Series: ø22mm, Valve Type: N.C., Type: Standard, Tubing Size: ø26mm, Pilot Port Thread: ø6mm One-touch Fitting, Pilot Port Position: 1, Material: FKM, Option: With Flow Rate Adjustment

Series: 6 (ø22mm), Valve Type: 0 (N.C.), Type: Standard, Tubing Size: 25A (ø32mm), Pilot Port Thread: N (NPT 1/8), Pilot Port Position: 2, Material: N (EPDM)

Series: ø22mm, Valve Type: N.C., Type: Standard, Tubing Size: ø32mm, Pilot Port Thread: NPT 1/8, Pilot Port Position: 2, Material: EPDM, Option: -

Table of Contents

VN LVC LVA For manual override J2 LVH W T R N Z M LVD Manual override 16 LVQ 1 1 LQ L 2 2 2 2 LVN n-3/8, 1/2 (VCA30) n-1/2, 3/4 (VCA40) OUT port J3 P = K (Pitch) J1 TI/ TIL 2-1/2 (VCA30), 3/4 (VCA40) IN port (Front ported) PA PAX L Dimension (mm) Formulas VV2CA3 Side ported: L1 = n x 35 + 33, L2 = n x 35 + 44 Front ported: L1 = n x 35 + 69, L2 = n x 35 + 80 VV2CA4 Side ported: L1 = n x 41

2

A L 2 x O l/A: Brass, N: Brass + Electroless nickel plated Note) D is maximum diameter.

Table of Contents

Stations Stations L L1 L2 6 215 224 7 243 252 8 271 280 9 299 308 10 327 336 1 75 84 2 103 112 3 131 140 4 159 168 5 187 196 Formula L1 = 28 x n + 47 L2 = 28 x n + 56 3-5-22 23 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR2000 Plug-in type/Non plug-in type Manifold/Option Parts Assembly Throttle valve spacer: VVFS2000-20A-1 (Plug-in type) VVFS2000-20A-2

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

_r __ _ M ;; Interface Regulator NARBF2000-00-P-1 (Plug-in type) NARBF2000-00-P-2 (Non plug-in type) Interface Speed Control VVFS2000-20A-1 (Plug-In type) VVFS2DOO-20A-2 (Non plug-in type) 0:,0 ~ *ga 5. ~ Interface speed control / Q[Q ,-,.28 (32.5>', ' w ---i';; ,0.89 1<22.5l1 I I~ : .~~ U N i ~ -!

Air Slide Table

B A1 Shock Absorber/RJ Model A1 A2 B C D E F G J K L1 L2 M N Adjuster part no.

1

35 + 25 (n 2) (n = 2, 3, 4, 5) CJ2 D-A9lV 5 10 35 10 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) CM2 Band mounting CG1 D-H7l/H7lW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) MB D-C7l D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) CA2 D-H7C D-C73C D-C80C 10 15 65 15 + 50(n 2)

VFR

Stations Stations L L1 L2 6 215 224 7 243 252 8 271 280 9 299 308 10 327 336 1 75 84 2 103 112 3 131 140 4 159 168 5 187 196 Formula L1 = 28 x n + 47 L2 = 28 x n + 56 3-5-22 23 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR2000 Plug-in type/Non plug-in type Manifold/Option Parts Assembly Throttle valve spacer: VVFS2000-20A-1 (Plug-in type) VVFS2000-20A-2

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no.

VFS

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no. Body type Plug-in type VVFS2000-22A-1 Non plug-in type VVFS2000-22A-2 Part no.

Process Valve Series VNA

VNA VNB SGC VNC VNH VND VCC 403 Series VNC Threaded Type/Port size: 10A, 15A, 20A, 25A Electrical entry port: G1/2 4 x N Manual override (Non-locking push type) Pilot port 12(P1) 2 x (Back side 10(P2)) 8 1 Bracket Main port 1 (Back side port 2) Port size: refer to table below Main port 1, 2 A 63 63 80 90 L 52 52 62 72 B 42 42 50 60 M 26 26 31 36 K 148 148 159.5 175.5 C 28 28 35 40 N 4.5 4.5

SY

(Station n) .

5 Port Solenoid Valve Series SY3000/5000/7000/9000

EX510-S001 Nil N EX510-S101 P.1715 to 1717 PNP output (COM.)

7

F 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC 6 25A N.C. N P C37 Stainless steel 25 1 K 200 VAC D N.O. L 230 VAC 7 32A N.C. Q CAC408 35 32A Flange M Conduit terminal 24 VDC E N.O. With surge voltage suppressor N 100 VAC 8 40A N.C. R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C.

2/3 Port Valve

Main port Rc(PT) Model E F G L M N P Q D U C T B S A H I J K R 3 8 1 2 3 4 1 VNB2V-10A VNB2V-15A VNB3V-20A VNB4V-25A 52 26 4.5 72.5 80.5 74.5 79.5 82.5 125.5 142.5 24.3 14 55 28 34 42 25 63 124 2.3 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 17.5 20 84 100 92 108 135.5 137 153 154 170 62 72 31 36 5.5 6.5 60.5 73 35 40 43 49 50 60 30 35 80 90 2.3 2.3 151.5 10A, 15A, 20A, 25A Port size Vacuum pilot

Thermo-chiller

/Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

HRS100/150

HECR Circulating fluid return port Rc3/4 HEC Barrel nipple 20A 144 HEB Y-strainer (40 mesh) 20A HED Flow direction HEA Y-strainer (20A) (Accessory) IDH Barrel nipple (20A) (Accessory) 107 HRS100/150 Series Standard Type Recommended External Piping Flow External piping circuit is recommended as shown below. 7 Thermo-chiller 2 Facility water outlet (Water-cooled refrigeration) Facility water

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

R R ot ot at at R io io ot n n at ra ra A io n gl e n n n a g dj g ra us e e ti A ng A n of n g ng of gl e di e le k re of k a e ad dj ct e y ke us io ju y n st gr ti y gr n in g o gr g o o di oo di o v re re v e ve ct e ct io 9 io 9 18 n 0 n 0 0 Angle adjusting screw The rotation range under the adjustment of an angle at 120 is indicated below.