A

20 ~ 750 37 40 102 78 25 52 14 21 21 M 12 x 1.75 11 17 M 22 x 1.5 37 1/2 116 0 100 ~ 750 20 ~ 750 37 40 116 92 30 52 14 21 21 M 12 x 1.75 11 17 M 26 x 1.5 40 1/2 126 0 With Gaiter Without Gaiter Bore (mm) ZZ ZZ H f h e l 146 154 40 51 15 59 65 167 50 15 66 58 75 159 178 15 66 75 63 1/4 Stroke 170 58 213 204 15 80 71 80 80 215 224 100 72 15 81 90 D I M E N S I O N S R E A R M A L E C L E

Battery-less

to 620 8 to 310 30 to 750 20 to 550 10 to 300 Parallel Stroke range 701 to 800 20 to 550 12 to 330 6 to 180 24 to 750 16 to 500 8 to 250 30 to 750 20 to 550 10 to 300 801 to 900 24 to 610 16 to 410 8 to 200 30 to 750 20 to 550 10 to 300 901 to 1000 24 to 500 16 to 340 8 to 170 30 to 750 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to

1

Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2-Z Series CM2-Z P .352 P .356 P .474 Air Cylinder Air Cylinder Air Cylinder Series CG1-Z Series MB-Z Series CA2-Z P .592 P .686 P .750

CNA

to 750 9 11.5 M10 X 1.25 13.5 M12 X 1.75 13.5 M12 X 1.75 With rod boot (mm) (mm) ZZ ZZ Bore (mm) 40 50 63 80 100 Stroke range (mm) e Bore (mm) 40 50 63 80 100 f h LX LY MM N P Q H S T V W X Y ZZ l (One) (Both) 271 300 314 378 408 263 292 306 369 399 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 43 52 52 65 65 11.2 11.2 11.2 12.5 14 59 66 66 80 81 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4

CNA

Up to 750 9 56.5 M8 x 1.25 11.5 67 M10 x 1.25 13.5 83 M12 x 1.75 13.5 98 M12 x 1.75 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Stroke range (mm) e Bore size (mm) 40 50 63 80 100 l f h LX LY MM N P Q H S T V W X Y ZZ (One side) (Both sides) 263 292 306 369 399 271 300 314 378 408 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 43 52 52 65 65 11.2 11.2 11.2 12.5 14 59 66 66 80 81

CNA

Up to 750 9 56.5 M8 x 1.25 11.5 67 M10 x 1.25 13.5 83 M12 x 1.75 13.5 98 M12 x 1.75 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Stroke range (mm) e Bore size (mm) 40 50 63 80 100 l f h LX LY MM N P Q H S T V W X Y ZZ (One side) (Both sides) 263 292 306 369 399 271 300 314 378 408 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 43 52 52 65 65 11.2 11.2 11.2 12.5 14 59 66 66 80 81

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/4 1/4 92 30 52 14 124 21 31 76 25 19 16 M12 x 1.75 Bore size [mm] K KA LZ M MM N P PG PH PL PW S Without rod boot With rod boot H ZZ e f h l ZZ 40 6 14 71 11 M14 x 1.5 27 1/4 42 11 20 45 153 51 215 43 11.2 59 1/4 stroke 223 50 7 18 80 11 M18 x 1.5 30 3/8 46 10 21 50

Cylinder with Lock

1.5 30 3/8 168 44 11 237 20 to 600 52 11.2 66 1/4 stroke 245 18 14 M18 x 1.5 31 3/8 182 52.5 12 254 20 to 600 52 11.2 66 1/4 stroke 262 18 17 M22 x 1.5 37 1/2 218 59.5 15 306 20 to 750 65 12.5 80 315 1/4 stroke 22 17 M26 x 1.5 40 1/2 246 69.5 15 335 20 to 750 65 14 81 1/4 stroke 344 26 8 Series CNA2 Dimensions Axial foot (L): CNA2L BP (Rc, NPT, G) unlocking port Unlocked when pressurized

