KQ2

(inch) Min. port size Mass (g) A (Width across flats) 7 11 D L M Model KQ2H01-32 KQ2H01-33S KQ2H01-34S KQ2H01-35S KQ2H03-32 KQ2H03-33S KQ2H03-34S KQ2H03-35S KQ2H05-32 KQ2H05-34S KQ2H05-35S KQ2H07-32 KQ2H07-34S KQ2H07-35S KQ2H07-36S KQ2H09-34S KQ2H09-35S KQ2H09-36S KQ2H11-34S KQ2H11-35S KQ2H11-36S KQ2H11-37S KQ2H13-35S KQ2H13-36S KQ2H13-37S 2 7 9 16 2.4 7 9 16 6 11 12 3.3 10 15 27 15 16 24

Air Fittings & Tubing

D L A KQ2H01-32 KQ2H01-33S KQ2H01-34S KQ2H01-35S KQ2H03-32 KQ2H03-33S KQ2H03-34S KQ2H03-35S KQ2H05-32 KQ2H05-34S KQ2H05-35S KQ2H07-32 KQ2H07-34S KQ2H07-35S KQ2H07-36S KQ2H09-34S KQ2H09-35S KQ2H09-36S KQ2H11-34S KQ2H11-35S KQ2H11-36S KQ2H11-37S KQ2H13-35S KQ2H13-36S KQ2H13-37S 10-32UNF 7 11 16.7 13.7 12.7 2 7 9 16 2.4 7 9 16 6 11 12 3.3 10 15 27 15 16 24 29 31 29 46 44 44 44 1 16 22 18 2.5

One-touch Fittings Series KQ2

L A KQH (01-32, 03-32, 07-32) KQ2H01-32 KQ2H01-33S KQ2H01-34S KQ2H01-35S KQ2H03-32 KQ2H03-33S KQ2H03-34S KQ2H03-35S KQ2H05-32 KQ2H05-34S KQ2H05-35S KQ2H07-32 KQ2H07-34S KQ2H07-35S KQ2H07-36S KQ2H09-34S KQ2H09-35S KQ2H09-36S KQ2H11-34S KQ2H11-35S KQ2H11-36S KQ2H11-37S KQ2H13-35S KQ2H13-36S KQ2H13-37S 10-32UNF 7 7 8 11 16.7 13.7 12.7 2.3 2 7 9 16 2.4 7 9 16 6 11 12 3.3 10 15 27 15 16 24 29

CATALOG

21.7 17 28 58 63 22 9 72 1/2 3/8 KQW13-36S 17.46 21.7 17 28 60 64.5 22 9.6 78 1/2 1/2 KQW13-37S 22.23 21.7 17 28 66.5 69 22 9.6 149 Courtesy of Steven Engineering, Inc. !

F

21.7 17 28 58 63 22 9 72 1/2 3/8 KQW13-36S 17.46 21.7 17 28 60 64.5 22 9.6 78 1/2 1/2 KQW13-37S 22.23 21.7 17 28 66.5 69 22 9.6 149 Courtesy of Steven Engineering, Inc. !

One-touch Fittings

12.7 15.4 12 18.6 23.2 27.7 15.6 21.2 21.2 6 11.8 V 1/4 KQ2L11-35S 17.46 15.4 17 19.3 28.6 31.9 15.6 28.8 23.8 7.5 21.7 V 3/8 KQ2L11-36S 17.46 15.4 17 19.3 29.2 32.2 15.6 28.8 23.8 7.5 19.8 V 1/2 KQ2L11-37S 22.23 15.4 17 19.3 33.4 34.7 15.6 28.8 23.8 7.5 46.2 V 3/8 1/2 1/4 KQ2L13-35S 17.46 19.3 17 21.5 30.5 35.7 17 50.3 44.4 9 24 3/8 KQ2L13-36S 17.46 19.3 17 21.8 26.3 31.2 17 56 44.4 9.5

CEx-OMB0060

Unit : m ) (3) Pin allocation and output signals in detail 18 Counter side connector pin allocation (DX10M-36S) Counter side connector pin allocation (DX10M-36S) 36 19 36 Pin No. Signal Meaning Pin No.

CEx-OMI0064

. # 0 0 T S [CR] No. 0 2ROM 1 E SMC 2ROM 2 E , )10 1 36 - # 0 0 E E [CR] No. ,2 0 1 , 0 2 , 0 3 0 4 0 5 OFF , 0 6 () 0 7 () 0 8 () 0 9 () 37 - 9 BCD CEU5B-BCD (1) BCD : D-sub (CEU5B-D ) DX10M-36S(HRS ) (2):DX30AM-36P(:HRS ) DX30M-36-CV(:HRS ) ()(), ,ASSY MISUMI SHPT SHPT-H-A-36SHPT-HH-A-36:0.250(m) (3) 18 (DX10M-36S) 19 36 -2 Bit0 19 D12 10 1 Bit0 1 D0 10 -2 Bit1 20 D13 10

Rotary One-touch Fittings Series KS/KX

A D1 D2 L Nylon Urethane KSH03-34S KSH03-32 8 10-32 UNF 9 14 17 23 23 29 55 63 36.5 33 38.5 34.5 39.5 35.5 42.5 36.5 44 40 47 41 54 48 55 48.5 5 32 16 2.5 10.4 4.0 4.0 12 1 8 12.7 1 8 1 4 KSH07-34S 14.29 17 1 4 4 13.4 10.4 13.2 14 KSH07-35S KSH09-34S KSH09-35S KSH11-35S KSH11-36S 1 8 18.5 5 16 1 4 1 4 3 8 6 26.1 18.0 15.2 17.46 17 22.23 3 8 7 36.3 29.5 17.9 22 21 Reference dimensions after

