JXCx-OMT0001CN

(14.2) (b) (8) 2 1 (a) (14) (18) B1 A1 (17.7) 6 5 (c) 2 1 A6 B6 15 16 L (11) (30.7) 12.4 [820m] (a) (b) L E C P -* A B-1 2 L A A-1 1 B B-2 6 ) 8 8m B A-2 5 COM-A/COM B-3 3 ) A 10m COM-B/ A-3 4 ) B 15m (c) Shield ) C 20m Vcc B-4 12 GND A-4 13 A B-5 7 ) A A-5 6 () B B-6 9 B A-6 8 3 (14.2) (b) 2 1 (5.5) (14) (a) B1 A1 5 (17.7) 6 (c) 2 1 (18) A6 B6 (6.3) 16 15 L (11) (30.7) -82No.JXC-OMT0001CN-C

SFOD-OMT0010

Do not perform a setting for Axis 4. 54 No.SFOD-OMT0010-B (4) CIR-R / CIR-L Area 1 Step No.

SFOD-OMT0009CN

B3 A3 (d) (5.7) 15 16 83 L (11) (30.7) No.SFOD-OMT0009CN-B 10.7 I/O J X C C 2 * L 1 1.5m 40 AWG AWG28 3 3m 5 5m PLC (7.5) R1.25-4(M4 ) 40 20 39 . . . 2 21 1 L PLC 1.27mm No.

JXCx-OMU0024

(When the LER series is used, enter the part number including the rotation angle). e.g. 1) For LEY16RA-100BML, enter "LEY16RA-100". e.g. 2) For LERH30K-3L, enter "LERH30K-3".

SFOD-OMT0012

(When the LER series is used, enter the part number including the rotation angle). e.g. 1) For LEY16RA-100BML, enter "LEY16RA-100". e.g. 2) For LERH30K-3L, enter "LERH30K-3".

Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 3 (3)

Oscillation Angle A: 320°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 1.2, Size: 30, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable

Fluoropolymer Piping Equipment

B E E F G H L L M Min. port size 2 x B L, L LQ3T11 4 3.5 10 9 4.8 9.5 11 28.5 27.5 14 2.5 LQ3T12 3 2 LQ3T21 6 4 17 16 6 12 16 34.5 33.5 20 4 LQ3T31 10 5 22.5 19.5 9 18 21 47.5 44.5 25 7.5 LQ3T32 8 6.4 LQ3T41 12 6 24 22 10 20 24 52.5 50.5 29 9.5 LQ3T51 19 7 26.5 24 14 28 32 64 61.5 37 16 LQ3T61 25 8 30 26 18 36 41 78 74 49 22 M (E, E) (E, E) G H L, L L, L (E,E): Reference dimension for the

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

2

Auto Drain The Japan Refrigeration and Air Conditioning Industry Association JRA GL-02-1994 Cooling water system Circulation type Circulating water Caution Unit [S/cm] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] Item pH (at 25C ) Electrical conductivity (25C ) Chloride ion (Cl) Sulfuric acid ion (SO42) Standard value

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

2-Color Display Digital Flow Switch Series PFM

Flow range Sensor 0.2 l/min 0.5 l/min 1 l/min 2 l/min 10 l/min 25 l/min 50 l/min 100 l/min 0.2 l/min 10 l/min (5 l/min) PFM710 PFM510 0.2 l/min 10.5 l/min (5.2 l/min) 10.5 l/min (5.2 l/min) 0 0.5 l/min 25 l/min (12.5 l/min) PFM725 PFM525 0.5 l/min 26.3 l/min (13.1 l/min) 26.3 l/min (13.1 l/min) 0 1 l/min 50 l/min (25 l/min) PFM750 PFM550 1 l/min 52.5 l/min (26.2 l/min) 52.5 l/min (26.2 l/

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Stainless Steel 316

(mm) Model R3/8 4 6 8 10 12 KQGT04-00 KQGT06-00 KQGT08-00 KQGT10-00 KQGT12-00 R1/4 10 R3/8 R3/8 12 R1/2 Straight Union Straight Union Union Y Union Y Applicable tubing O.D. (mm) Model Applicable tubing O.D.

Battery-less

16: LEFS32(L/R)EA Lead 16: LEFS32(L/R)EA 20 10 Lead 24: LEFS32(L/R)EH Lead 24: LEFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEFS40(L/R)EB Lead 10: LEFS40(L/R)EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEFS40(L/R)EA 30 Lead 30: LEFS40(L/R)EH Lead 20

Table of Contents

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

min) 10.0 L/min (5 L/min) 0.1 L/min PF2M710(-L) 0.5 L/min 10.5 L/min (5.25 L/min) 0.5 L/min 10.5 L/min (5.25 L/min) 0.3 L/min 25.0 L/min (12.5 L/min) PF2M725(-L) 1.3 L/min 26.3 L/min (13.1 L/min) 26.3 L/min (13.1 L/min) 1.3 L/min 50.0 L/min (25 L/min) 0.5 L/min PF2M750(-L) 52.5 L/min (26.3 L/min) 2.5 L/min 52.5 L/min (26.3 L/min) 2.5 L/min 100.0 L/min (50 L/min) 1.0 L/min PF2M711(-L) 5.0

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

L/min 0.5 to 0.5 L/min range 2 to 200 L/min 5 to 500 L/min 150 to 3000 L/min 0 to 1 L/min 0 to 3 L/min 1 to 1 L/min 3 to 3 L/min 10 to 1000 L/min 1 to 50 L/min 10 to 100 L/min 20 to 200 L/min 300 to 6000 L/min 2 to 100 L/min 600 to 12000 L/min Power supply voltage 24 VDCp10% 24 VDCp10% 12 to 24 VDCp10% 12 to 24 VDCp10% (25C reference) characteristics p3%F.S.(15 to 35oC) p2%F.S.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

B E E F G H L L M Model 2 x B L,L LQ3T11 LQ3T12 LQ3T21 LQ3T31 LQ3T32 LQ3T41 LQ3T51 LQ3T61 4 3 6 10 8 12 19 25 M 4.8 9.5 11 28.5 27.5 14 3.5 10 9 4 17 16 6 12 16 34.5 33.5 20 (E,E) (E,E) G H 9 18 21 47.5 44.5 25 5 22.5 19.5 L,L L,L 6 7 8 24 26.5 30 22 24 26 10 14 18 20 28 36 24 32 41 52.5 64 78 50.5 61.5 74 29 37 49 (E,E): Reference dimension for the inserted tubing from the end surface of