Bearing Type: L (Ball Bushing Bearing), Stroke: 500mm, Motor Option: None, Switch Rail Option: w/o Option, Actuator Cable Type: S (Standard Cable), Actuator Cable Length, m: 1 (1.5), Controller Type - LEC, JXC: 1P (LECP1, Programless Type, PNP), I/O Cable Length for LEC: 1 (1.5)

Bearing Type: Ball Bushing Bearing, Stroke: 500mm, Motor Option: None, Switch Rail Option: w/o Option, Actuator Cable Type: Standard Cable, Actuator Cable Length, m: 1.5, Controller Type - LEC, JXC: LECP1, Programless Type, PNP, I/O Cable Length for LEC: 1.5, Controller Mounting: -, Communication Plug Connector: -

Designed to be compact and function in areas where height and space is limited, SMC's new LEL low-profile electric actuator acheives a 50% reduction in height (when compared to the LEFB) by side mounting the motor.  Suitable for handling operations, this guide rod slider is available with sliding bearings or ball bushing bearings.  Both types offer positioning repeatability of ±0.1mm, and

Designed to be compact and function in areas where height and space is limited, SMC's new LEL low-profile electric actuator acheives a 50% reduction in height (when compared to the LEFB) by side mounting the motor.  Suitable for handling operations, this guide rod slider is available with sliding bearings or ball bushing bearings.  Both types offer positioning repeatability of ±0.1mm, and

JXCx-OMT0023

command Program end 500[r/min] 200[ms] 300[ms] 500[10STMm] 1000[r/min] 500[ms] 1000[10STMm] 1500[r/min] 100[ms] 0[10STMm] a) b) c) d) e) f) g) h) i) j) Ignored.

NCQ2/CQ2

Stroke S1 S2 50 55 to 75 80 to 100 55 to 75 80 to 100 Warranty and Operating Instructions Bore size 55 to 75 50 55 to 75 23 (33) + Stroke S1 29.5 (39.5) + Stroke S1 30.5 (40.5) + Stroke S1 36 (46) + Stroke S1 43.5 (53.5) + Stroke S1 53 (63) + Stroke S1 145.4 (155.5) + Stroke S1 161.5 (171.5) + Stroke S1 164 (174) + Stroke S1 171 (181) + Stroke S1 189.5 (199.5) + Stroke S1 210.5 (220.5) +

Compact Cylinder

Stroke S1 S2 50 55 to 75 80 to 100 55 to 75 80 to 100 55 to 75 50 55 to 75 23 (33) + Stroke S1 29.5 (39.5) + Stroke S1 30.5 (40.5) + Stroke S1 36 (46) + Stroke S1 43.5 (53.5) + Stroke S1 53 (63) + Stroke S1 Bore size 145.4 (155.5) + Stroke S1 161.5 (171.5) + Stroke S1 164 (174) + Stroke S1 171 (181) + Stroke S1 189.5 (199.5) + Stroke S1 210.5 (220.5) + Stroke S1 170.5 (180.5) + Stroke S1

Made to Order

CQ2 series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 L B + Stroke S1 L B + Stroke S2 L L B + Stroke S1 A + Stroke (S1 + S2) A + Stroke (S1 + S2) Note) In the case of bore sizes 12 to 25 with auto switch, port directions are different.

Electric Actuator

to 100 25 92 1 26.5 40 87 120 14.1 123.9 156.9 15.8 82.4 115.4 14.1 123.5 156.5 15.8 105 to 400 20 to 100 32 118 1 34 60 88.2 128.2 17.1 116.8 156.8 17.1 76.6 116.6 17.1 116.1 156.1 17.1 105 to 500 Motor left side parallel type/LEY L 25 32 Motor right side parallel type/LEY R 25 32 U S1 U S1 [mm] T2 T2 S1 T2 U Size 25 32 47 91 1 61 117 1 Note) When the motor is mounted on the left or right

Electric Actuator

500 500 500 500 Mep m 0 0 0 1 2 3 4 5 Work load [kg] 0 0 5 10 15 Work load [kg] 0 0 20 0 25 20 15 10 5 5 10 15 L4 Vertical Work load [kg] Work load [kg] 1,500 2,000 2,000 2,000 1,500 1,500 1,500 1,000 L5 [mm] L5 [mm] L5 [mm] L5 [mm] 1,000 1,000 1,000 500 500 500 500 Mey m 0 0 0 1 2 3 4 5 Work load [kg] 0 0 5 10 15 Work load [kg] 0 0 Work load [kg] 0 25 20 15 10 5 5 10 15 20 L5 Work load

LEC-OM071xx

The station address is set using the rotary switches S1 and S2. (1) Settings of the Rotary Switches S1 and S2 Set the station address using the rotary switches S1 and S2. Station Address S1 S2 00H to 02H: Disabled (Do not use these addresses.) 0 0 to 2 03H (Factory setting) 0 3 04H 0 4 EFH E F F0H to FFH: Disabled (Do not use these addresses.)

1

Series CQ2 Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B + Stroke S2 B + Stroke S1 B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2)

Electric Actuator

Belt Drive/Series LEJB Work load: Horizontal (kg) 2 Equivalent lead Speed (mm/s) (mm) Stroke (mm) 1 Page Size 10 5 15 20 25 30 500 1000 1500 2000 2500 3000 (200), 300, (400), 500, (600), (700), 800 40 27 (900), 1000, (1200), (1500), (2000) Page 14 (300), (400), 500, (600), (700), 800 63 42 (900), 1000, 1200, (1500), (2000), (3000) 1 Strokes shown in ( ) are produced upon receipt of order.

SV

S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

Electric Actuator/Slider Type

1,500 2,000 2,000 2,000 1,500 1,500 1,500 1,000 L3 L3 [mm] L3 [mm] L3 [mm] L3 [mm] 1,000 1,000 1,000 Mer m 500 500 500 500 0 60 50 40 30 20 10 0 0 2 4 6 8 10 Work load [kg] 0 0 Work load [kg] 0 0 Work load [kg] 0 Work load [kg] 5 10 15 20 10 20 30 40 1,500 2,000 2,000 2,000 1,500 1,500 1,500 1,000 L4 [mm] L4 [mm] L4 [mm] L4 [mm] 1,000 1,000 1,000 500 500 500 500 Mep m 0 0 0 1 2 3 4 5 Work

2

500 110 Auto-drains listed on page 95 are attached.

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

Environment

500 500 500 Mey m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.