Table of Contents

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

LX

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

LX

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Brake wire (300mm) 4.5 4H9 +0.030 0 Brake electrical circuit +24V Brown [Yellow] 4H9 +0.030 0 3 6 0V 49 38 White [Yellow] Section C detail (Scale: 2/1) Stroke + 104 (Stroke: 50 to 100mm) Stroke + 121 (Stroke: 125 to 200mm) 4H9 +0.030 0 depth 6 E Note) A contact protection circuit is required when connecting a brake. 12 D E Model LXPB5BC-50B LXPB5BC-75B LXPB5BC-100B LXPB5BC-125B LXPB5BC-150B

Body Size: 25, Type: R (Standard), Motor: Step Motor (Servo DC24V), Lead Screw: K (Size 8: 4mm, Size 16: 5mm, Size 25: 8mm), Stroke: 150mm, Lock: B (Lock), Body Option: Basic, Mounting: w/o Side Holder, Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5m)

Size: 40, Bearing Type: L ( Ball Bushing Bearing), Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 150mm, Motor Option: B (with Lock), Guide Option: w/o Guide, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m)

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision Type), Size: 32, Motor Mounting Position: L (Left Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 150mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: S (Standard

Body Size: 25, Type: Standard, Motor: Step Motor (Servo DC24V), Lead Screw: Size 8: 4mm, Size 16: 5mm, Size 25: 8mm, Stroke: 150mm, Lock: Lock, Body Option: Basic, Mounting: w/o Side Holder, Actuator Cable: Standard Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for JXC

Size: 40, Bearing Type: Ball Bushing Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 150mm, Motor Option: with Lock, Guide Option: w/o Guide, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller Type for (LEC, JXC): -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication

Series: Ball Screw Drive, Accuracy: High Precision Type, Size: 32, Motor Mounting Position: Left Side Parallel, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 25: 20mm, Size 32: 24mm, Size 40: 30mm, Stroke: 150mm, Motor Option: w/Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Standard Cable, Actuator Cable Length

NCQ2/CQ2

Stroke S1 S2 50 55 to 75 80 to 100 55 to 75 80 to 100 Warranty and Operating Instructions Bore size 55 to 75 50 55 to 75 23 (33) + Stroke S1 29.5 (39.5) + Stroke S1 30.5 (40.5) + Stroke S1 36 (46) + Stroke S1 43.5 (53.5) + Stroke S1 53 (63) + Stroke S1 145.4 (155.5) + Stroke S1 161.5 (171.5) + Stroke S1 164 (174) + Stroke S1 171 (181) + Stroke S1 189.5 (199.5) + Stroke S1 210.5 (220.5) +

Compact Cylinder

Stroke S1 S2 50 55 to 75 80 to 100 55 to 75 80 to 100 55 to 75 50 55 to 75 23 (33) + Stroke S1 29.5 (39.5) + Stroke S1 30.5 (40.5) + Stroke S1 36 (46) + Stroke S1 43.5 (53.5) + Stroke S1 53 (63) + Stroke S1 Bore size 145.4 (155.5) + Stroke S1 161.5 (171.5) + Stroke S1 164 (174) + Stroke S1 171 (181) + Stroke S1 189.5 (199.5) + Stroke S1 210.5 (220.5) + Stroke S1 170.5 (180.5) + Stroke S1

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

JXCx-OMT0023

Driver No-fuse breaker (Note) Fuse Current Voltage AC Current Voltage AC LECSA2-S1 50A frame 5A 10A LECSA2-S3, LECSA1-S1 50A frame 10A 240V 15A 300V LECSA2-S4, LECSA2-S3 50A frame 15A 20A Note.

Made to Order

CQ2 series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 L B + Stroke S1 L B + Stroke S2 L L B + Stroke S1 A + Stroke (S1 + S2) A + Stroke (S1 + S2) Note) In the case of bore sizes 12 to 25 with auto switch, port directions are different.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Vacuum Module Series ZX

E D P F Nil Model ZX1 K1 Vacuum switch (E) (D) Adsorption confirmation switch (P) Vacuum switch (ZSE2) ZX1-K1-E (Release to atmospheric pressure) Spacer 1 (ZX1-S1) (For side mounting) Pressure sensor 78 Rc 1/8 EXH port (EXH.)

Metal Seal/Rubber Seal Series VQ Body Ported

S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.