Body Class: Class 2, Orifice ø4, Valve Type: Normally Closed, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 1/4, Pilot Port Thread Type: NPT 1/8, Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option 1: -, Option 2: -

Body Class: Class 2, Orifice ø4, Valve Type: Normally Closed, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 1/4, Pilot Port Thread Type: NPT 1/8, Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option 1: 5 [High Back Pressure (0.5 MPa) Tolerant], Option 2: -

Air Slide Table Series MXJ

MXJ4-5 MXJ-AD4-10 MXJ4-10 MXJ6-5 MXJ-AD6-10 MXJ6-10 With magnet and mounting screw MXJ6-15 MXJ-AD6-15 MXJ8-5 M1.7 x 6 Cross recessed head machine screw for precision instruments) M1.7 x 10 Cross recessed head machine screw for precision instruments) MXJ-AD6-10 MXJ8-10 MXJ8-15 MXJ-AD8-20 MXJ8-20 Stepped positioning pin MXJ-LP 0 0.018 4h8 Use the optional stepped positioning pin that is provided

Prevents Micro-Bubbles

LVA10 LVA20 LVA30 LVA40 LVA60 12 22 LVA50 Model Orifice diameter 2 4 8 20 Body material Note 1) Port size Stainless steel (SUS316) 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 PAX PPS Valve type PFA PB Type Symbol Basic type N.C. PA PB PA N.O. A B B A B A PB Double acting N.O. Double acting N.C. With flow rate adjustment PA PA N.C. B A B A Double acting PB Double acting N.C.

Table of Contents

LVA10 LVA20 LVA30 LVA40 LVA60 12 22 LVA50 Model Orifice diameter 2 4 8 20 Body material Note 1) Port size Stainless steel (SUS316) 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 PAX PPS Valve type PFA PB Type Symbol Basic type N.C. PA PB PA N.O. A B B A B A PB Double acting N.O. Double acting N.C. With flow rate adjustment PA PA N.C. B A B A Double acting PB Double acting N.C.

Body Class: 2 (Class 2, Orifice ø4), Valve Type: 0 (Normally Closed), Fitting Type: D (w/Double Ferrule Fittings), Applicable Tube Size: 07 (1/4), Pilot Port Thread Type: M5x0.8 (or Rc 1/8), Material: AD (Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE), Option 1: 6 (High Back Pressure with Flow Rate Adjustment)

Body Class: 2 (Class 2, Orifice ø4), Valve Type: 0 (Normally Closed), Fitting Type: G (w/Metal Gasket Seal Fittings), Applicable Tube Size: 07 (1/4), Pilot Port Thread Type: M5x0.8 (or Rc 1/8), Material: AD (Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE), Option 1: 6 (High Back Pressure with Flow Rate Adjustment)

Body Class: 2 (Class 2, Orifice ø4), Valve Type: 0 (Normally Closed), Fitting Type: T (Integrated Tubing), Applicable Tube Size: 07 (1/4), Pilot Port Thread Type: M5x0.8 (or Rc 1/8), Material: AD (Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE), Option 1: 6 (High Back Pressure with Flow Rate Adjustment)

Body Class: Class 2, Orifice ø4, Valve Type: Normally Closed, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 1/4, Pilot Port Thread Type: M5x0.8 (or Rc 1/8), Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option 1: High Back Pressure with Flow Rate Adjustment, Option 2: -

Body Class: Class 2, Orifice ø4, Valve Type: Normally Closed, Fitting Type: w/Metal Gasket Seal Fittings, Applicable Tube Size: 1/4, Pilot Port Thread Type: M5x0.8 (or Rc 1/8), Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option 1: High Back Pressure with Flow Rate Adjustment, Option 2: -

Body Class: Class 2, Orifice ø4, Valve Type: Normally Closed, Fitting Type: Integrated Tubing, Applicable Tube Size: 1/4, Pilot Port Thread Type: M5x0.8 (or Rc 1/8), Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option 1: High Back Pressure with Flow Rate Adjustment, Option 2: -

SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can be selected based on the customers application. Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation.

