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Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Servo motor (24 V DC), Step data (points): 64, Actuator/cable type: LEY16DAA-100, I/O cable length / communication plug(m): Without I/O cable, Controller/driver mounting method: Screw mounting type

High Vacuum Angle Valve

100 160 Switch Heater Indicator High-temperature type XLA-100/160-X152 Single acting (N.C.) 106 to atmospheric pressure 1010 1011 XLC-100/160-1-X152 Double acting 1 When the standard seal material (FKM) is used XLA/C-100/160(-1)-X152 18-E692 Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal XLA-100/160-X152 How to Order XLA 100 w e r q X152 A M9N u t y Improved durability of

Fluoropolymer Piping Equipment

LQ1E41-R4 LQ1E51-R2 LQ1E51-R3 LQ1E51-R4 LQ1E51-R5 LQ1E61-R2 LQ1E61-R3 LQ1E61-R4 LQ1E61-R5 3 8 x 6 6 x 4 4 x 2 10 x 8 8 x 6 6 x 4 4 x 3 12 x 10 10 x 8 8 x 6 6 x 4 LQ1E3A-R3 LQ1E4A-R2 LQ1E4A-R3 LQ1E4A-R4 LQ1E5A-R2 LQ1E5A-R3 LQ1E5A-R4 LQ1E6A-R2 LQ1E6A-R3 LQ1E6A-R4 LQ1E6A-R5 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/16" x 0.127" 1/2" x 3/8" 3/8" x 1/4

2

P R V Nil 1 2 3 Size Size Air compressor size Note) 100 100 kW 125 125 kW 150 150 kW Note) Note that the above values are for reference only.

Aluminum High Vacuum Angle Valve

Note 2) For other rated voltages (48, 100 VDC), please consult with SMC.

2-Color Display Digital Flow Switch Series PFM

or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom side piping.

Table of Contents

Possible to use in vacuum to 100 kPa Tubing material Tubing O.D.

KJ

Possible to use in vacuum to 100 kPa Tubing material Tubing O.D.

Battery-less

T4 = 0.2 [s] T1 = V/a1 = 100/3000 = 0.033 [s], T3 = V/a2 = 100/3000 = 0.033 [s] T2 = = = 1.97 [s] L 0.5 V (T1 + T3) V 200 0.5 100 (0.033 + 0.033) 100 T4 = 0.2 [s] The cycle time can be found as follows.

Table of Contents

Series AKH/AKB Check Valve with One-touch Fitting. 92 92 92 93 94 95 95 95 95 97 99 100 100 100 101 102 103 103 104 105 106 107 107 107 108 109 110 110 111 112 113 114 114 114 115 115 116 116 116 116 117 117 118 118 118 119 119 120 120 122 123 124 124 124 124 125 125 126 Features. Series AKH/AKB Check Valve with One-touch Fitting. How to Order. Specifications. Dimensions . Construction.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

] 100 L/min type 100 L/min type Error display function When an error or abnormality arises, the location and contents are displayed.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom piping.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Acetic acid 100% Acetone Note 1, 2) 40% Ammonium fluoride 30% Ammonium hydroxide 100% Butyl acetate 100% Methylne chloride 38% Hydrochloric acid 50% Hydrofluoric acid 60% Hydrogen peroxide 100% Methanol Methyl ethyl ketone Note 2) 70% Nitric acid Note 2) 86% Phosphoric acid 85% Caustic potash 100% Sulfuric acid Note 2) Toluene Note 1, 2) Xylene Note 2) 100% Sodium hydroxide Note 2) 100%

Refrigerated Air Dryers

VAC (50 Hz), 100/110 VAC (60 Hz) *5 Single-phase: 200 VAC (50 Hz), 200/220 VAC (60 Hz) Auto drain Single-phase 100 V 180/202 180/202 180/202 180/202 180/202 208/236 385/440 420/480 Single-phase 200 V Power consumption 50/60 Hz *6 [W] Electric specifications Single-phase 100 V 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 3.0/3.1 5.7/5.7 4.3/4.6 Refrigerant R407C (HFC) IDF F Operating current

One-touch Fittings

Possible to use in vacuum to 100 kPa.

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/