Accuracy: H (High Precision Type), Size: 63, Motor Type: T7 (200W Output, Absolute Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 1000mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 2m, Driver Type: S2 (LECSS2-T, 200~240V Absolute, SSCNETIII/H), I/O Connector: H (Connector)

Accuracy: High Precision Type, Size: 63, Motor Type: 200W Output, Absolute Encoder, Lead, mm: Size 40: 8mm, Size 63: 10mm, Size 100: 10mm, Stroke: 1000mm, Motor Option: None, Cover: w/o Cover, Cable Type: Robotic, Flexible, Cable Length: 2m, Driver Type: LECSS2-T, 200~240V Absolute, SSCNETIII/H, I/O Connector: -, Option: -

Accuracy: High Precision Type, Size: 63, Motor Type: 200W Output, Absolute Encoder, Lead, mm: Size 40: 8mm, Size 63: 10mm, Size 100: 10mm, Stroke: 1000mm, Motor Option: None, Cover: w/o Cover, Cable Type: Robotic, Flexible, Cable Length: 2m, Driver Type: LECSS2-T, 200~240V Absolute, SSCNETIII/H, I/O Connector: Connector, Option: -

A high rigidity, slider type electric actuator, series LEJ is available in both ball screw, LEJS, and belt drive, LEJB models.  The LEJ offers 2 types of motor cables, standard and robotic (flexible).  Seal bands, equipped as standard, cover the guide preventing grease from splashing, and external foreign matter from entering.  LEJS (ball screw drive) can be used for both horizontal and

A high rigidity, slider type electric actuator, series LEJ is available in both ball screw, LEJS, and belt drive, LEJB models.  The LEJ offers 2 types of motor cables, standard and robotic (flexible).  Seal bands, equipped as standard, cover the guide preventing grease from splashing, and external foreign matter from entering.  LEJS (ball screw drive) can be used for both horizontal and

0.4

SQ2530 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) S kit Dual 3 port valve: SQ2 31 A B C Component Parts r e w q No.

Table of Contents

, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A P P SMC SMC R2 R1 R1 R2 VZS Rc 3/8 (Right side only) Reverse pressure spacer AXT502-21A-1 2-3/8 R1, R2 individual EXH spacer: VV71-R2-03 2-1/2, 3/8, C12 Individual EXH spacer: VV71-R2-1/2, 3/8, C10 Individual SUP spacer: VV71-PDouble check

1

) 1(P) 5(R1) 3(R2) N.C.

2

1500 0 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) AR40-A Rc1/2 AR40-06-A Rc3/4 0.6 0.6 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 0 0 1000 2000 3000 Flow rate L/min (ANR) Flow rate L/min (ANR) 183 Regulator Series AR10-A to AR40-A Pressure Characteristics (Representative values) Conditions: Inlet pressure 0.7

0.4

) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQC1200 VQC1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQC1301 VQC1401 VQC1300 VQC1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQC1500 VQC1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q

42

) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts

4/5 Port Solenoid Valve

(R2) 1 (P) (A) 4 (B) 2 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

5 Port Solenoid Valve

N.C. 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) N.O. N.O. 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) N.C.

5 Port Solenoid Valve

) 1 (P) 5 (R1) 3 (R2) e q w e q w (A) 4 (B) 2 (A) 4 (B) 2 VQC4200 VQC4201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w r e q w r (A) 4 (B) 2 (A) 4 (B) 2 VQC4300 VQC4301 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4400 VQC4401 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4500 VQC4501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component

Metal Seal/Rubber Seal Series VQ Body Ported

Example) VQ1140-5L-C6-A A port, Plug 2-4-61 Body Ported Series VQ0/1000/2000 Manifold Option Parts Double check block (Separated type): For VQ0/1000 VQ1000-FPGIt is used on the outlet side piping to keep the cylinder in the intermediate position for a long time.

SYJ3000/5000/7000

R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (WO): SYJ3140-WO-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6

VQ7-6/7-8

(Values at the initial period) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 3-10-7 8 Series VQ7-6 DIN Terminal Type 2 position single : VQ7-6-FG-S single (Reverse pressure): VQ7-6-YZ-S 120.5 120.5 68.5 52 68.5 Mounting hole 2-6.5 50 50 42.5 42.5 25 25 13 (A port) 13 (B port) Manual override (R1, R2) 2-3/8 P R2 R1 A B 14 11 50 62 12 9 62

VQ7-6/7-8

SMC R1 R2 Dimensions inside ( ) are for sub-plate.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Piping specification A, B Port specification Applicable models Symbol P R1, R2 Description SI unit part no.

VFS

VVFS2000-22A-1 VVFS2000-22A-2 Cylinder pressure Check valve G E T D Applicable valve model VFS2400-F VFS2410R1 Solenoid one side energized 210 or less P R2 Piston SUP side pressure (P1) Leakage (cm2/min) R1 210 or less P Solenoid both sides de-energized SUP side pressure P1 (MPa) R2 0 A R1 Operating range B R2 Supply pressure: 0.5 MPa Double check spacer Caution In the case of 3 position