Oscillation Angle A: 360°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Others, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.8, Size: 30, Motor cable entry direction: Entry on the left side, Actuator cable type: Without cable, Actuator

Table Accuracy: High Precision Type, Size: 30, Max. Rotation Torque: Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6, Motor Cable Entry: Entry of Left Side, Actuator Cable Type: Standard Cable, Actuator Cable Length: 3m, Controller Type: LECP6, Step Data Input Type, PNP, I/O Cable Length: 3m, Communication Plug Connector: None, Controller Mounting: DIN Rail Mounting

Table Accuracy: High Precision Type, Size: 30, Max. Rotation Torque: Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6, Motor Cable Entry: Entry of Left Side, Actuator Cable Type: Robotic Cable, Flexible Cable, Actuator Cable Length: 3m, Controller Type: LECP6, Step Data Input Type, PNP, I/O Cable Length: 3m, Communication Plug Connector: None, Controller Mounting: DIN Rail Mounting

Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: 3 (External Stopper: 90°), Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 3 (3), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for

Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: 2 (External Stopper: 180°), Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 3 (3), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for

Table Accuracy: H (High Precision Type), Size: 30, Max. Rotation Torque: J (Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6), Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Table Accuracy: High Precision, Size: 30, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 90°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 3, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller

Table Accuracy: High Precision, Size: 30, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 3, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller

Table Accuracy: High Precision Type, Size: 30, Max. Rotation Torque: Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6, Motor Cable Entry: Basic Type, Entry on Right Side, Actuator Cable Type: Robotic Cable, Flexible Cable, Actuator Cable Length: 3m, Controller Type - JXC: JXC91, EtherNet/IPâ„¢ Direct Input Type, Controller Mounting: DIN Rail Mounting, Communication Plug Connector for DeviceNetâ

Table Accuracy: Basic Type, Size: 10, Max. Rotation Torque: J (Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6), Motor Cable Entry: L (Entry of Left Side), Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Table Accuracy: Basic Type, Size: 50, Max. Rotation Torque: J (Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6), Motor Cable Entry: L (Entry of Left Side), Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - JXC: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Table Accuracy: Basic Type, Size: 50, Max. Rotation Torque: Basic, LER10: 0.22; LER30: 0.8; LER50: 6.6, Motor Cable Entry: Entry of Left Side, Actuator Cable Type: Robotic Cable, Flexible Cable, Actuator Cable Length: 3m, Controller Type - JXC: JXC91, EtherNet/IPâ„¢ Direct Input Type, Controller Mounting: DIN Rail Mounting, Communication Plug Connector for DeviceNetâ„¢: -

Oscillation Angle A: 360°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Others, Rigidity Accuracy: Standard, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.22, Size: 10, Motor cable entry direction: Entry on the left side, Actuator cable type: Robotic (flexible) cable, Actuator cable

Series IDG

Note 3) Includes dew point indicator purge air flow rate of 1l/min (ANR) (0.035SCFM) (inlet air pressure at 0.7MPa) (101.5psi).

0.55

/Dimensions 3/8, 1/2 2(A) port Standard/VPA744-1l 03 04 A B 40 16 64 24 3/8, 1/2 3(R) port 1/8 12(PA) port 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 12 3R NC 1P (1/8) 12(PA) port 11.5 16 115.1 107.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 3/8, 1/2 1(P) port 80 03 04 A B For vacuum/VPA744V-1l 3/8, 1/2 2(A) port 40 16 64 3/8, 1/2 3(R) port 24 18 67 2 x 6.2 (For mounting) NO

Digital Flow Switches

Sensor 1l/min 5l/min 10l/min 20l/min 50l/min 100l/min 200l/min 500l/min Flow rate range 1l/min 10l/min PF2A510 0.5l/min 10.5l/min 5l/min 50l/min PF2A550 52.5l/min 2.5l/min 10l/min 100l/min PF2A511 105l/min 5l/min 20l/min 200l/min 210l/min 10l/min PF2A521 50l/min 500l/min 525l/min 25l/min PF2A551 Sensor Flow rate range 0.5l/min 2l/min 5l/min 10l/min 20l/min

5-Port Solenoid Valve

side ported. 284 SY3000/5000/7000 Series Dimensions: SY3000 Series Bottom Ported Plug-in Single Unit/Sub-plate SY3l0 0 1l-lll1-Wl-B01l (Bottom ported) For "F" marking (Thread type) Plug 19 F 83.2 51.1 34.5 8.8 Manual override ( ) 35.9 (Max. 3) Push-turn locking slotted type: Press, then rotate it. 2 x 3.2 (For mounting) 4(A) port side: Blue (For rubber seal) : Gray (For metal seal) 2(B)

Tamper Proof and Flat Head Screw

JIS symbol 1/8, 5/32 3/16, 1/4 3/8 5/16 3/16, 1/4 1/4 3/16 1/4, 5/16 1/2 Inch sizes 3/8 5/32 Flow rate l/min (ANR) {Nl/min} 920 660 230 420 1390 290 460 1050 100 130 Controlled (Free) Effective area mm flow 14 10 3.5 6.5 21 4.5 7 16 2 1.5 1l/min=0.035SCFM 18mm2=1Cv Note 1) Flow rate values are at a pressure of 0.5MPa (72.5psi) and temperature of 20C (68F).

Digital Flow Switches, Series PF2A, Series PF2W

/min 1l/pulse 10 to 210l/min 10 to 210l/min 20 to 200l/min 2l/min 2l/pulse 25 to 525l/min 25 to 525l/min 50 to 500l/min 5l/min 5l/pulse Accumulated pulse flow rate exchange value (Pluse width: 50ms) l/min, CFM x 10-2 l/min, CFM x 10-1 Real-time flow rate Accumulated flow Display units Note 1, 2) l, ft3 x 10-1 Operating fluid temperature Linearity Repeatability Temperature characteristics

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Note 3) Includes dew point indicator purge air flow rate of 1l/min (ANR) (inlet air pressure at 0.7MPa).