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2

/8 02 R1/4 03 R3/8 04 R1/2 Fittings Applicable tubing O.D.

Table of Contents

ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs. F G T NPTF (Ordering example) ZXX106-R1 pc. (Manifold base) ZX1101-K15LZ-EC5 pcs. (Vacuum single unit) ZX1-BM11 pc.

Table of Contents

{Port 3 (R2) is individual and 5 (R1) is common.}

1

)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Port Symbol Caution VF1000 VF3000 VF5000 Supply P P (SUP) P Cylinder A, B A (CYL2) B (CYL1) A, B Connector R1 (EXH2) R2 (EXH1) R1, R2 EXH outlet EA, EB Lead wire JIS symbol Single solenoid Socket Hook 1: P (SUP) 2: B (CYL.1) 3: R2 (EXH.1) 4: A (CYL.2) 5: R1 (EXH.2) 1: P 2: B 3: R2 4: A 5: R1 Plug Connector Lead Wire Length 1: P 4: A 2: B 5: R1 3: R2 Standard length is 300 mm, but the following

Large Size Vacuum Module: Series ZR

(Function plate) ZR1-R1-4 1pc.

CATALOG

/ 14 to 122F -10 to 50C / 14 to 122F Max Operating 2 Position S & D 20Hz 5Hz OR CONTACT YOUR LOCAL SMC REPRESENTATIVE.

VQZ1000/2000/3000

R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

Proposals for Energy Saving

Accessory (option) part nos. 0.2 to 1.0MPa Ambient and fluid temperature 2 to 50C (with no freezing) Model VBA2200 VBA2100 VBA4200 VBA1110-1 VBA4100 Description Pressure gauge G27-20-R1 2 pcs. G46-10-01 2 pcs. G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs.

ZR

Nil F G Rc Example) Attached to the first and third stations ZR1-RV1-1 ZR1-RV1-3 ZR1-R1-A3 T NPTF Example) Attached to the first and third stations ZR1-R1-1 ZR1-R1-3 Example) ZZR106-R .1 pc. (Manifold base only) ZR120S1-K15MZ-EC ... 5 pcs. (Unit) ZR1-BM1 . 1 pc. (Blank plate) ZR1-R1-3 . 1 pc.

0.4

) 3 (R2) 1 (P) 5 (R1) e q w e w q VQC1200 VQC1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQC1301 VQC1401 VQC1300 VQC1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQC1500 VQC1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w VQC1A01 VQC1B01

Base Mounted Metal Seal/Rubber Seal Series VQ

Outlet pressure (MPa) Outlet pressure (MPa) Specifications Maximum operating pressure 0.8 MPa Set pressure range 0.05 to 0.7 MPa How to order manifold VV5Q11-14C6FUO-DG2 5 to 50C Ambient and fluid temp.

5 Port Solenoid Valve

N.C. 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) N.O. N.O. 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) N.C.

Vacuum Module Series ZX

PV PS PD PE R16 PV PS PD PE R1 ZMA Dummy spacer ZX1-R16 Individual air supply port PV ZQ Pressure sensor Pressure sensor Dummy spacer ZX1-R16 Dummy spacer R16 R1 ZH Individual spacer ZX1-R1 39.9 ZU ZL A cross section Dummy spacer R16 ZY External release port External release port Pilot pressure EXH port (PE) M3 ZF Pilot port Pilot port + + ZP Individual spacer R1 Individual spacer R1 SMC

ZX

ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs. F G T NPTF (Ordering example) ZXX106-R1 pc. (Manifold base) ZX1101-K15LZ-EC5 pcs. (Vacuum single unit) ZX1-BM11 pc.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

For 20A/20B 25 5 1.5 4 x 2.6 Depth 7 or less Atmospheric vent port 30 20 30 20 Lead wire with connector M5 x 0.8 Thread depth 3.5 01 4 x 2.6 Depth 7 or less Atmospheric vent port 15.2 R1/8 7.2 N01 NPT1/8 A Piping specification Port size A 01 R1/8 Width across flats 10 N01 NPT1/8 Width across flats 12 20 ZSE20(F)/ISE20 Series Dimensions With bracket ZSE20(F) ISE20 Option 2 30 A1 25 20 Bracket