CY1

Nil B BS With shock absorber (1pc. on port side) The adjustment bolt is installed even when B or BS is selected. (except for 10) Refer to "Auto Switch Guide" (E274-A) for further details on auto switch units. Refer to pages 60 and 61 for auto switch circuit diagrams. Applicable auto switch types Lead wire length (m) Note 1) Load voltage Electrical entry direction Auto switch no.

Direct Solenoid

May bs hld enrgiz6d indetlnliely wlthoul damage. However, care muet bs laken to arange your controls so that you nevr energlz both solenolds simultanously. lf bolh solenoids are enrglzd, solenold wlll burn out. Heavy duty alr valves bullt to comply with JIC and all industrial slandards.

2

400 1600 0.00 0 1000 600 800 400 200 1200 Inlet air flow rate (L/min [ANR]) Inlet air flow rate (L/min [ANR]) Standard dew point40C [Symbol: L], 60C [Symbol: S] IDG30LA IDG50LA P1 = 0.3 MPa 0.08 P1 = 0.3 MPa 0.03 Pressure drop (MPa) Pressure drop (MPa) 0.06 P1 = 0.5 MPa P1 = 0.5 MPa 0.02 0.04 P1 = 0.7 MPa 0.01 P1 = 0.7 MPa 0.02 0 200 400 600 800 0 100 200 300 400 500 Inlet air flow rate

XL

200 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400

High Vacuum Angle Valve, XL Series

200 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400

Secondary Batteries

Stroke adjusting unit Cylinder stroke (mm) Nil L H LH Without adjusting unit With low load shock absorber + Adjusting bolt With high load shock absorber + Adjusting bolt With one L unit and one H unit each 100, 200, 300, 400, 500, 600, 700 800, 900, 1000, 1200, 1400, 1600 1800, 2000 20, 25, 32, 40 50, 63 No stroke adjustment units are used for 50 and 63.

MXQ

D+1 0 mm Stroke length tolerance -X 20Option Data Extension end (AS) Stroke adjustment Rubber stopper Retraction end (AT) range 0 to 5 mm Both ends (A) Extension end (BS) W/ shock absorber is not available in Series MXQ6.

Air Slide Table

Common with the MXQ series. 21 Series MXQR Dimensions: Adjuster Shock absorber (BS, JS, BT, JT) Extension stroke end Body mounting parts Table mounting parts P A D Q M J B H K F MXQR-BS20 MXQR-BS25 G MXQR-BS 8 MXQR-BS12 MXQR-BS16 G E E1 L C Stroke adjustment range (mm) Body mounting parts Table mounting parts A Applicable size Model L E1 B C F G M P 1) H J K Q 1) D E MXQR 6 M2.5 x 8 12.5

Assembles to LEFG32 table to match LEFS32R or L table height; Required only for pairing with size 32; Required only when pairing with LEFS with parallel mounted motor

Assembles to LEFG32 table to match LEFS32R or L table height; Required only for pairing with size 32; Required only when pairing with LEFS with parallel mounted motor

CATALOG

1200 1000 1000 6 12 14 20 22 Starting Torque Nm x 10-3 An ambient atmosphere that causes rust is non permissible.

A

, 1400, 1600, 1800, 2000 32 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1200, 1400, 1600, 1800, 2000 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1200, 1400, 1600, 1800, 2000 O P T I O N S T R O K E A D J U S T M E N T U N I T Stroke Adjustment Unit 25 MY-A25L 32 MY-A32L 40 MY-A40L 25 MY-S25L MY-S25B 32 MY-S32L MY-S25B 40 MY-S40L MY-S32B M O R E H O W T O O R D E R S E E N

Table of Contents

100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 DIntermediate strokes and short strokes other than the above are produced upon receipt of order.

Air Slide Table Series MXQ

is not available with shock absorber. x x BS x x x BT x x x x B x x x : Available, x: Not available Note 3) With the combination of buffer mechanism and extension end stroke adjuster, the buffer stroke decreases by the amount of stroke adjusted with the extension end stroke adjuster.

Slider Type/Ball Bushing Bearing

With shock absorber (1 pc. on port side) TN TF 20, 25, 32 BS The adjusting bolt is installed even when B or BS is selected.(Except 10) Standard stroke (mm) Refer to Standard Stroke on page 1529.

15

400 600 800 1000 1200 1400 1600 Stroke [mm] Stroke [mm] [Graph 7] Allowable load mass by stroke 40 100 y, z + A = 0 y, z + A = 50 Load mass [kg] y, z + A = 100 y, z + A = 200 10 y, z + A = 300 1 0 200 400 600 800 1000 1200 1400 1600 If load center of gravity exceeds the value of y, z + A on the graph, please consult SMC.

HEC-OM-S019

ZS AS BS . Aug V QV RV SV . ZV AV BV . Jan o Qo Ro So . Zo Ao Bo . Nov y Qy Ry Sy . Zy Ay By . 2012 2013 2014 . 2021 2022 2023 . Year Jun T QT RT ST . ZT AT BT . Dec Z Qz RZ SZ . ZZ AZ BZ . Apr R QR RR SR . ZR AR BR . Jul U QU RU SU . ZU AU BU . Month Q R S . Z A B . Oct X QX RX SX . ZX AX BX .

HEC-OM-U015

high. 5 Baud Rate Sets baud rate for communication. 3) Confirm there is no leakage of circulating fluid and check the condition 4800, 9600, 1200 Fluid other than water or Ethylene Glycol (up to 20%) should not be 19200b/s of the piping (e.g. no tight bends or crushed pipes).

HEC-OM-R008

Stop filling once the level of fluid reaches the H mark. 600, 1200, 2400, [AT]: Used to start auto tuning in auto tuning mode 5. Turn on the power switch to fill the piping with the fluid. 6.

Series: LEFG (Guide), Size: 32, Mounting Pitch: BS (Belt Drive, AC Servo Motor), Stroke, mm: 400