitting Gasket Note Electroless nickel plated Electroless nickel plated E D F NBR, Stainless steel B C A Width across flats H Barb elbow: M-3ALU-2, M-5ALHU-2 Applicable tubing

(mm) Thread Weight g A B C D E F H Model Applicable tubing M3 x 0.5 M5 x 0.8 M-3AU-2 M-5AU-2 0.9 0.7 1.5 4.5 7 9 10 3 4 5 7.7 4 2 x 1 .2 3 2 1 4 Thread Parts list Material Brass Brass No. 1 2 3 Description Sleeve Barb fitting Gasket Note Electroless nickel plated Electroless nickel plated E D F NBR, Stainless steel B C A Width across flats H Barb elbow: M-3ALU-2, M-5ALHU-2 Applicable tubing