Fluoropolymer Piping Equipment

5/32" 3/8" x 1/4" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" LQ3T2A-R1 LQ3T2A-R5 LQ3T3A-R1 LQ3T3A-R2 LQ3T3A-R5 LQ3T3A-R7 LQ3T3A-R9 LQ3T4A-R1 LQ3T4A-R2 LQ3T4A-R5 LQ3T4A-R6 LQ3T4A-R7

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

" 3/4" x 5/8" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" LQ3T11-R1 LQ3T11-R5 LQ3T21-R1 LQ3T21-R2 LQ3T21-R5 LQ3T21-R6 LQ3T31-R1 LQ3T31-R2 LQ3T31-R5 LQ3T31-R6 LQ3T32-R1 LQ3T32-R5 LQ3T41-R1 LQ3T41-R5 LQ3T51

M-E05-1-LQ1

Nut Insert bushing Nut Insert bushing Nut Insert bushing LQ1T3A-R5 3 3-07 LQ1-3N07 LQ1-3B07 3-11 LQ1-3N11 LQ1-3B11 3-11 LQ1-3N11 LQ1-3B11 LQ1T3A-R7 3 3-11 LQ1-3N11 LQ1-3B11 3-07 LQ1-3N07 LQ1-3B07 3-07 LQ1-3N07 LQ1-3B07 LQ1T4A-R2 4 4-13 LQ1-4N13 LQ1-4B13 2-07 LQ1-2N07 LQ1-2B07 4-13 LQ1-4N13 LQ1-4B13 LQ1T4A-R4 4 4-13 LQ1-4N13 LQ1-4B13 2-03 LQ1-2N03 LQ1-2B03 4-13 LQ1-4N13 LQ1-4B13 LQ1T4A-R5

Battery-less

3 !2 @0 @1 !7 !5 !0 t @3 Component Parts No.

AHC System Series MA

x M3 x 0.5 depth 4 For mounting tool adapter (PCD16) 3 x M3 x 0.5 depth 4 10f8 0.013 0.035 10f8 0.013 0.035 34 29 Hexagon socket head cap screw M3 x 12 (3 included) 3.5 0 0.03 3 x 3 (A, B, C common view) 0 0.03 +0.022 0 depth 6 3.5 6 x M2 x 0.4 thread depth 4 (A, B, C common view) 3 0 0.02 3 Open: 22, Closed 14 0 0.02 Open: 16, Closed: 10 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment

Metal Seal/Rubber Seal Series VQ Body Ported

SI unit output no. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no.

Vacuum Module Series ZX

Vacuum release 3. Operation stop 3. Operation stop 931 Series ZX Made to Order Specifications: Please consult with SMC for detailed size, specifications and delivery.

Large Size Vacuum Module: Series ZR

Example) ZR100-K15MZ-EC (-Q) . 1 pc. 3 L 38 ZS VJ10-20-4A-6 . 3 pcs.

VQZ1000/2000/3000

(A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

2

Metal parts material Metric size Inch size Applicable tubing material Seal method Port size Body size 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 16 12 10 8 6 4 3.2 2 3 Gasket seal M5 x 0.8 1 3 10-32UNF 3 1/8 2 3 3 1/4 Sealant 2 R 1/4 NPT 3 Brass/ Nylon (Series T, TIA) 3/8 Steel wire 3 Stainless 1/2 4 steel Soft nylon (Series TS, TISA) 3 1/8 2 3 Polyurethane (Series T, TIUB) 1/4 Face seal 1/4 G 1 3

10

N P 5 Q Size 3 3 200 VAC N.C. 1/4 8 R 230 VAC 10 (N.C. only) 6 N.O.

For post-stoppage positioning and locking

Connector pin arrangement Type Connector pins and arrangement 1 2 3 4 E2E-X7D1-M1J-T10.3M OUT ( ) OUT () 1 Pallet Lock Cylinder W-R1/W-R3 Series Dimensions W-R1-S2Position of fulcrum 2 x 18.5 Proximity switch mounting bracket 68 Proximity switch (Option) 117 15 15 26 26 2 x Rc3/8 36.5 6.5 R5 30 50 190 117 250 220 200 140 30 60 2 x M8 x 1.25 thread depth 13 (External cover mounting screw

Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: 3 (External Stopper: 90°)

Oscillation Angle A: [90°] External stopper, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 6.6, Size: 50, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Without

V100

VQZ 3(R) 3(R) VZ (G) (E) (T) (D, Y) VS N.C.

Shock Absorbers and Rate Controls

19.0/ -3' 3t.zo.3' 38.0 t6.o'3' 73 38 38 35 26 N/A 23.0 2 1tl PfN2 | 00cxt(sl 408 r9.04'19.o7fr 3t.lo i., 38.0 r6.0'fi 73 38 38 35 26 N/A 23.0 P 2l50(flt(S) 537 r 9.07-3 ' r9.07'3' 3r.zo 3',38.0 t6.l)f 5 7 1 38 38 35 I O r,l/A 23.0 5.08 PRO| |o(n(Sl 2l I 5.oo tl 5.00 -3' 8.00 i, o.oo j., fi/A 28 N/A 22 l l l 3 5.0 t.0 0.54 PR0r 25(lt(sl 180 6.38 -35 6.38 -3' 12.70 il I?.

Vacuum

Digital Display (3% digit LCO) . Predicted Failure Function . 2 Setpoint Use . High Accuracy O Do not subiect body to excessive exiernal force. O Plping tightening to.ques How To Older (Exampre) 3 4 ( 3 1 3 1 7 ( 1 5 1 5 2 0 ( 1 7 NZXl Nozzle Diameter (Same as Std.) Eiector Exhaust Type (Same as Std.)

Vacuum

Digital Display (3% digit LCO) . Predicted Failure Function . 2 Setpoint Use . High Accuracy O Do not subiect body to excessive exiernal force. O Plping tightening to.ques How To Older (Exampre) 3 4 ( 3 1 3 1 7 ( 1 5 1 5 2 0 ( 1 7 NZXl Nozzle Diameter (Same as Std.) Eiector Exhaust Type (Same as Std.)

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.