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Series: LEFS, Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 300mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: R5 (5m), Controller:

Series: LEFS, Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: Battery-less absolute, 24VDC, Step, Lead: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 300mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: 5m, Controller: IO-Link, Mounting

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

Battery-less

16 30, 50, 100, 150, 200, 250, 300 Motor 30 to 400 25 30, 50, 100, 150, 200, 250, 300, 350, 400 30 to 500 32/40 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 i Mounting*5 o Actuator cable type/length Robotic cable [m] Nil None R8 8*10 R1 1.5 RA 10*10 R3 3 RB 15*10 R5 5 RC 20*10 Symbol Type Motor mounting position Parallel In-line Nil Ends tapped/ Body bottom tapped*6 V V L Foot V

Integrated Controller

50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 Product weight [kg] 1.74 1.81 1.98 2.24 2.42 2.59 2.77 2.94 3.12 2.74 2.85 3.14 3.42 3.82 4.11 4.39 4.68 4.97 5.25 5.54 In-line Motor Series EQY16D Stroke [mm] 30 50 100 150 200 250 300 Product weight [kg] 0.72 0.76 0.87 1.01 1.12 1.23 1.34 Series EQY25D EQY32D Stroke [mm] 30 50 100 150 200 250 300 350 400 30 50 100

Metal Seal/Rubber Seal Series VQ Body Ported

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

Large Size Vacuum Module: Series ZR

Symbol ZR1-R1 -R2 -R3 -R4 -R5 -R6 -R7 -R8 BM1 ZR1 R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 PV PV PV PV PV PV PV PV PE PE Refer to Example 1).

VQZ1000/2000/3000

center/exhaust center/pressure center Grommet (G): VQZ3 50 1(R)-G-02 03 3 4 5 300 130 (Lead wire length) 58 28 24.5 mounting hole 10.5 (For Rc 3/8) 10.5 (For Rc 3/8) 9 (For Rc 1/4) 9 (For Rc 1/4) R5 5 VQC A 4 B 2 45 18 SQ SMC SMC B A 5 1 P 3 R1 R2 Manual override Cover diameter 1.6 Cross section 0.34 mm2 VQ0 66 56 5 VQ4 (58) VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 73.5 135.5<137.5> 300 61.5<62.5> 160 58.5<63.5> < >: AC 1.12-42 VQZ1000/2000/3000 Base Mounted VQZ3000 2 position single 0 1 02 03 Grommet(G): VQZ315 (R)lGl 300 95 58 28 (Lead wire length) 10.5 10.5 24.5Mounting holes (Rc(PT)3/8) (Rc(PT)3/8) 9 9 (Rc(PT)1/4) (Rc(PT)1/4) 5 R5 SY A 4 B 2 SYJ 45 18 SMC B A Manual override

Vacuum Module Series ZX

ZX1-R1 R2 R3 R4 R5 R6 R7 R8 Symbol Part no. ZX1-R 9 R10 R11 R12 R13 R14 R15 R16 PS PS PS PS PV PV PV PV PV PV PV PV R1 R2 R3 R4 R5 R6 R7 R8 R 9 R10 R11 R12 R13 R14 R15 R16 PE PE Caution when ordering manifold PD PD PD PD PE PE The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted.

2

150 Nil C D Nil H L S 300 300 75 Auto-drains listed on page 95 are attached.

10

300 280 G1/2 25 32 D side port does not have a plug.

AHC System Series MA

M3 x 10 (4 pcs.) 11 14 15 20 740 AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC

V100

Note) Standard lead wire length: 300 mm.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Indicator light 3.5 to 7 : AC 82.5 75 01 02 M plug connecter (M): VQZ2l5(R)-lMl56.5 Cover dia 1.5 Cross section 0.23mm2 (Lead wire) 58(63) 300 77(78) 89 Indicator light : AC 2.10-29 VQZ100/200/300 Base Mounted VQZ300 Valve single unit Grommet (G): VQZ3l5(R)-lGl02 03 37 5 2-4.5Mounting holes 23.5 5 R5 Cover dia 1.6 Cross section 0.34mm2 Manual override 2 A 45 18 3 R 1 P 47 76 300 (Lead wire

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Note) Standard lead wire length: 300 mm.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Indicator light 3.5 to 7 82.5 75 01T 02T M type plug connector (M): VQZ2 5(R)M 56.5 (Lead wire lnegth) Cover diameter 1.5 Cross sectional area 0.23mm2 58 300 77 89 Indicator light 28 Base Mounted Type Series VQZ Dimensions: VQZ300 VQZ300 (mm) Valve Scale: 45% Grommet (G): VQZ3 5(R)G 02T 03T 37 5 2 4.5 Mounting holes 23.5 R5 Cover diameter 1.4 Cross sectional area 0.2mm2 Manual override 2

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 30 to 750 20 to 550 10 to 300 Max. acceleration/deceleration [mm/s2] 3000 Positioning repeatability [mm] 0.01 (Lead H: 0.02) Lost motion [mm]*2 0.05 Lead [mm] 20 12 6 24 16 8 30