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Environment

SpeedWork Load Graph (Guide) For Step Motor (Servo/24 VDC) LECP6, LECP1, LECPMJ Horizontal Vertical LEY16m LEY16m for acceleration/deceleration: 2000 mm/s2 10 40 Lead 2.5: LEY16C 35 Horizontal work load [kg] Lead 2.5: LEY16C 8 Vertical work load [kg] 30 15 17 20 23 25 Lead 5: LEY16B 5 Lead 5: LEY16B 4 Lead 10: LEY16A 10 6 2 Lead 10: LEY16A 5 0 0 0 300 200 400 100 500 600 0 300 200 400 100

LEY-OM007

A * * 6 12 A N 5 10 8 16 30 LECPA A P * A * ( ) ( ) 4 3 2.5 500 [m] 1 * * * * C * B * A * 8 * 20 15 10 8 1.5 1 3 5 2 2 3 5 1 2 * 1630 ( 1 ) * 1 2 () 1 2 LEY25200 LEY32100 LEY16100 LEY25200 LEY32200 LEY32 30 150 200 250 300 150 200 250 300 30 50 100 350 400 450 500 50 100 350 400 450 500 LEY25 LEY16 LEY32 LEY32 LEY25 LEY16 / P.38 6.3 <> NPNPNP LEY16B

Title not found

Actuator Series LECP6 Series LECA6 Controller Actuator part number Compatible motor (Except cable specifications and actuator options) Example: Enter [LEY16B-100] for LEY16B-100R16N1 Step motor (Servo/24 VDC) P A Servo motor (24 VDC) Note 1) Option I/O cable length Nil D Note 2) Screw mounting DIN rail mounting Number of step data Nil 1 3 5 Without cable 1.5 m 3 m 5 m 6 64 points Note 2)

SFOD-OMT0009CN

LEY16RA-100BMLLEY16RA-100 LERH30K-3LLERH30K-3 0 (a) ) LEY16RA-75LEY16RALEY16RA-100 (b) LEFSH LEFS ) LEFSH25RH-300LEFS25RH-300LEFS25RH-300 (c) 11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BRLEFS16A-100LEFS16A-100 15 No.SFOD-OMT0009CN-B Execute (Apply) 3.6 (2) 16 No.SFOD-OMT0009CN-B (2) 7. 512 2048 / 0 1 0 1 1 4 1 4 11 () 12 () 1 2 1 11 [] 14096 1 LEY16C-300 2.5mm 1/1 2 LEY16B

JXCx-OMT0001CN

LERH30K-3L LERH30K-3 0 (a) ) LEY16RA-75 LEY16RALEY16RA-100 (b) LEFSH() LEFS ) LEFSH25RH-300 LEFS25RH-300LEFS25RH-300 (C) (11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BR LEFS16A-100LEFS16A-100 -15No.JXC-OMT0001CN-C Execute()Execute Check box Execute Apply Apply 3.6 (2) -16No.JXC-OMT0001CN-C (2) 9. 512 2048 / 0 1 0 1 1 4 1 4 11 12 1 2 1 [] 11 1 4096 1 LEY16C-300 2.5mm 1/1 2 LEY16B

2

Bending value (Reference) 20 Complies with FDA (Food and Drug Administration) 177-1550 Operating temperature Air, Inert gas: 20 to 200C, Water: 0 to 100C (No freezing) dissolution test.

High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

XL

None H0 High temp. type With heater for 80C (176F) H1 5 to 150C (41 to 302F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 A Indicator H0 Without heater High temp. type H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F

High Vacuum Angle Valve, XL Series

None H0 High temp. type With heater for 80C (176F) H1 5 to 150C (41 to 302F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 A Indicator H0 Without heater High temp. type H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: CE1 (JXCE1, EtherCAT®), I/O Cable Length

Size: 25, Motor Mounting Position: In-line, Lead: Size 8: 5mm, Size 16: 6mm, Size 25: 8mm, Stroke: 100mm, Motor Option: w/Motor Cover, Actuator Cable Type, Length: 1.5m, Controller: EtherCAT®, Mounting: DIN Rail, I/O Cable: -, Communication Plug Connector: -, Option: -

Size: 16, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 100mm, Motor Option: w/Motor Cover, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 1.5m, Controller Type - LEC, JXC: JXCE1, EtherCAT®, I/O Cable Length for LEC: Without Cable

Size: 25, Motor Mounting Position: D (In-line), Lead: B (Size 8: 5mm, Size 16: 6mm, Size 25: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R1 (1.5m), Controller: CE1 (EtherCAT®), Mounting: 8 (DIN Rail)

Rotary Actuator

-X7 Angle adjusting screw "B" Angle adjusting screw "A" Rotation at 90 Heat resistant In this rotary actuator, the material of the seals has been changed to the heat resistant type (to withstand up to 100C), for applications in environments that exceed the standard specification temperatures of 0 to 60C.

Fluoropolymer Tubing Variations

One-touch fittings, Insert fittings Fluoropolymer fittings: LQ series Note 3) Applicable Note 2) fittings Miniature fittings: M, MS series (Hose nipple type) 20C 0.7 0.25 0.1 Refer to the max. operating pressure curve. 1 0.4 0.2 0.7 0.25 0.1 1 0.4 0.2 1.5 0.55 0.3 1.7 0.6 0.3 2.3 0.85 0.4 100C Max. operating pressure (MPa) 200C How to measure the minimum bending radius.