Body Class: 3 (Class 3, Orifice ø8), Valve Type: 0 (Normally Closed), Fitting Type: D (w/Double Ferrule Fittings), Applicable Tube Size: 11 (3/8), Pilot Port Thread Type: N (NPT 1/8), Material: ND (Body: Stainless Steel, Seal: EPDM, Buffer: EPDM, Diaphragm: PTFE), Option 1: 5 [High Back Pressure (0.5 MPa) Tolerant]

Body Class: 3 (Class 3, Orifice ø8), Valve Type: 0 (Normally Closed), Fitting Type: D (w/Double Ferrule Fittings), Applicable Tube Size: 11 (3/8), Pilot Port Thread Type: N (NPT 1/8), Material: ND (Body: Stainless Steel, Seal: EPDM, Buffer: EPDM, Diaphragm: PTFE), Option 1: 9 (High Back Pressure with Indicator)

Body Class: Class 3, Orifice ø8, Valve Type: Normally Closed, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 3/8, Pilot Port Thread Type: NPT 1/8, Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option 1: -, Option 2: -

Body Class: Class 3, Orifice ø8, Valve Type: Normally Closed, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 3/8, Pilot Port Thread Type: NPT 1/8, Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option 1: w/Flow Rate Adjustment, Option 2: -

Body Class: Class 3, Orifice ø8, Valve Type: Normally Closed, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 3/8, Pilot Port Thread Type: NPT 1/8, Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option 1: 5 [High Back Pressure (0.5 MPa) Tolerant], Option 2: -

Body Class: Class 3, Orifice ø8, Valve Type: Normally Closed, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 3/8, Pilot Port Thread Type: NPT 1/8, Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option 1: High Back Pressure with Flow Rate Adjustment, Option 2: -

Body Class: Class 3, Orifice ø8, Valve Type: Normally Closed, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 3/8, Pilot Port Thread Type: NPT 1/8, Material: Body: Stainless Steel, Seal: EPDM, Buffer: EPDM, Diaphragm: PTFE, Option 1: -, Option 2: -

Body Class: Class 3, Orifice ø8, Valve Type: Normally Closed, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 3/8, Pilot Port Thread Type: NPT 1/8, Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option 1: w/Indicator, Option 2: -

Body Class: Class 3, Orifice ø8, Valve Type: Normally Closed, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 3/8, Pilot Port Thread Type: NPT 1/8, Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option 1: High Back Pressure with Indicator, Option 2: -

Body Class: Class 3, Orifice ø8, Valve Type: Normally Closed, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 3/8, Pilot Port Thread Type: NPT 1/8, Material: Body: Stainless Steel, Seal: EPDM, Buffer: EPDM, Diaphragm: PTFE, Option 1: w/Flow Rate Adjustment, Option 2: -

Body Class: Class 3, Orifice ø8, Valve Type: Normally Closed, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 3/8, Pilot Port Thread Type: NPT 1/8, Material: Body: Stainless Steel, Seal: EPDM, Buffer: EPDM, Diaphragm: PTFE, Option 1: w/Indicator, Option 2: -

Body Class: Class 3, Orifice ø8, Valve Type: Normally Closed, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 3/8, Pilot Port Thread Type: NPT 1/8, Material: Body: Stainless Steel, Seal: EPDM, Buffer: EPDM, Diaphragm: PTFE, Option 1: 5 [High Back Pressure (0.5 MPa) Tolerant], Option 2: -

Body Class: Class 3, Orifice ø8, Valve Type: Normally Closed, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 3/8, Pilot Port Thread Type: NPT 1/8, Material: Body: Stainless Steel, Seal: EPDM, Buffer: EPDM, Diaphragm: PTFE, Option 1: High Back Pressure with Indicator, Option 2: -

Series KP/KPQ/KPG

10 15 20 10 1in = 25.4mm 1ft = 0.3048m 15 Series KP/TPH/TPS Clean Blowing System Related Equipment Air Operated Valve Series LV Low particulate generating valve with excellent corrosion resistance Threaded type/Series LVA (basic type) Note 1) PFA body not available for LVA10 Series Body material Port size Rc 1/8 1/4 3/8 1/2 3/4 Orifice size (mm) LVA10 Series LVA 2 Note 1) LVA20 4 PFA LVA30

Series KP/KPQ/KPG

10 15 20 10 1in = 25.4mm 1ft = 0.3048m 15 Series KP/TPH/TPS Clean Blowing System Related Equipment Air Operated Valve Series LV Low particulate generating valve with excellent corrosion resistance Threaded type/Series LVA (basic type) Note 1) PFA body not available for LVA10 Series Body material Port size Rc 1/8 1/4 3/8 1/2 3/4 Orifice size (mm) LVA10 Series LVA 2 Note 1) LVA20 4 PFA LVA30

KP/KPQ/KPG

radius mm Tubing roll length m 10 15 20 10 12 Series KP/TPH/TPS Clean Blowing System Related Equipment Air Operated Valve Series LV Low particulate generating valve with excellent corrosion resistance Threaded type/Series LVA (basic type) Note 1) PFA body not available for LVA10 Series Body material Port size Rc 1/8 1/4 3/8 1/2 3/4 Orifice size (mm) LVA10 Series LVA 2 Note 1) LVA20 4 PFA LVA30

Manually Operated Integral Fitting Type/Threaded Type Series LVH

TL/TIL LQ3 Guideline for tightening torque (Number of turns) Breaking torque (Nm) Tightening torque (Nm) Size LVA20 LVA30 LVA40 LVA50 2 to 3 0.5 to 1 2 to 3 turns 6 to 8 2 to 3 3 to 4 turns 11 to 14 5 to 7 3 to 4 turns 18 to 20 8 to 10 3 to 4 turns Guideline for tightening torque Number of turns when the fitting is screwed into the body with 2 to 3 windings of sealant tape applied to threaded

Air/Manually Operated High Purity Chemical Valve Series LV

Double acting Suck back Single type P P P A B A B Unit Single type Unit Air Operated Threaded Type Series LVA P.7 to P.14 LVA10 LVA20 LVA30 LVA40 LVA50 Model Orifice diameter 2 4 8 12 20 Port size Body material 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 SUS316 PPS PFA Valve type Type Symbol Basic type N.C. PA PB PA N.O. B A B A B A PB N.C. N.O.

SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can be selected based on the customers application. Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation.

SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can be selected based on the customers application. Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation.