Table Accuracy: Basic, Size: 10, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 3, Controller: Step Data Input Type, PNP, I/O Cable Length: 3, Communication Plug Connector: -, Controller Option: -

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 3, Controller Type - LEC, JXC: JXCE1, EtherCAT®, I/O Cable Length for LEC: w/o Cable, Controller Option: DIN Rail Mounting, Communication

SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.? A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.? Rotation angle is possible up to 320 (310 on LER10).? Up?to 6.6 N?m of rotation torque (3.3 N?m of pushing torque available).? The rotation speed of

SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.  A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.  Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed

SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.  A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.  Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed

Step Motor Driver （ Pulse input type ）

2 2 Unit name Part no. of each product W-AREA1 0.00 0.00 0.00 W-AREA2 0.00 0.00 0.00 ORG Correct 0.00 0.00 0.00 Sensor type 1 1 1 Option set1 1 1 1 Undefined parameter11 1 1 1 Undefined parameter12 1 1 1 LER Return to origin parameter default Model LER10K LER10J LER30K LER30J LER50K LER50J ORIG direction 2 2 2 Return to origin parameter default ORIG mode 1 1 1 ORIG limit 50 50 50 ORIG time

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LER10J, I/O cable length / communication plug(m): Without I/O cable, Controller/driver mounting method: Screw mounting type

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 3 (3)

Oscillation Angle A: 310°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: Standard, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.22, Size: 10, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable, Actuator cable length(

Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: 2 (External Stopper: 180°), Motor Cable Entry: L (Entry on the Left Side), Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 3 (3)

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°, Motor Cable Entry: Entry on the Left Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 3, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable Length

Fluoropolymer Piping Equipment

C2 H2 (E2) L2 Class 3 to 5 LQ1E3A-R3 3/8" 1/8" 24 15 21 14 35.5 31.5 28 16.5 1.8 LQ1E4A-R2 1/2" 1/4" 6 9 9 24 20 21 17 43 38.5 28 23 3.6 LQ1E4A-R3 1/2" 3/16" 15 14 35.5 31.5 16.5 2.9 LQ1E4A-R4 1/2" 1/8" 1.8 LQ1E5A-R2 3/4" 3/8" 39.5 20 36 17 54 47.5 49 23 5.8 46 LQ1E5A-R3 3/4" 1/4" 3.6 LQ1E5A-R4 3/4" 3/16" 15 14 51 42 16.5 2.9 LQ1E6A-R2 1" 1/2" 24 21 56.5 52.5 28 9 46 LQ1E6A-R3

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

2

Symbol Size 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3/8, Rc3/8 04 R1/2, Rc1/2 Thread connection Fittings Applicable tubing O.D.

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

M-E05-1-LQ1

Nut Insert bushing Nut Insert bushing LQ1U31-R3 3 4-10 LQ1-4N10 LQ1-4B10 2-04 LQ1-2N04 LQ1-2B04 LQ1U31-R4 3 4-10 LQ1-4N10 LQ1-4B10 2-03 LQ1-2N03 LQ1-2B03 LQ1U41-R2 4 4-12 LQ1-4N12 LQ1-4B12 3-08 LQ1-3N08 LQ1-3B08 LQ1U41-R3 4 4-12 LQ1-4N12 LQ1-4B12 2-06 LQ1-2N06 LQ1-2B06 LQ1U41-R4 4 4-12 LQ1-4N12 LQ1-4B12 2-04 LQ1-2N04 LQ1-2B04 LQ1U41-R5 4 4-12 LQ1-4N12 LQ1-4B12 2-03 LQ1-2N03 LQ1-2B03 LQ1U51

2-Color Display Digital Flow Switch Series PFM

Piping Variations With one-touch fittings (C4, C6, C8, N7) Female thread (01, 02, N01, N02, F01, F02) Straight (Nil) Bottom (L) Straight (Nil) Bottom (L) Without flow adjustment valve (Nil) S 1 2 S 1 2 S S 1 1 2 2 IN 1 IN 1 IN IN With flow adjustment valve (S) S S 1 2 1 2 S S 1 1 2 2 IN IN 1 IN 1 IN 906 2-Color Display Digital Flow Switch Series PFM7 Option 1 Nil With lead wire with connector

S Couplers Series KKA

Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in

Table of Contents

Series KKA Series KKA P.15-2-89 to 15-2-95 Stainless steel type Male thread type Port size Series KKA3 KKA4 KKA6 R1/8 R1/4 R3/8 R1/2 R3/4 Female thread type Port size Series KKA3 KKA4 KKA6 Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 Series KK13 15-2-74 3 Series KK S Couplers M5 size (Series KK2) is newly added.

KJ

Series KKA Series KKA P.15-2-89 to 15-2-95 Stainless steel type Male thread type Port size Series KKA3 KKA4 KKA6 R1/8 R1/4 R3/8 R1/2 R3/4 Female thread type Port size Series KKA3 KKA4 KKA6 Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 Series KK13 15-2-74 3 Series KK S Couplers M5 size (Series KK2) is newly added.