JXCx-OMT0001CN

(14.2) (b) (8) 2 1 (a) (14) (18) B1 A1 (17.7) 6 5 (c) 2 1 A6 B6 15 16 L (11) (30.7) 12.4 [820m] (a) (b) L E C P -* A B-1 2 L A A-1 1 B B-2 6 ) 8 8m B A-2 5 COM-A/COM B-3 3 ) A 10m COM-B/ A-3 4 ) B 15m (c) Shield ) C 20m Vcc B-4 12 GND A-4 13 A B-5 7 ) A A-5 6 () B B-6 9 B A-6 8 3 (14.2) (b) 2 1 (5.5) (14) (a) B1 A1 5 (17.7) 6 (c) 2 1 (18) A6 B6 (6.3) 16 15 L (11) (30.7) -82No.JXC-OMT0001CN-C

SFOD-OMT0010

Do not perform a setting for Axis 4. 54 No.SFOD-OMT0010-B (4) CIR-R / CIR-L Area 1 Step No.

SFOD-OMT0009CN

B3 A3 (d) (5.7) 15 16 83 L (11) (30.7) No.SFOD-OMT0009CN-B 10.7 I/O J X C C 2 * L 1 1.5m 40 AWG AWG28 3 3m 5 5m PLC (7.5) R1.25-4(M4 ) 40 20 39 . . . 2 21 1 L PLC 1.27mm No.

JXCx-OMU0024

(When the LER series is used, enter the part number including the rotation angle). e.g. 1) For LEY16RA-100BML, enter "LEY16RA-100". e.g. 2) For LERH30K-3L, enter "LERH30K-3".

SFOD-OMT0012

(When the LER series is used, enter the part number including the rotation angle). e.g. 1) For LEY16RA-100BML, enter "LEY16RA-100". e.g. 2) For LERH30K-3L, enter "LERH30K-3".

Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5)

Oscillation Angle A: 320°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 1.2, Size: 30, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Standard cable, Actuator

Compact Cylinder

Series CQ2 Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 B + Stroke S1 L L L L B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2) A + Stroke (S1 + S2) Note) In the case of 12 to 25 with auto switch, port directions are different.

NCQ2/CQ2

Series (N)CQ2 Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 B + Stroke S1 L L L L B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2) A + Stroke (S1 + S2) Note) In the case of 12 to 25 with auto switch, port directions are different.

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Made to Order

CQ2 series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 L B + Stroke S1 L B + Stroke S2 L L B + Stroke S1 A + Stroke (S1 + S2) A + Stroke (S1 + S2) Note) In the case of bore sizes 12 to 25 with auto switch, port directions are different.

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

JXCx-OMT0023

Refer to section 11.4 for the wire used for the extension cable. 2m or less MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L LE-CSM50m or less Driver Servo motor Servo amplifier Extension cable CNP1 AWG 19(red) AWG 19(white) AWG 19(black) AWG 19(green/yellow) U V U V M W W (Note) a) Relay connector for extension cable (Note) b)

Vacuum Module Series ZX

Z E C K1 L Valve unit N.O. type Vacuum switch unit 5 L Z E C K3 ZX100 CE compliant Nil Q Valve unit N.C. type Filter unit 5 L Z K1 ZX100 F CE marked Release flow rate adjusting needle Valve unit/Combination of supply valve and release valve Refer to Table (1) on page 903.

Metal Seal/Rubber Seal Series VQ Body Ported

L plug connector is used for AC.

1

C0.5 file chamfer C WA DA F L X L R sphere F X X L R sphere TP H1 L T W1 L T L W1 L L 6-17-10 6-17-11 10 Simple Specials -XA1 to XA38: Change of Rod End Shape These changes are dealt with Simple Specials System.

Electric Actuator

5: LEYG16 B M L Lead 5: LEYG16 AB M L Lead 10: LEYG16 AA M L 4.4 4.4 Lead 10: LEYG16 A M L 0 0 600 0 100 200 300 400 500 600 0 100 200 300 400 500 Speed [mm/s] Speed [mm/s] LEYG25 l M LEYG25 Al M L L 33 66 Lead 3: LEYG25 C M L Lead 3: LEYG25 AC M L Vertical work load [lb] Vertical work load [lb] 22 44 Lead 6: LEYG25 B M L Lead 6: LEYG25 AB M L 11 22 Lead 12: LEYG25 A M L Lead 12: LEYG25 AA

Base Mounted Metal Seal/Rubber Seal Series VQ

VQZ VQD Except L kit Except L kit Except L kit P. 2-4-177 P. 2-4-166 For S, G kit, please contact SMC.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

SV

010 050 1000 mm 5000 mm l Terminal no.