NCQ2/CQ2

S1 S2 Bore size 55 to 75 80 to 100 137 (149) + Stroke S1 141.5 (151.5) + Stroke S1 162 (174) + Stroke S1 166.5 (176.5) + Stroke S1 19.5 (31.5) + Stroke S1 22.5 (32.5) + Stroke S1 20 113 138 4.5 5 to 50 55 to 100 25 114 139 5 5 to 50 55 to 100 Bore Size: 32 to 100 (mm) A B1 B2 Symbol Stroke range Stroke S2 55 to 75 Stroke S1 Stroke S2 80 to 100 Stroke S1 55 80 to 100 Stroke S1 Stroke S2 L

High Vacuum Angle Valve

100 160 Switch Heater Indicator High-temperature type XLA-100/160-X152 Single acting (N.C.) 106 to atmospheric pressure 1010 1011 XLC-100/160-1-X152 Double acting 1 When the standard seal material (FKM) is used XLA/C-100/160(-1)-X152 18-E692 Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal XLA-100/160-X152 How to Order XLA 100 w e r q X152 A M9N u t y Improved durability of

JXCx-OMT0023

(Target position) time constant time constant speed [r/min] [ms] function [10STMm] [ms] [ms] 1 5.00 3000 100 150 100 1 2 -6.00 2000 100 100 0 3 3 3.00 3000 50 50 0 0 (Note) Note.

Made to Order

(mm) A B Bore size (mm) 50 st or less for both of S1, S2 Stroke Both of S1, S2 L Combination of 50 st or less, 75, 100 st 75, 100 st for both of S1, S2 50 st or less 75, 100 st 12 16 20 25 32 40 50 63 80 100 41 (63) 3.5 17 (28) 5 to 30 44 (68) 3.5 18.5 (30.5) 48 (72) 4.5 19.5 (31.5) 5 to 50 55 (75) 5 22.5 (32.5) 70 (80) 80 (80) 60 (80) 7 23 (33) 33 (33) 5 to 100 83 (93) 93 (93

Aluminum High Vacuum Angle Valve

Note 2) For other rated voltages (48, 100 VDC), please consult with SMC.

1

30 st to 100 st Over 100 st to 200 st Over 200 st to 300 st 30 st or less Over 300 st Over 25 st to 100 st Over 100 st to 200 st Over 200 st to 300 st 25 st or less Over 300 st Over 30 st to 100 st Over 100 st to 200 st Over 200 st to 300 st 30 st or less 28 52 300 100 75 77 128 200 128 178 24 52 174 198 42 54 92 80 14.5 25.5 74 28 156 180 140 17.5 M12 x 1.75 32 40 50 63 117 117 12 16

Metal Seal/Rubber Seal Series VQ Body Ported

Note) 1 2 Note) 2 position single 100 VAC (50/60 Hz) G: Grommet C kit single only.

Vacuum Module Series ZX

(VJ324M) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] Solenoid valve N.C. (VJ114) K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Solenoid valve Release valve N.C. (VJ314) External release (ZX1A) Air operated N.C. (VJA314) None [ ]: Mass (g) How to Order /Refer to page 866 for details.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

LEC-OM071xx

2 1 to 65535 10 reference units/s2 100 Pn80C Acceleration Constant Switching Speed 2 0 to 65535 100 reference units/s 0 Pn80D 1st Linear Deceleration Constant 2 1 to 65535 10 reference units/s2 100 Pn80E 2nd Linear Deceleration Constant 2 1 to 65535 10 reference units/s2 100 Pn80F Deceleration Constant Switching Speed 2 0 to 65535 100 reference units/s 0 Pn827 Linear Deceleration Constant

Base Mounted Metal Seal/Rubber Seal Series VQ

S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 Without cable Without cable Without cable (2) (2) (2) (2) Kit Kit Kit Kit Kit Kit With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) 2 to 16 2 to 24 2 to 16 2 to 24

SV

S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

Electric Actuator

100 to 120 200 to 230 100 to 120 200 to 230 100 to 120 200 to 230 100 to 120 200 to 230 A1 A2 B1 B2 C1 C2 S1 S2 Note 3) The length of the encoder, motor and lock cables are the same.

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

CRBU

100 90 100 Inner volume cm3 1 1.1 2.6 2.7 5.6 5.7 14.4 14.5 Double vane Be sure to read before handling.

Electric Actuator

Cable type 5, 6, 7 Cable length [m] 5, 8 Driver type 5 I/O connector Nil Nil Power supply voltage (V) Compatible drivers Nil Without connector Without cable Without cable H S R 2 5 With connector Nil Without driver Standard cable 2 m 5 m A1 A2 B1 B2 C1 C2 S1 S2 LECSA1-S; LECSA2-S; LECSB1-S; LECSB2-S; LECSC1-S; LECSC2-S; LECSS1-S; LECSS2-S; 100 to 120 200 to 230 100 to 120 200 to 230 100

Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

Table of Contents

(ZX1A) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] None K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Release valve None [ ]: Weight (g) How to Order Refer to page 13-2-4 for details.

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

2

P R V Nil 1 2 3 Size Size Air compressor size Note) 100 100 kW 125 125 kW 150 150 kW Note) Note that the above values are for reference only.