Sine Rodless Cylinder Series REA/REB

Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 20 30 40 50 30 20 e Select a bore size from Lo and Fn in Data A. 10 10 Usable range Usable range Load 5 Workpiece 5 Fn 1 0 1 2 3 4 5 6 1 0 Alignment deflection absorbing mechanism 7 8 9 10 11 12 13 1 2 3 4 5 6 7 8 9 10 11 Lo Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) 32 400

Table of Contents

0 1 2 3 4 5 6 7 8 9 10 1112 13 1415 Distance from cylinder shaft center Lo (cm) CX CY1R63 CY1R10 Fn H H 1000 DAllowable driving force Fn (N) Allowable driving force Fn (N) 50 500 Lo 40 30 20 400 L -X 300 H 200 10 100 2020 30 40 50 Usable range 5 Usable range Data 1 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 10 7 8 9 0 1 2 3 4 5 6 7 8 9 10 1112 13 1415 Distance from cylinder

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

0 1 2 3 4 5 6 7 8 9 10 1112 13 1415 Distance from cylinder shaft center Lo (cm) CX CY1R63 CY1R10 Fn H H 1000 DAllowable driving force Fn (N) Allowable driving force Fn (N) 50 500 Lo 40 30 20 400 L -X 300 H 200 10 100 2020 30 40 50 Usable range 5 Usable range Data 1 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 10 7 8 9 0 1 2 3 4 5 6 7 8 9 10 1112 13 1415 Distance from cylinder

High Vacuum Angle Valve

Dimensions XLC-100/160-1-X152: Air operated (b) D C E E C E Fn (KF flange) Fd (K flange) (a) (c) J H K [mm] Model A B C D E1 Fn Fd G H J K XLC-100-1-X152 108 317.5 154 55 11 134 130 102 139 58 9 XLC-160-1-X152 138 339 200 65 11 190 180 153 124 62 12.5 B A 1 The E dimension applies when the heater option is included.

CY1

Select the bore size and type of magnet holding force (types H, L) from Lo and Fn based on data A . 100 20 30 40 50 10 L type Usable range 5 10 5 Usable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 1 0 1 1 1 2 1 3 1 4 1 5 Load Work piece Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1B10 CY1B40 500 L type H type Fn Allowable driving force Fn (N)

LEC-OM071xx

1 1 Outline 1.

LEC-OM069xx

1 1 Outline 1.

Table of Contents

from cylinder shaft center Lo (cm) RZQ 25 15 40 500 500 MI W S 300 300 200 200 CEP1 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3

REA/REB

10 10 10 5 5 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 7 12 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 50 63 1000 1000 Recommended driving force Fn (N) Recommended driving force Fn (N) 500 400 500 300 300 200 200 Usable range 100 100

REA/REB

Usable range Usable range RHC 10 10 10 5 5 5 MK(2) RS Q G 1 1 0 2 3 4 5 6 7 8 9 101112131415 1 1 0 2 3 4 5 6 8 9 10 11 13 1 1 0 2 3 4 5 6 7 8 9 101112131415 7 12 RS H A Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) RZQ 50 63 1000 1000 MI W S Recommended driving force Fn (N) Recommended driving force Fn

REA/REB

from cylinder shaft center Lo (cm) RZQ 25 15 40 500 500 MI W S 300 300 200 200 CEP1 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3

Magnetically Coupled Rodless Cylinder

Select the bore size from Lo and Fn, based on data K A . 5 Usable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Load Workpiece CY3B10 CY3B40 500 Allowable driving force Fn (N) Allowable driving force Fn (N) 50 300 200 40 30 20 Fn 100 20 30 40 50 Lo 10 Usable range 5 10 Usable range 5 1

Basic type / Direct mount type Series CY3B/CY3R

> CY3R6 CY3R32 400 300 200 40 30 Allowable driving force Fn (N) Allowable driving force Fn (N) 20 100 H 20 30 40 50 10 Usable range 5 10 5 Usable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R10 CY3R40 500 Allowable driving force Fn (N) Allowable driving force Fn (N) 300 50 200 40 30

Basic Type/Direct Mount Type

) CY3R10 CY3R40 500 Allowable driving force Fn (N) Allowable driving force Fn (N) 300 50 200 40 30 20 100 20 30 40 50 10 Usable range 5 10 Usable range 5 1 0 1 2 3 4 5 6 1 7 8 9 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R15 CY3R50 H 1000 Allowable driving force Fn (N) Allowable driving force Fn (N) 50 500

XM, XY

Bonnet assembly Handle assembly Bonnet & Handle assembly/Construction part number: 1 Model Valve size Temperature specifications Indicator 16 25 40 50 63 80 XLA16-30-1 XLA25-30-1 XLA40-30-1 XLA50-30-1 XLA63-30-1 XLA80-30-1 General use XMA XYA XLA16A-30-1 XLA25A-30-1 XLA40A-30-1 XLA50A-30-1 XLA63A-30-1 XLA80A-30-1 XLA16-30-1H XLA25-30-1H XLA40-30-1H XLA50-30-1H XLA63-30-1H XLA80-30-1H High

Magnetically Coupled

Usable range Usable range 0.1 0 0.5 1 1.5 2 1 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (inch) Distance from cylinder shaft center Lo (inch) Load Guide Workpiece NCY3B10 NCY3B40 10 1000 Allowable driving force Fn (lbf) Allowable driving force Fn (lbf) 100 Fn Adsorption mechanism of the axis divergence 1 Lo 10 Usable range Usable range Cylinder 0.1 0 0.5 1 1.5 2 2.5 3 1 0 1 2 3

Magnetically Coupled Rodless Cylinder

from cylinder shaft center Lo (cm) 3 Model Selection Method Series CY3B/CY3R Precautions on Design q CY3R15 CY3R32 400 300 200 Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 30 20 20 30 40 50 Useable range 10 10 Useable range 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

from cylinder shaft center Lo (cm) 3 Model Selection Method Series CY3B/CY3R Precautions on Design q CY3R15 CY3R32 400 300 200 Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 30 20 20 30 40 50 Useable range 10 10 Useable range 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68