1

)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C.

High Vacuum Angle Valve

Flange side Left flange surface Rear flange surface Right flange surface N1 P1 Q1 R1 R2 R3 S1 T1 U1 Kalrez Flange: Temperature specifications Chemraz Symbol Nil 5 to 60C 5 to 150C H0 Temperature Heater VMQ FKM FOR PLASMA ULTIC ARMOR Auto switch type (Operating temperature 5 to 60C) Barrel Perfluoro is a registered trademark of Matsumura Oil Co., Ltd.

Aluminum High Vacuum Angle Valve

Flange side Left flange surface Rear flange surface Right flange surface N1 P1 Q1 R1 R2 R3 S1 T1 U1 Kalrez Flange: Temperature specifications Chemraz Symbol Nil 5 to 60C 5 to 150C H0 Temperature Heater VMQ FKM FOR PLASMA ULTIC ARMOR Auto switch type (Operating temperature 5 to 60C) Barrel Perfluoro is a registered trademark of Matsumura Oil Co., Ltd.

2

/8 02 R1/4 03 R3/8 04 R1/2 Fittings Applicable tubing O.D.

XL

Residence time of water at 20C is 5.5 x 10-6 sec, whereas at 150C it is 2.8 x 10-8 sec, or 200 times shorter. As an example, it took 800 minutes to evacuate moist air from a 150mm x 500mm SMC test chamber to 10-9Torr. The same process took only 4 minutes with dry (20ppb) nitrogen.

High Vacuum Angle Valve, XL Series

Residence time of water at 20C is 5.5 x 10-6 sec, whereas at 150C it is 2.8 x 10-8 sec, or 200 times shorter. As an example, it took 800 minutes to evacuate moist air from a 150mm x 500mm P/A test chamber to 10-9Torr. The same process took only 4 minutes with dry (20ppb) nitrogen.

High Vacuum Angle Valve

(Option) Amplifier Heater (Option) Ambient temperature: Max. 150C (Sensor) 2-color indicator An optional heater is available. Auto switches are mountable from 4 directions.

Magnetically Coupled Rodless Cylinder

Specifications Applicable series CY3B Bore size 6 to 63 50 to 150C Ambient and fluid temperature Max. operating pressure 0.5 MPa 50 to 400 mm/s Piston speed When using in less than 100C range, since it could make a difference in the maintenance cycle, depending on the operating speed, use it at 200 mm/s or less.

Air Cylinder

ND CJ1 MM R1 MM CJP ND E1 NX1 A U1 R2 H Z E1 NX U1 LB A A NX A1 CJ2 A1 U1 LB JCM Part no.

CATALOG

A1 E L MM R1 NZ U1 NDH10 NX A A1 E L MM R1 U1 NDH10 NX I-04 40 69 22 24 55 M 14 x 1.25 15.5 20 12+0.070 0 16-0.1 -0.3 Y-04C 40 22 24 55 M 14 x 1.5 13 38 25 12+0.070 0 16-0.1 -0.3 I-05 5063 74 27 28 60 M 18x 1.5 15.5 20 12+0.070 0 16-0.1 -0.3 Y-05C 5063 27 28 60 M 18x 1.5 15 38 27 12+0.070 0 16-0.1 -0.3 I-08 80 91 37 36 71 M 22 x 1.5 22.5 26 18+0.070 0 28 -0.1 -0.3 Y-08C 80 37 36 71 M 22 x

smcmaintenancepartslist

How to Order N M X0 149 FND100 10 Nominal filtration rating Seal material Material t Symbol 149 149 m Nominal filtration rating Symbol N V NBR FKM 150 Element type Type 188 Symbol M Gold mesh Port size r Symbol 10 R1 Port size OUT IN Note Replacement Parts Specifications FND100V-10-M149X0 Model FND100N-10-M149X0 R1 Stainless steel 304 No. Description Element Material Kit No.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

LQ3U21-R1 LQ3U21-R2 LQ3U31-R1 LQ3U31-R2 LQ3U32-R1 LQ3U32-R2 LQ3U41-R1 LQ3U41-R2 LQ3U51-R1 LQ3U51-R2 LQ3U61-R1 LQ3U61-R2 LQ3U2A-R1 LQ3U3A-R1 LQ3U3A-R2 LQ3U4A-R1 LQ3U4A-R2 LQ3U5A-R1 LQ3U5A-R2 LQ3U5A-R3 LQ3U6A-R1 LQ3U6A-R2 LQ3U7A-R1 4 x 3 1/4" x 5/32" 3 x 2 4 x 3 3 x 2 8 x 6 6 x 4 6 x 4 4 x 3 10 x 8 8 x 6 12 x 10 10 x 8 19 x 16 12 x 10 1/8" x 0.086" 1/4" x 5/32" 1/8" x 0.086" 3/8" x 1/4" 1/

Table of Contents

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 + 0.4 + 0.2 0.2 0.4 8 + 0.058 0 + 0.058 0 + 0.058 0 + 0.070 0 + 0.070 0 + 0.084 0 + 0.058 0 + 0.058 0 20 I-G02SUS Y-G02SUS 20 16 8 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS + 0.4 + 0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25, 32 20 10 10 10 10 41 10.5 30 M10 x 1.25

Compact Cylinder

Symbol Heat Resistant Cylinder (10 to 150C) -XB6 The seal material and grease for air cylinders have been changed for high temperature tolerance, now with a range of 10 to 150C.

A

A1 E L MM R1 NZ U1 NDH10 NX A A1 E L MM R1 U1 NDH10 NX I-04 40 69 22 24 55 M 14 x 1.25 15.5 20 12+0.070 0 16-0.1 -0.3 Y-04C 40 22 24 55 M 14 x 1.5 13 38 25 12+0.070 0 16-0.1 -0.3 I-05 5063 74 27 28 60 M 18x 1.5 15.5 20 12+0.070 0 16-0.1 -0.3 Y-05C 5063 27 28 60 M 18x 1.5 15 38 27 12+0.070 0 16-0.1 -0.3 I-08 80 91 37 36 71 M 22 x 1.5 22.5 26 18+0.070 0 28 -0.1 -0.3 Y-08C 80 37 36 71 M 22 x

Stainless Steel 316

(mm) Connection thread Model R3/8 KQGS04-M5 KQGS04-01S KQGS06-M5 KQGS06-01S KQGS06-02S KQGS08-01S KQGS08-02S KQGS08-03S KQGS10-02S KQGS10-03S KQGS12-03S KQGS12-04S M5 R1/4 4 10 R1/8 R3/8 M5 R3/8 12 6 R1/8 R1/2 R1/4 R1/8 Union Tee Union Tee 8 R1/4 Applicable tubing O.D.

NCQ2/CQ2

Symbol Heat Resistant Cylinder (10 to 150C) -XB6 The seal material and grease for air cylinders have been changed for high temperature tolerance, now with a range of 10 to 150C.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Residence time of water at 20C is 5.5 x 10-6sec, whereas at 150C is 2.8 x 10-8 sec, or 200 times shorter.

Air Cylinder

Applicable bore size (mm) A A1 E1 L1 MM R1 U1 ND NX NZ L Included pin part no.

C95

) Symbol -XB6 2 Heat Resistant Cylinder (10 to 150C) Bore size Stroke How to Order Standard model no.