2

IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E IDF15E1 IDF22E IDF37E IDF55E IDF75E 0.75 1.5 2.2 3.7 5.5 7.5 11 15 22 37 55 75 Rc3/8 Rc1/2 35C 0.7 MPa Rated inlet condition Applicable air compressor (kW) Port size Model Rc3/4 IDF100F IDF125F IDF150F IDF190D IDF240D R2 65 (2 1/2B) Flange 100 125 150 190 240 Rc1 R1 R1 1/2 IDFE 40C 0.7 MPa 80 (3B) Flange 40C 0.7 MPa 100 (4B) Flange R2 35C 0.7 MPa

1

) 1(P) 5(R1) 3(R2) N.C.

15

850 1089 856 1028 14 6 900 900 1139 906 1078 14 6 900 950 1189 956 1128 16 7 1050 1000 1239 1006 1178 16 7 1050 1100 1339 1106 1278 18 8 1200 1200 1439 1206 1378 18 8 1200 Motor Mounting Dimensions [mm] Motor type FA FB FC FD FE FF NZ/NT M5 x 0.8 9 70 50 5 47.5 NY M4 x 0.7 8 70 50 5 47.5 NX M5 x 0.8 9 63 40* 4.5* 51 NW/NU M5 x 0.8 9 70 50 5 48.8 NV M4 x 0.7 8 63 40* 4.5* 51 NM1 M4 x 0.7

VQ7-6/7-8

(Values at the initial period) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 3-10-7 8 Series VQ7-6 DIN Terminal Type 2 position single : VQ7-6-FG-S single (Reverse pressure): VQ7-6-YZ-S 120.5 120.5 68.5 52 68.5 Mounting hole 2-6.5 50 50 42.5 42.5 25 25 13 (A port) 13 (B port) Manual override (R1, R2) 2-3/8 P R2 R1 A B 14 11 50 62 12 9 62

VQ7-6/7-8

SMC R1 R2 Dimensions inside ( ) are for sub-plate.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Piping specification A, B Port specification Applicable models Symbol P R1, R2 Description SI unit part no.

VFS

VVFS2000-22A-1 VVFS2000-22A-2 Cylinder pressure Check valve G E T D Applicable valve model VFS2400-F VFS2410R1 Solenoid one side energized 210 or less P R2 Piston SUP side pressure (P1) Leakage (cm2/min) R1 210 or less P Solenoid both sides de-energized SUP side pressure P1 (MPa) R2 0 A R1 Operating range B R2 Supply pressure: 0.5 MPa Double check spacer Caution In the case of 3 position

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Note 4) Not applicable for dual 3-port valves 2(B) (A)4 1 (P) (R1) 5 3 (R2) C: Locking type (Manual) 3-position closed center 2(B) (A)4 3 B A 1 (P) (R1) 5 3 (R2) 3-position exhaust center r Coil voltage 2(B) (A)4 D: Slide locking type (Manual) 24 VDC 5 4 1 (P) (R1) 5 3 (R2) t Light/surge voltage suppressor 3-position pressure center 2(B) (A)4 Y es Nil 5 1 (P) (R1) 5 3 (R2) 4-position dual

SV

SI unit Master unit Remote I/O unit Remote I/O unit SDA SDB RDA RDB SG FG SDA SDB RDA RDB SG FG SDA SDB RDA RDB SG FG S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

Series SV

General purpose Each T unit has 32 control points. 16 outputs 24VDC 10% External power supply A, B, D, E, F1, G, J1, J2, K, R1, R2, H, U, V Current consumption (Inside unit) 0.1A 0.3A C, Q SI manifold solenoid valve T unit OB unit SI unit SI unit Master unit Remote I/O unit Remote I/O unit S1 S2 SG S1 S2 R1 R2 SG FG 24V 0V S1 S2 R1 R2 SG FG 24V 0V S1 S2 R1 R2 SG FG SDA SDB RDA RDB SG FG

Refrigerated Air Dryers Series IDF/IDU

Air-cooled type Water-cooled type Rc3/8 Rc1/2 35oC 0.7 MPa Rc3/4 Rated inlet condition Applicable air compressor (kW) Port size Model Rc1 R1 R1 1/2 IDF:E IDF100F IDF125F IDF150F 100 125 150 R2 65A flange 80A flange 40oC 0.7 MPa 40oC R2 0.7 MPa The separate catalog for dryer models conforming with foreign standards (CE) is available.

