High Vacuum Angle Valve Metal parts material Metric size Inch size Applicable tubing material Seal method Port size Body size 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 16 12 10 8 6 4 3.2 2 3 Gasket seal M5 x 0.8 1 3 10-32UNF 3 1/8 2 3 3 1/4 Sealant 2 R 1/4 NPT 3 Brass/ Nylon (Series T, TIA) 3/8 Steel wire 3 Stainless 1/2 4 steel Soft nylon (Series TS, TISA) 3 1/8 2 3 Polyurethane (Series T, TIUB) 1/4 Face seal 1/4 G 1 3
2-1 3 4 5 6 O-ring Part No.
Applicable body size Nut Insert bushing LQ1E21-SS-R9 2 2-06 LQ1-2N06 LQ1-2B06 3 LQ1E21-SS-R10 2 2-06 LQ1-2N06 LQ1-2B06 4 LQ1E31-SS-R2 3 3-10 LQ1-3N10 LQ1-3B10 2 LQ1E31-SS-R8 3 3-10 LQ1-3N10 LQ1-3B10 4 LQ1E32-SS-R1 3 3-08 LQ1-3N08 LQ1-3B08 2 LQ1E32-SS-R8 3 3-08 LQ1-3N08 LQ1-3B08 3 LQ1E41-SS-R1 4 4-12 LQ1-4N12 LQ1-4B12 3 LQ1E41-SS-R3 4 4-12 LQ1-4N12 LQ1-4B12 2 LQ1E41-SS-R8 4 4-12 LQ1-4N12 LQ1
29.9 28 18 28 18 POWER FLOW POWER FLOW 42.5 3 3 42.5 51.5 (Max.58.5) Panel thickness 1 to 3.2 Panel thickness 1 to 3.2 Panel Fitting Dimensions Panel Fitting Dimensions 94 or more Note) 94 or more Note) 24 +0.5 0 54 +0.5 0 74 +0.5 0 24 +0.5 0 34 or more 34 or more 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness
Male thread type Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Part no.
Male thread type Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Part no.
(mm) Model R3/8 4 6 8 10 12 KQGT04-00 KQGT06-00 KQGT08-00 KQGT10-00 KQGT12-00 R1/4 10 R3/8 R3/8 12 R1/2 Straight Union Straight Union Union Y Union Y Applicable tubing O.D. (mm) Model Applicable tubing O.D.
(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3 0
(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 4 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3
tubing size (mm) 1/8" x 0.086" No. 1 1 2 2 3 3 3 3 3 3 3 4 4 4 4 5 5 5 6 6 6 Size No. 1 2 2 3 3 3 3 4 4 4 4 5 5 5 6 6 6 7* 7* 7* 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 3/4" 1" 1 1/4" 1/8" 1/4" x 5/32" 1/8" 1/4" 6 x 4 10 x 8 8 x 6 10 x 8 8 x 6 10 x 8 3/8" x 1/4" 1/8" 1/4" 1/2" x 3/8" 3/8" 8 x 6 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1
valve A 78 [mm] Model A PF2M705/710/725/750W-m(-L) 91.2 PF2M711/721W-m(-L) 93 29.9 28 38.5 3 Panel thickness 1 to 3.2 Panel Fitting Dimensions 94 or more1 24 +0.5 0 74 +0.5 0 34 or more 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm 1 This is the minimum value when the rear ported type is selected for the piping entry direction.
0.5 24 +0.5 74 +0.5 0 0 0 0 34 or more 34 or more 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom piping.
0.55 5 0.7 10 1 15 1.3 Outlet air pressure dew point [C] Correction factor 3 0.55 5 0.7 10 1 15 1.3 Refrigerant R134a (HFC) IDU E IDU55E, 75E IDF100F to 150F Outlet air pressure dew point [C] Correction factor 3 0.55 5 0.7 10 1 15 1.4 dew point [C] Correction factor 3 0.53 5 0.67 10 1 15 1.30 Refrigerant R407C (HFC) IDU E Data E: Air Flow Capacity IDF Series Model IDF1E IDF2E IDF3E IDF4E
MA310-EY1 MA310-EA1 Additional installation unit Application Note AHC unit Hexagon socket head cap screw M2.5 x 10 (2 pcs.) 8 contact points Tool adapter 748 AHC System Series MA3 How to Order AHC unit MA 3 Y M5 0 1 A R3 Robot adapter Auto hand changer Tool adapter Without robot adapter 10 11 14 15 20 24 25 Nil R1 R2 R3 R4 R5 S6 R6 Transportable mass Transportable mass 5 kg 3 Applicable shaft
A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16
thread Model KBL1-R1S KBL2-R1S KBL2-R2S R1 8 Male Connector Socket: KBB Female Connector Socket: KBS KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S R1 2 R3 8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 Combination Examples
Pallet Lock Cylinder W-R1/W-R3 Series How to Order W R1 S2 Type 1 B W R3 S B Type 3 Proximity Switch B With mounting bracket (Without proximity switch) SC With proximity switch * For details, refer to the table below.