VQZ1000/2000/3000

Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VQZ2121-C6 800 700 600 500 400 300 200 100 0 VQZ3121-C6 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being

2

Wall Note) For air-cooled type, leave a space of at least 600 mm between the heat exhausting surface and the wall. For water-cooled type, leave a space at least 600 mm between the facility water piping side and the wall. Leave at least 600 mm on the sides indicated with .

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

10

When P2 + 0.1 b, choked flow P1 + 0.1 Q = 600 x C (P1 + 0.1) (1) 293 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are also allowed to be described by L (liter). 1 dm3 = 1 L 38 Solenoid Valve Flow-rate Characteristics Series VX21/22/23 C : Sonic

AHC System Series MA

M3 x 10 (4 pcs.) 11 14 15 20 740 AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC

Accuracy: H (High Precision Type), Size: 63, Motor Type: T7 (200W Output, Absolute Encoder), Lead, mm: H (Size 40: 24mm, Size 63: 30mm, Size 100: 50mm), Stroke: 600mm

Accuracy: High Precision Type, Size: 63, Motor Type: 200W Output, Absolute Encoder, Lead, mm: Size 40: 24mm, Size 63: 30mm, Size 100: 50mm, Stroke: 600mm, Motor Option: -, Cover: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Connector: -, Option: -

V100

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] m 600 600 600 L3 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

R1 1.5 RA 10 * R3 3 RB 15 * R5 5 RC 20 * Applicable Stroke Table *Produced upon receipt of order Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 Controller *Refer to catalog 16 25 32 40 Caution The actuator body and controller are sold as a package.

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Nil With R3 3 RB 15 N Without (Roller specification) R5 5 RC 20 Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 Controller Nil Without controller CH With controller C 5 H 7 T (Communication protocal Interface Communication plug connector I/O cable*2 /Input/Output) Symbol Type Applicable interface 5 Parallel inputNPN) Nil Without

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

(mm) 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Weight(kg) 3.15 3.35 3.55 3.75 3.95 4.15 4.35 4.55 4.75 4.95 5.15 5.35 5.55 5.75 5.95 6.15 6.35 6.55 6.75 6.95 0.53 Additional weight for lock(kg) 4 Model LEFS40 Stroke(mm) 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 Weight(kg) 5.37 5.65 5.93 6.21 6.49 6.77 7.15 7.33

Title not found

N lszo-oH /Pressure Center 5 GJ1.81(300) H:23.62(600) Leading wire length Manual ovorrido o (PE Port) w/filter ' r ' r ' 1 ' I : : : ' ' M type plug connector/Nv4t320-OM/Closd Center tMzi!

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

When requiring valve with 600 mm length lead wire specify the model number of valve without plug connector and plug connector assembly. VG Only connector and sockets (3 pcs.)

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

N lszo-oH /Pressure Center 5 GJ1.81(300) H:23.62(600) Leading wire length Manual ovorrido o (PE Port) w/filter ' r ' r ' 1 ' I : : : ' ' M type plug connector/Nv4t320-OM/Closd Center tMzi!

Compact

(Atlanta) 1440 Lakes Parkway, Suite 600 Lawrenceville, GA 30043 Tel: (770) 624-1940 FAX: (770) 624-1943 16850 W. Victor Road New Berlin. Wl 53151 Tel: (414) 827-0080 FAX: (414) 827-OO92 5377 Glen Alden Drive Richmond, VA 23231 Tel: (804) 222-2762 FAX: (80a) 222-5221 SMC Pneumatics Inc.

NVEPA|VEFseies

(Atlanta) 1440 Lakes Parkway, Suite 600 Lawrenceville, GA 30043 Tel: (770) 624-1940 FAX: (770) 624-1943 16850 W. Victor Road New Berlin. Wl 53151 Tel: (414) 827-0080 FAX: (414) 827-OO92 5377 Glen Alden Drive Richmond, VA 23231 Tel: (804) 222-2762 FAX: (80a) 222-5221 SMC Pneumatics Inc.

lVFl 10

(Atlanta) 1440 Lakes Parkway, Suite 600 Lawrenceville, GA 30043 Tel: (770) 624-1940 FAX: (770) 624-1943 16850 W. Victor Road New Berlin. Wl 53151 Tel: (414) 827-0080 FAX: (414) 827-OO92 5377 Glen Alden Drive Richmond, VA 23231 Tel: (804) 222-2762 FAX: (80a) 222-5221 SMC Pneumatics Inc.