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Support Guide/11-LEFG Series

230 11-LEFG32-S-150 300 157 280 11-LEFG32-S-200 350 207 330 6 2 300 11-LEFG32-S-250 400 257 380 11-LEFG32-S-300 450 307 430 11-LEFG32-S-350 500 357 480 8 3 450 11-LEFG32-S-400 550 407 530 11-LEFG32-S-450 600 457 580 Model L A B n D E 11-LEFG32-S-500 650 507 630 10 4 600 11-LEFG32-S-550 700 557 680 11-LEFG32-S-600 750 607 730 11-LEFG32-S-650 800 657 780 12 5 750 11-LEFG32-S-700 850 707 830

1

Nil S R V RV VP B BS BR Side Top Bottom A-e aTension bolt ( ) For silencer (supply side). E port is plugged. Note) B for bottom ported can be selected for the SY5000/7000 series. Tightening torque: 0.8 Nm SY3000: 2 pcs. SY5000/7000: 3 pcs.

Table of Contents

Support brackets are not for mounting; use them solely for providing support. (1400) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1MW32 MY1CW32 MY1CW32 (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 MY1CW25 MY1CW25 30 (1000) (1000) (1000) (1000) 30 MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000)

Electric Actuators

1050 1200 1060 500 360 500 350 600 460 600 450 Dimensions inside ( ) are for a 100 mm stroke.

Table of Contents

1050 1200 1060 500 360 500 350 600 460 600 450 Dimensions inside ( ) are for a 100 mm stroke.

Magnetically Coupled Rodless Cylinder

2 t r @2 @1 #3 #4 #1 @9 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 No.

Basic type / Direct mount type Series CY3B/CY3R

2 t r @2 @1 #3 #4 #1 @9 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 No.

Compact Electric Actuator Series LG1

-F Stroke 100 200 300 400 500 600 700 800 900 1000 1200 Note) Note) Dimensions inside ( ) are for a 100mm stroke. 6 Series LG1H High Rigidity Direct Acting Guide Type LG1H21: With Coupling/Construction 1 4 6bn 3 2 bn 5 bs A A' 9 bq br bt bk bm bo 8 bl bp View A-A' 7 Material Note Parts list Material Note Parts list No.

SV

+ BS 24 V 0 V BDH BDL BS + BS 24 V 0 V BDH BDL CANH V + 24 V 0 V V CANL CANH FG V + Slave unit 75 Slave unit 03 Slave unit 01 Master unit S2 S1 S2 S1 S2 S1 S2 S1 V BDH Master Connector with terminal resistor SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Type 3 ground Type 3 ground Type 3 ground Type 3 ground CANH V + Connect the shielding wire to the SD terminal.

Series SV

+ BS 24V 0V BDH BDL BS+ BS 24V 0V BDH BDL CANH V+ 24V 0V V CANL CANH FG V+ Slave unit 75 Slave unit 03 Slave unit 01 Master unit With terminal resistor connector S2 S1 S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

BS Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

CY1

Nil B BS With shock absorber (1pc. on port side) The adjustment bolt is installed even when B or BS is selected. (except for 10) Refer to "Auto Switch Guide" (E274-A) for further details on auto switch units. Refer to pages 60 and 61 for auto switch circuit diagrams. Applicable auto switch types Lead wire length (m) Note 1) Load voltage Electrical entry direction Auto switch no.

Direct Solenoid

May bs hld enrgiz6d indetlnliely wlthoul damage. However, care muet bs laken to arange your controls so that you nevr energlz both solenolds simultanously. lf bolh solenoids are enrglzd, solenold wlll burn out. Heavy duty alr valves bullt to comply with JIC and all industrial slandards.

2

400 1600 0.00 0 1000 600 800 400 200 1200 Inlet air flow rate (L/min [ANR]) Inlet air flow rate (L/min [ANR]) Standard dew point40C [Symbol: L], 60C [Symbol: S] IDG30LA IDG50LA P1 = 0.3 MPa 0.08 P1 = 0.3 MPa 0.03 Pressure drop (MPa) Pressure drop (MPa) 0.06 P1 = 0.5 MPa P1 = 0.5 MPa 0.02 0.04 P1 = 0.7 MPa 0.01 P1 = 0.7 MPa 0.02 0 200 400 600 800 0 100 200 300 400 500 Inlet air flow rate

XL

200 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400

High Vacuum Angle Valve, XL Series

200 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400

Secondary Batteries

Stroke adjusting unit Cylinder stroke (mm) Nil L H LH Without adjusting unit With low load shock absorber + Adjusting bolt With high load shock absorber + Adjusting bolt With one L unit and one H unit each 100, 200, 300, 400, 500, 600, 700 800, 900, 1000, 1200, 1400, 1600 1800, 2000 20, 25, 32, 40 50, 63 No stroke adjustment units are used for 50 and 63.

MXQ

D+1 0 mm Stroke length tolerance -X 20Option Data Extension end (AS) Stroke adjustment Rubber stopper Retraction end (AT) range 0 to 5 mm Both ends (A) Extension end (BS) W/ shock absorber is not available in Series MXQ6.