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Large Size Vacuum Module: Series ZR

Symbol ZR1-R1 -R2 -R3 -R4 -R5 -R6 -R7 -R8 BM1 ZR1 R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 PV PV PV PV PV PV PV PV PE PE Refer to Example 1).

Series: LEY, Size: 16, Motor Mounting Position: D4 (In-line, Bottom Side), Motor Type: G (High Performance Battery-less Absolute, Step Motor, 24 VDC), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 40: 4mm), Stroke: 50mm, Motor Option: C (w/Motor Cover)

Series: LEY, Size: 16, Motor Mounting Position: In-line, Bottom Side, Motor Type: High Performance Battery-less Absolute, Step Motor, 24 VDC, Lead: Size 16: 2.5mm, Size 25: 3mm, Size 40: 4mm, Stroke: 50mm, Motor Option: w/Motor Cover, Rod End Thread: -, Mounting: -, Actuator Cable Type, Length: -, Controller: -, Controller Mounting: -, Communication Plug Connector, I/O Cable: -

Vacuum Module Series ZX

ZX1-R1 R2 R3 R4 R5 R6 R7 R8 Symbol Part no. ZX1-R 9 R10 R11 R12 R13 R14 R15 R16 PS PS PS PS PV PV PV PV PV PV PV PV R1 R2 R3 R4 R5 R6 R7 R8 R 9 R10 R11 R12 R13 R14 R15 R16 PE PE Caution when ordering manifold PD PD PD PD PE PE The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted.

Metal Seal/Rubber Seal Series VQ Body Ported

Cylinder pressure (P2) VQC Specifications SQ 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 CPM Max. operating pressure Min. operating pressure SUP side pressure (P1) Ambient and fluid temperature Flow characteristics: C Max. operating frequency VQ0 To CYL port VVQ1000-FPG-02 1 set VQ1000-FPG-C6M5-D 2 pcs.

VQZ1000/2000/3000

Cylinder side pressure (P2) I N I N O UT O UT Specifications 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m Maximum operating pressure Minimum operating pressure Ambient and fluid temp.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

style and/or special voltage, consult SMC. 1.12-34 VQZ1000/2000/3000 Base Mounted Standard Specifications Metal seal Seal Rubber seal Air, lnert gas Fluid Air, lnert gas 0.7MPa (High pressure type: 1.0MPa) Max. operationg pressure 0.15MPa Single Double 2 position Min. operating pressure 0.1MPa only for VQZ3000, 3 position 0.15MPa Valve specifications 0.1MPa 3 position 0.2MPa (1) (1) 10 to 50C

2

Inlet air temperature 5 to 50C IDF (For IDF100F to 150F, up to 60C is allowed.)

V100

(1) Ambient and fluid temperature 10 to 50C (1) 10 to 50C (1) Maximum operating frequency 20 Hz 5 Hz 20 Hz Individual EXH Pilot valve EXH Common exhaust Not required Lubrication Non-locking push type/Slotted locking type (tool required) as an option Pilot valve manual override 150/30 m/s2 Shock/Vibration resistance (2) Dustproof Enclosure 12, 24 VDC and 100, 110, 200, 220 VAC Coil rated

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(1) 10 to 50C (1) 10 to 50C (1) Maximum operating frequency 20 Hz 20 Hz 5 Hz Individual EXH Common exhaust Pilot valve EXH Not required Lubrication Non-locking push type/Slotted locking type (tool required) as an option Pilot valve manual override 150/30 m/s2 Shock/Vibration resistance (2) Dustproof Enclosure 12, 24 VDC and 100, 110, 200, 220 VAC Coil rated voltage 10% of rated voltage Allowable

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

10 to 50C Ambient and fluid temp.

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

This matches the controller. 1 LESYH16REA-50C -4- 1.2 Specification LESYH*(D,R,L)E* Battery-less absolute LESYH LESYH LESYH LESYH LESYH LESYH LESYH Model 8*EA 8*EB 8*EC 16*EA 16*EB 25*EA 25*EB Stroke[mm] 50,75 50,100 50,100,150 Max. work load [kg] *1 *3 2 8 12 Horizontal Vertical 1.5 3 6 6 12 10 20 Pushing force 35% to 70%[N] *2 *3 18 to 36 37 to 74 69 to 138 91 to 182 174 to 348 109 to

Size: 16, Motor Mounting Position: D3 (In-line; Motor Cover Direction: Top), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 50mm, Motor Option: C (w/Motor Cover), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: R5 (5m)

Size: 16, Motor Mounting Position: Top Mounting, Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 50mm, Motor Option: C (w/Motor Cover), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: R5 (5m)

Size: 8, Motor Mounting Position: L (Left Side Parallel), Lead: A (Size 8: 10mm, Size 16: 12mm, Size 25: 16mm), Stroke: 50mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R5 (5m)

Size: 8, Motor Mounting Position: R (Right Side Parallel), Lead: A (Size 8: 10mm, Size 16: 12mm, Size 25: 16mm), Stroke: 50mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R5 (5m)

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 50mm, Motor Option: C (w/Motor Cover), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 5 (5m)

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 50mm, Motor Option: C (w/Motor Cover), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 5 (5m)