AC Servo Motor Driver (Pulse input type/Positioning type ）

Shaft resonance suppression filter setting frequency selection Setting value Frequency [Hz] Setting value Frequency [Hz] _ _ 0 0 Disabled _ _ 1 0 562 _ _ 0 1 Disabled _ _ 1 1 529 _ _ 0 2 4500 _ _ 1 2 500 _ _ 0 3 3000 _ _ 1 3 473 _ _ 0 4 2250 _ _ 1 4 450 _ _ 0 5 1800 _ _ 1 5 428 _ _ 0 6 1500 _ _ 1 6 409 _ _ 0 7 1285 _ _ 1 7 391 _ _ 0 8 1125 _ _ 1 8 375 _ _ 0 9 1000 _ _ 1 9 360 _ _ 0 A 900

42

) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts

Fluoropolymer Piping Equipment

LQ3E31-R1 LQ3E31-R2 LQ3E32-R1 LQ3E32-R2 LQ3E41-R1 LQ3E41-R2 LQ3E51-R1 LQ3E51-R2 LQ3E61-R1 LQ3E61-R2 LQ3E2A-R1 LQ3E3A-R1 LQ3E3A-R2 LQ3E4A-R1 LQ3E4A-R2 LQ3E5A-R1 LQ3E5A-R2 LQ3E5A-R3 LQ3E6A-R1 LQ3E6A-R2 6 x 4 3/8" x 1/4" 2 3 10 x 8 1/2" x 3/8" 4 3 8 x 6 3/4" x 5/8" 5 12 x 10 4 1" x 7/8" 6 19 x 16 5 Note) For details of the applicable tubing sizes, refer to page 945. 25 x 22 6 Note) For details

5 Port Solenoid Valve

) 1 (P) 5 (R1) 3 (R2) e q w e q w (A) 4 (B) 2 (A) 4 (B) 2 VQC4200 VQC4201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w r e q w r (A) 4 (B) 2 (A) 4 (B) 2 VQC4300 VQC4301 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4400 VQC4401 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4500 VQC4501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component

Shock Absorbers and Rate Controls

.63 (l.R)0tl{l l.l 5x2 8.54 8.74 174-t2lJNF .38 l . t 3 1.20 5.43 t.l0 .55 .21 l . t 2 .63 (LR)OIl{ll.25r I 5.92 6.12 r%-r2 UNF .38 t . t 3 1.20 3.81 t.l0 .55 .2t 1.25 .0J (LR)Otlll|.25r2 8.54 8.7 4 r%-r2 UNF .38 t . t 3 1,20 5.43 t . t 0 .55 .21 t.25 .63 ^otesr 1 Alrshdk absorbrs wr]] ldnclro. satistiiCof,t dt 5% of the r narimum raied ener4y per c!

SX

actuation 600 500 400 300 200 100 0 SX3140-01 900 800 700 600 500 400 300 200 100 0 SX5140-02 900 800 700 600 500 400 300 200 100 0 SX7140-03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

Battery-less

to 500 16 to 340 8 to 170 30 to 780 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 Speed2 1101 to 1200 30 to 570 20 to 380 10 to 190 [mm/s] Up to 450 10 to 700 5 to 360 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 Actuator specifications 451 to 500 10 to 600 5 to 300 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to

C76

Built-in magnet MB1 Double rod Option Type Mounting style CA2 Stainless steel piston rod, rod end nut and mounting nut Standard R Nil Mounting Symbol Non-rotating rod K Stainless steel piston rod and rod end nut R2 Double end Front nose Front nose in line port E CS1 (Rubber cushion only) F Note) Please refer to page 6-10-46 for additional options. Only one option can be selected.

C76

MB1 Double rod Option Type Mounting style CA2 Stainless steel piston rod, rod end nut and mounting nut Standard Non-rotating rod (Rubber cushion only) R Nil Mounting Symbol K Stainless steel piston rod and rod end nut R2 Double end Front nose Front nose in line port E CS1 F Note) Please refer to page 6-10-46 for additional options. Only one option can be selected.