Air Slide Table Series MXP

MXP6-5 MXP-AD6-5 MXP6-10 MXP8-10 MXP-AD8-10 MXP8-20 MXP-AD8-20 With magnet and mounting screw MXP10-10 MXP-AD10-10 MXP10-20 MXP-AD10-20 MXP12-15 MXP-AD12-15 MXP12-25 MXP-AD12-25 MXP16-20 MXP-AD10-20 DMXP16-30 MXP-AD12-25 Note) MXP16-20 and MXP10-20 are common. MXP16-30 and MXP12-25 are common. -X Individual -X 197 Series MXP Construction MXP6 @0 !9 !8 !2 !1 t e y !7 !6 !5 i q w !0 !

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Note MXP6-5 MXP-AD6-5 MXP6-10 MXP10-10 MXP-AD10-10 With magnet and MXP10-20 MXP-AD10-20 mounting screw MXP12-15 MXP-AD12-15 MXP12-25 MXP-AD12-25 MXP16-20 MXP-AD10-20 MXP16-30 MXP-AD12-25 Note) MXP16-20 and MXP10-20 are common. MXP16-30 and MXP12-25 are common. 8-8-11 11 Series MXP Construction MXP6 @1 @0 @2 !2 !1 t e y !9 !8 !7 r !4 !6 u !5 !0 !

Series KP/KPQ/KPG

roll length m 10 15 20 10 1in = 25.4mm 1ft = 0.3048m 15 Series KP/TPH/TPS Clean Blowing System Related Equipment Air Operated Valve Series LV Low particulate generating valve with excellent corrosion resistance Threaded type/Series LVA (basic type) Note 1) PFA body not available for LVA10 Series Body material Port size Rc 1/8 1/4 3/8 1/2 3/4 Orifice size (mm) LVA10 Series LVA 2 Note 1) LVA20

Series KP/KPQ/KPG

roll length m 10 15 20 10 1in = 25.4mm 1ft = 0.3048m 15 Series KP/TPH/TPS Clean Blowing System Related Equipment Air Operated Valve Series LV Low particulate generating valve with excellent corrosion resistance Threaded type/Series LVA (basic type) Note 1) PFA body not available for LVA10 Series Body material Port size Rc 1/8 1/4 3/8 1/2 3/4 Orifice size (mm) LVA10 Series LVA 2 Note 1) LVA20

KP/KPQ/KPG

. bending radius mm Tubing roll length m 10 15 20 10 12 Series KP/TPH/TPS Clean Blowing System Related Equipment Air Operated Valve Series LV Low particulate generating valve with excellent corrosion resistance Threaded type/Series LVA (basic type) Note 1) PFA body not available for LVA10 Series Body material Port size Rc 1/8 1/4 3/8 1/2 3/4 Orifice size (mm) LVA10 Series LVA 2 Note 1) LVA20

Manually Operated Integral Fitting Type/Threaded Type Series LVH

TL/TIL LQ3 Guideline for tightening torque (Number of turns) Breaking torque (Nm) Tightening torque (Nm) Size LVA20 LVA30 LVA40 LVA50 2 to 3 0.5 to 1 2 to 3 turns 6 to 8 2 to 3 3 to 4 turns 11 to 14 5 to 7 3 to 4 turns 18 to 20 8 to 10 3 to 4 turns Guideline for tightening torque Number of turns when the fitting is screwed into the body with 2 to 3 windings of sealant tape applied to threaded

Air/Manually Operated High Purity Chemical Valve Series LV

Double acting Suck back Single type P P P A B A B Unit Single type Unit Air Operated Threaded Type Series LVA P.7 to P.14 LVA10 LVA20 LVA30 LVA40 LVA50 Model Orifice diameter 2 4 8 12 20 Port size Body material 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 SUS316 PPS PFA Valve type Type Symbol Basic type N.C. PA PB PA N.O. B A B A B A PB N.C. N.O.

Body Class: 2 (Class 2, Orifice ø4), Valve Type: 2 (Double Acting), Fitting Type: D (w/Double Ferrule Fittings), Applicable Tube Size: 07 (1/4), Pilot Port Thread Type: N (NPT 1/8), Material: AD (Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE)