AZ1000 This detection method conforms to the SEMI standard F1. [Outboard leakage] Leakage rate from inside to outside of the products occurring when an internal pressure is more than the external pressure. This can be detected by pressurizing helium inside the products and detecting helium leaking outside from the products. This detection method conforms to the SEMI standard F1.
This detection method conforms to the SEMI standard F1. [Outboard leakage] Leakage rate from inside to outside of the products occurring when an internal pressure is more than the external pressure. This can be detected by pressurizing helium inside the products and detecting helium leaking outside from the products. This detection method conforms to the SEMI standard F1.
This detection method conforms to the SEMI standard F1. [Outboard leakage] Leakage rate from inside to outside of the products occurring when an internal pressure is more than the external pressure. This can be detected by pressurizing helium inside the products and detecting helium leaking outside from the products. This detection method conforms to the SEMI standard F1.
This detection method conforms to the SEMI standard F1. [Outboard leakage] Leakage rate from inside to outside of the products occurring when an internal pressure is more than the external pressure. This can be detected by pressurizing helium inside the products and detecting helium leaking outside from the products. This detection method conforms to the SEMI standard F1.
This detection method conforms to the SEMI standard F1. [Outboard leakage] Leakage rate from inside to outside of the products occurring when an internal pressure is more than the external pressure. This can be detected by pressurizing helium inside the products and detecting helium leaking outside from the products. This detection method conforms to the SEMI standard F1.
VBA43A VBA11A VBA42A VBA22A VBA40A VBA20A VBA10A KT-VBA10A-1 KT-VBA20A-1 KT-VBA40A-1 KT-VBA22A-1 KT-VBA42A-1 KT-VBA43A-1 KT-VBA11A-20 Model The kit includes the parts from q to u and a grease pack. VBA43A VBA11A VBA42A VBA22A VBA40A VBA20A VBA10A Quantity Model No.
KT-IRV2000 KT-IRV3000 Repair kit no.
It is recommended to perform a helium leak test on all face seal connections and tube welds per the industry standards (refer to SEMI F1). Selection Warning 1. Conrm the specications.
Y100T-A Y200T-A Y300T-A Y400T-A Y500T-A Seal HNBR (NBR) Note 1) Y120P-050AS Note 2) Y220P-050S Y320P-050S Y420P-050S Y520P-050S INDEX Note 1) ( ): Size 10 Note 2) Assembly of 2 O-rings 158 Series AC Mounting Position for Spacer with Bracket Bracket Pressure relief 3 port valve: V T-spacer: T Pressure switch: S Check valve: K OUT OUT IN IN Bracket A1 A4 A3 A2 A1 Attachment Model K S T V KS KT
1 to @6.) 1 P36202018 P36202018 KT-IR1000 KT-IR2000 KT-IR3000 KT-IR2120 KT-IR3120 Note 1) The replacement parts are shipped with the repair kit number.
KT-IR1000 KT-IR2000 KT-IR3000 KT-IR2120 KT-IR3120 Note) Use mini-flick type. 555 Series IR1000/2000/3000 Dimensions IR100-01 IR200-02 10.5 42 Mounting hole 28 2 50 Mounting hole 12.5 36 Panel mounting hole Bracket (Option) 30 2 25 Bracket (Option) Max.4 Panel mounting hole Pressure gauge (Option) Max.4 Pressure gauge (Option) Panel When mounting on a panel, refer to page 561 in Specific
Flat bracket assembly (including mounting screws) KT-ITV-F2 L-bracket assembly (including mounting screws) KT-ITV-L2 Straight type 3 m P398020-500-3 Right angle type 3 m Power cable connector P398020-501-3 Straight type cable connector Right angle type cable connector L-bracket Flat bracket Mounting screw for the body Mounting screw for the body Right angle type cable connector Flat bracket
IR VEX AMR ITV Note 1) Pressure gauges are not available with the copperfree specification. Note 2) The oil-free specification is not available for pressure switches.
AV AU AF AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR VEX AMR ITV IC VBA VE VY1 G PPA AL 14-2-11 12 F.R.L.
F G H Symbol Description Nq Body size 20 30 40 50 SUP. 3 1 2 C D E Nw Pipe thread type Nil Rc N1 NPT F1 G + Key can be mounted when residual pressure is released. 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size SUP 2 A B IN OUT a Flow direction Nil Flow direction: Left to right R Flow direction: Right to left + Semi-standard 2 x P1 (Port size) Nr b Pressure unit Nil Name plate in SI
ITV Piping labor reduced A flexible system has been adopted. Simplified main circuit IC VBA Manifold capable Using the VVEXB2/4 series, a maximum 10 station manifold is possible.
AV AU AF AR IR VEX AMR P1 port ITV IC Component Parts R(3) port VBA No.
VEX SRH VY1A00 1 , VY1B00 1 (Pilot valve: VY1D00-00) Working principle The supply [1(P) to 2(A)] valve of valve y and the exhaust [2(A) to 3(R)] valve close due to the balance between actuating forces F1 and F2.
OFF state { A R1 (Exhaust air) P B (Supply air) F1 < F2 condition: See figure q. ON state { { Immediately after turning on F1 > F2: See figure e.