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

kPa 350 kPa 2 750 kPa 750 kPa 750 kPa 1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12 14 240 200 160 120 80 40 0 0 2 4 6 8 10 12 14 60 50 40 30 20 10 0 0 2 4 6 8 10 12 14 750 kPa 350 kPa 150 kPa 350 kPa 150 kPa 350 kPa Flow [L/min]

CL

Up to 750 Up to 1000 Up to 1000 Up to 1200 With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 40 50 63 80 100 125 140 160 30 35 35 40 40 50 50 56 59 67 73 77 85 112.5 121 133 44 52 64 78 92 115 128 144 40 50 55 65 80 90 90 90 27 32 32 37 37 47 47 53 69 78 84 92 100 141.5 150 167 16 20 20 25 30 36 36 40 32 40 40

Table of Contents

Positioning distance (mm) 1500 750 100 10 1 10 151.1 76.1 11.1 2.1 1.2 100 16.1 8.6 2.1 1.2 1.1 Speed (mm/s) 250 7.2 4.2 1.6 1.2 1.1 500 4.3 2.8 1.5 1.2 1.1 Values will vary slightly depending on the operating conditions.

Electric Actuators

Positioning distance (mm) 1500 750 100 10 1 10 151.1 76.1 11.1 2.1 1.2 100 16.1 8.6 2.1 1.2 1.1 Speed (mm/s) 250 7.2 4.2 1.6 1.2 1.1 500 4.3 2.8 1.5 1.2 1.1 Values will vary slightly depending on the operating conditions.

Electric Actuator/Slider Type

LEFS32 -700 1041 1071 706 830 12 5 750 LEFS32 -750 1091 1121 756 880 12 5 750 LEFS32 -800 1141 1171 806 930 14 6 900 17 Series LEFS Electric Actuator/Slider Type Ball Screw Drive Dimensions: In-line Motor LEFS LEFB LEJS LEJB LEY LEYG LECYM/LECYU Model Selection LEFS40 Encoder cable (7) 4 x M8 x 1.25 thread depth 13 (170) Motor cable (7) 106 60 Body mounting reference plane Note 1) 74 58

CV/MVGQ

Up to 750 The minimum stroke of the one with rod boot is 20 mm or more.

CV/MVGQ

Up to 750 The minimum stroke of the one with rod boot is 20 mm or more.

15

(Recommended height 5 mm) Dimensions [mm] Stroke L A B n D E 150 389 156 328 4 150 200 439 206 378 6 2 300 250 489 256 428 6 2 300 300 539 306 478 6 2 300 350 589 356 528 8 3 450 400 639 406 578 8 3 450 450 689 456 628 8 3 450 500 739 506 678 10 4 600 550 789 556 728 10 4 600 600 839 606 778 10 4 600 650 889 656 828 12 5 750 700 939 706 878 12 5 750 750 989 756 928 12 5 750 800 1039 806

2

Nil H L S 10 15 25 50 100 200 600 750 1000 40 Select from Series IDGA (page 79) 60 Port size/Applicable tubing O.D.

Integrated Controller

to 225 401 to 450 10 to 700 5 to 360 3 to 170 20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 451 to 500 10 to 600 5 to 300 3 to 140 20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 501 to 600 20 to 900 12 to 540 6 to 270 3 to 135 24 to 1100 16 to 750

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Motorless LAT LZ LC3F2 Weight Series LEFS25mV6 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 Product weight [kg] 2.06 2.20 2.34 2.50 2.62 2.75 2.90 3.05 3.18 3.30 3.46 3.60 3.74 3.88 4.02 4.20 Additional weight with lock [kg] 0.3 Series LEFS32mV7 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Product weight [kg] 3.40

MNB

1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 32 40 50 63 80 100 36 23 12.5 25 37.5 50 125 86 98 111 75 136 100 161 73 186 300 326 350 376 426 476 526 41 23 12.5 25 37.5 50 125 94 106 119 75 144 100 169 81 194 323 349