Electric Actuator / Low profile slider type

LEMC 25 T 300 S 1 6N 1 LEMC(Cam folloer guide type) Size Motor option Actuator cable length 25 32 Nil Without B With lock Nil Without cable 8 8m 1 1.5m A 10m 3 3m B 15m Actuator cable type Motor mounting position 5 5m C 20m Nil Top mounting U Bottom mounting L Symmetric, Top mounting LU Symmetric, Bottom mounting Produced upon receipt of order (Robotic cable only) I/O cable length[m]*,

LEH_C

0.5 1.0 / (m/sec 2) 7) 150 / 30 (c.p.m) 60 () 540 (%RH) 90 () 165 220 430 585 1120 1760 (g) 135 190 365 520 20 28 42 (DC24V) () A/B (800 /) (V) DC2410% 11/7 28/15 34/13 36/13 / (W) 8) 8/7 22/12 (W) 9) 14 42 19 51 57 61 1) 1020 150 LEHZ10,16:30(F.S.),LEHZ20,25:25(F.S.),LEHZ32,40:20(F.S.) 2) () 3) 5m 5m 10%(15m 20%) 4) 5) () 6) () 7) () 452000Hz 1 () 8) () 9) 11 - 2.1.2 6N

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

material Code Cv 3 0.29 4 0.5 Code Material No code PCTFE (Standard) VS Polyimide Model Connections Code Status Maximum operating pressure 542 Normally closed (N.C.) 125 psig (0.9 MPa) Code Connections AK3 AK4 4T 1/4 inch compression 4BR Rc 1/4 4BRN R 1/4 4 NPT 1/4 female 4N NPT 1/4 male 6T 3/8 inch compression Material Code Body material S 316 SS 6BR Rc 3/8 6BRN R 3/8 6 NPT 3/8 female 6N

Electric Slide Tables

3 Controller/Driver mounting Screw mounting DIN rail mounting Nil D Nil 6N 6P 1N 1P AN AP Nil 1 3 5 Without cable 1.5 32 Without controller/driver LECP6/LECA6 (Step data input type) NPN PNP NPN PNP NPN PNP DIN rail is not included. Order it separately.

240

Allowable Lateral Load on the Rod End Model Allowable lateral load on the rod end [N] LEPY6 (Basic) 0.50 F LEPY10 (Basic) 1.0 LEPY10L (Compact) 1.0 377 Step Motor (Servo/24 VDC) Electric Actuator Miniature Rod Type LEPY Series LEPY6, 10 How to Order LEPY 10 K 50 1 1 R 6N q w e r t y u i o !

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Series AK1000

material Code Cv 3 0.29 4 0.5 Code Material No code PCTFE (Standard) VS Polyimide Model Connections Code Status Maximum operating pressure 542 Normally closed (N.C.) 125 psig (0.9 MPa) Code Connections AK3 AK4 4T 1/4 inch compression 4BR Rc 1/4 4BRN R 1/4 4 NPT 1/4 female 4N NPT 1/4 male 6T 3/8 inch compression Material Code Body material S 316 SS 6BR Rc 3/8 6BRN R 3/8 6 NPT 3/8 female 6N

Size: 25, Motor Mounting Position: D (In-line Type), Motor: A [Servo Motor (24 VDC)], Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 30mm

Size: 25, Motor Mounting Position: D (In-line Type), Motor: A [Servo Motor (24 VDC)], Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 50mm, Motor Option: None, Rod End Thread: M (Male)

Size: 25, Motor Mounting Position: D (In-line Type), Motor: A [Servo Motor (24 VDC)], Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 250mm, Motor Option: C (w/Motor Cover), Rod End Thread: M (Male)

Size: 25, Motor Mounting Position: D (In-line Type), Motor: A [Servo Motor (24 VDC)], Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 350mm, Motor Option: B (w/Lock), Rod End Thread: M (Male)

Size: 25, Motor Mounting Position: D (In-line Type), Motor: A [Servo Motor (24 VDC)], Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 50mm, Motor Option: C (w/Motor Cover)

Size: 25, Motor Mounting Position: D (In-line Type), Motor: A [Servo Motor (24 VDC)], Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 300mm, Motor Option: None, Rod End Thread: M (Male)

Size: 25, Motor Mounting Position: In-line Type, Motor: A [Servo Motor (24 VDC)], Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 200mm, Motor Option: w/Lock, Rod End Thread: Female, Mounting: Body Bottom Tapped, Actuator Cable: -, Actuator Cable Length: -, Controller: -, I/O Cable Length: -, Communication Plug Connector: -, Controller Mounting: -

Size: 25, Motor Mounting Position: D (In-line Type), Motor: A [Servo Motor (24 VDC)], Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: M (Male)

Size: 25, Motor Mounting Position: D (In-line Type), Motor: A [Servo Motor (24 VDC)], Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 200mm, Motor Option: C (w/Motor Cover), Rod End Thread: M (Male)

Size: 25, Motor Mounting Position: D (In-line Type), Motor: A [Servo Motor (24 VDC)], Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 100mm, Motor Option: None, Rod End Thread: Female, Mounting: F (Rod Flange)

Size: 25, Motor Mounting Position: D (In-line Type), Motor: A [Servo Motor (24 VDC)], Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 200mm, Motor Option: B (w/Lock)

Size: 25, Motor Mounting Position: D (In-line Type), Motor: A [Servo Motor (24 VDC)], Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 50mm