KS/KX

(inch) Connection thread UNF NPT Model H Effective area (mm2) (Width across flats) A M Min. port size Weight (g) D1 D2 L1 L2 Nylon Urethane KSL03-34S KSL03-32 9 14 17 23 23 29 56 64 8 10-32 UNF 20.5 22 16 2.5 5 32 10.4 3.5 3.5 12 21 1 8 12.7 22 23.5 KSL07-34S 14.29 17 1 8 1 4 23 25.5 13.2 4 8.6 8.6 1 4 14 23.5 KSL07-35S KSL09-34S KSL09-35S KSL11-35S KSL11-36S 26 26.5 1 8 26.5

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

(inch) Connection thread UNF NPT M Min. port size Weight (g) A D1 D2 L2 L1 Model Nylon Urethane KSL03-34S KSL03-32 9 14 17 23 23 29 56 64 8 10-32 UNF 20.5 22 16 2.5 5 32 3.5 10.4 3.5 12 21 1 8 12.7 23.5 21.1 KSL07-34S 14.29 17 1 8 1 4 25.5 22.1 4 8.6 13.2 8.6 1 4 23.5 14 KSL07-35S KSL09-34S KSL09-35S KSL11-35S KSL11-36S 26.5 30 31 37 38 25.5 1 8 25.6 29 18.5 6 15.2 21.6 14.9

CE

HOLD BANK1 BANK2 MULTI COUNTER:CEU5 UP BCD Connector Specifications Model (counter side): DX10M-36S (made by HIROSE ELECTRIC CO., LTD.) Connector model: DX30AM-36P (made by HIROSE ELECTRIC CO., LTD.) COUNT PRESET FUNC. LEFT RIGHT BCD DOWN SEL. SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 AC100~240V Separate arrangements should be made for the BCD cable with connector.

CE

LEFT RIGHT C J G5-S BCD DOWN CV BCD Connector Specifications Model (counter side): DX10M-36S (made by Hirose Electric Co., Ltd.) Connector model: DX30AM-36P (made by Hirose Electric Co., Ltd.) SEL. SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC MVGQ CC Please consult with SMC separately for a BCD cable with connector.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

I-36S-A 10 pcs. 10 pcs. 14 x 10 x L45 I-39S-A 10 pcs. 10 pcs.

V

65 24.5 13.5 27.2 19.7 16 61 17.5 16.6 15.2 14" 9.5 (N)ZFB301-11 57 30 70 27 14.5 30.2 21.7 17 65 21.5 8 18.5 38" 11 (N)ZFB401-13 64.5 34 87.5 30.5 16.5 34 24 21.5 81 25.6 23 21.7 12" 13.5 H O W T O O R D E R A I R S U C T I O N F I LT E R S E R I E S (N)ZFB ACCESSORIES A I R S U C T I O N F I LT E R S E R I E S (N)ZF1B (N)ZFB E L E M E N T I-34S-A (N)ZFB100, 101 I-35S-A (N)ZFB200, 201 I-36S-A

Table of Contents

Part No. 1 4 07 " Applicable filter model Element size (mm) Part no. 3 8 1 2 11 13 " " ZFB100 ZFB101 ZFB200 ZFB201 ZFB300 ZFB301 ZFB401 18 x 14 x L60 Principal Parts Material I-34S-A 10 x 6 x L33 Description Material Body Polyester Clear cover Special transparent nylon Universal joint Polyester Plug Brass (Electroless nickel plated) Element PVF O-ring, Seal NBR I-35S-A 12 x 8 x L42 I-36S-A

Air Suction Filter With One-touch Fittings Series ZFB 1

Part No. 1 4 07 " Applicable filter model Element size (mm) Part no. 3 8 1 2 11 13 " " ZFB100 ZFB101 ZFB200 ZFB201 ZFB300 ZFB301 ZFB401 18 x 14 x L60 Principal Parts Material I-34S-A 10 x 6 x L33 Description Material Body Polyester Clear cover Special transparent nylon Universal joint Polyester Plug Brass (Electroless nickel plated) Element PVF O-ring, Seal NBR I-35S-A 12 x 8 x L42 I-36S-A

NVKF

Stations Applicable blank plate ass'y vK300-42-1A Dimuuiun $uies t{U|ff30 Body Ported Grommet (G): NVKF332-"G-M5 inch (mm) Base Mounted Grommet (G) : NVKF334rG-01 T inch (mm) =1 1 .81 (=3001 lld wi'e hQt') Ssis ilUff300 Dimsui Body Ported (Top Ported) lType 20 Manifold NVV3KF3-20-Stations-007 inch(mm L: Dimensions 19 20 14.84 15.59 (377) 't3.78 r4.53115.28 (350) (36s) (388) ( 1 r 1 ) ( 1

Model: 36S (ZFB300, ZFB301)

Air Suction Filter With One-touch Fittings

I-36S-A ZFB30 14 x 10 x L45 10 pcs. 10 pcs. I-39S-A ZFA401 16 x 14 x L60 10 pcs. 10 pcs. -9- < Element Replacement > 1. Stop the operation and reduce the internal pressure of the filter to atmospheric pressure. 2.