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Table of Contents

Model ZR1-FX Vacuum to 0.5 MPa 5 to 50C 30 m PVF 0.1 kg Operating pressure range Operating temperature range Filtration efficiency Element Weight (With bracket) Note) If not operated within the specified range of pressure and temperature, trouble may be caused.

2

Inlet air temperature 5 to 50C IDF (For IDF100F to 150F, up to 60C is allowed.)

Base Mounted Metal Seal/Rubber Seal Series VQ

S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 Without cable Without cable Without cable (2) (2) (2) (2) Kit Kit Kit Kit Kit Kit With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) 2 to 16 2 to 24 2 to 16 2 to 24

Vacuum Module Series ZX

E D P F Nil Model ZX1 K1 Vacuum switch (E) (D) Adsorption confirmation switch (P) Vacuum switch (ZSE2) ZX1-K1-E (Release to atmospheric pressure) Spacer 1 (ZX1-S1) (For side mounting) Pressure sensor 78 Rc 1/8 EXH port (EXH.)

Metal Seal/Rubber Seal Series VQ Body Ported

S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator

ITV

(Error number 5) 4 points preset input type Brown Blue S1 White Vs Black S2 Vs: Power supply 24 VDC (Negative common) One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2. S1 OFF ON OFF ON S2 OFF OFF ON ON Preset pressure P01 P02 P03 P04 For safety reasons, it is recommended that one of the preset pressures be set to 0 MPa.

ZX

Specifications ZX1-F Vacuum to 0.5 MPa 5 to 50C 30 m PVF 35 g Note) If not operated within the specified range of pressure and temperature, trouble may be caused. Unit no. Operating pressure range Operating temperature range Filtration efficiency Element Weight ZX ZR ZM ZH Vacuum Pressure Switch Unit/ZSE2, ZSE3, ZSP1 Refer to page 13-2-13 to 13-2-18 for details.

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

Series VQ Metal Seal/Rubber Seal Body Ported

Specifications Max. operating pressure Min. operating pressure 0.8MPa 0.15MPa 5 to 50C 2.7mm 2 (0.15) 180CPM VVQ1000FPG02 1set VQ1000FPGC6M5D 2pcs.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Exhaust NVFR4400 NVFR4410 % 2.8 180 70 or less 1.S1 (0.73) center 1h 2.8 Pressure NVFR4500 NVFR451 0 % 3.S 180 70 or less 1.S1 (0.73) center 1h 3.S The Agures lIated are without subplate.

Table of Contents

stroke W S QL QB P NL 800 700 600 500 400 300 200 100 50 -X CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G CC63-S1-G CC100-1-G CC160-L1-G 9.5 11 0 30 86 3 28 62.5 728.5 603.5 503.5 378.5 278.5 228.5 7 13 2 32 120 5 33 82.5 611 511 386 286 836 736 207 13 2 32 120 5 33 92 624 524 399 949 849 749 1049 Hexagon socket head cap screw is used for mounting hole. 7 20 2.5 46 185 0 29 120 Data 10-17

Proposals for Energy Saving

Note 2) Power supply 12 months continuous operation (without back lighting) Battery life 250ms Response speed 2% F.S. or less (Temperature conditions: at 25C) Display accuracy 1% F.S. or less (Temperature conditions: at 25C) Repeatability 3% F.S. or less (0 to 50C, based on 25C) Temperature characteristics M5 x 0.8 Piping port 0 to 50C (with no condensation) Ambient temperature 35 to 85%

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

Electric Actuators

5 to 50C 5 to 50C 5 to 50C 5 to 50C 5 to 40C 5 to 40C 5 to 40C 5 to 40C Electric power 180VA 300VA 300VA 300VA 640VA 180VA 300VA 640VA 180VA 300VA 640VA 640VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return direction Maximum positioning point setting Can be selected between the motor side and the side opposite the motor. 1008

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable