CATALOG

S V Q Z 1 0 0 0 / 2 0 0 0 / 3 0 0 0 F I T T I N G B L A N K P L U G DIMENSIONS FITTING BLANK PLUG KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 PART A L D APPLICABLE NUMBER FITTING SIZE D 16 KQP-23-X19 31.5 3.2 3.2 16 KQP-04-X19 32 6 4 18 KQP-06-X19 35 8 6 20.5 KQP-08-X19 39 10 8 COLOR: WHITE 22 KQP-10-X19 43 12 10 M A N I F O L D O P T I O N M A N I F O L D O P T I O N S E R I

1

M5 x 0.8 NN MM C D B 0 0.3 B 0 0.3 A F NA H Z + Stroke S + Stroke NB F For details of the mounting nut, refer to page 376.

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

2

, 60C (F and FS type only)] IDF IDU IDF FS Refer to SMC website for details.

Table of Contents

only Hexagon width across flats G Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats G Flat with ribs Flat with ribs Flat/Flat with Ribs Flat/Flat with Ribs 1 8 B C D D Flat E Flat with ribs F: M6 x 1 F: M8 x 1.25 D F: Rc Y 1 8 D G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 E D G F: Rc Y Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Table of Contents

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1

Micro Mechanical Valve Series VM1000

VM1100-4NU-08 VM1000-4NU-08 Applicable tube P.T.

ZP

only Hexagon width across flats G Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats G Flat with ribs Flat with ribs Flat/Flat with Ribs Flat/Flat with Ribs 1 8 B C D D Flat E Flat with ribs F: M6 x 1 F: M8 x 1.25 D F: Rc Y 1 8 D G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 E D G F: Rc Y Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U

ZP3

Form w 1 Material e r Vacuum inlet Connection thread N S U F GN GS HS 04 06 08 UM A10 02 10.8 2 1.4 KQ2H02-M5N 04 3 4 1.8 F ZP3 T 10 13 16 A12 02 10.8 2 1.4 KQ2H02-M5N 04 3 4 1.8 06 3.2 6 Dimensions Per Vacuum Inlet: Barb Fitting C2 Model A Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Table of Contents

76 KM11-06-10-10 10 102 10 31.5 21.5 31 17 19.5 13 13.5 21 6 10 7.5 KM11-08-12-6 6 85 KM11-08-12-10 10 116 11.5 35.5 24 34.5 18.5 22.5 15.5 14.7 22 8 12 9 Dimensions: KM12 2-4.5 mounting hole N-F Applicable tubing O.D.

Table of Contents

01 02 2 position double: VFS2200-F-01 02 3 position closed center: VFS2300-F-01 02 3 position exhaust center: VFS2400-F-01 02 3 position pressure center: VFS2500-F-01 02 2-5 mounting hole Manual override 150.5 (3 position: 158) (Non-locking) 2-5 mounting hole Manual override (Non-locking) With light/surge voltage suppressor 163.5 (3 position: 171) With light/surge voltage suppressor 1 8 (

Base Mounted Metal Seal/Rubber Seal Series VQ

AXT661-14A-F AXT661-14AN-F AXT661-13A-F AXT661-13AN-F Positive common Single VQ0 (2-wire) Negative common Positive common Double (latching) (3-wire) Negative common Note) Lead wire length: 300 mm The part numbers above are applicable to 2 to 10 stations. 11 to 16 stations: AXT661A(N)-F-425. 13 14 F kit D-sub connector (25 P) P kit Flat ribbon cable connector (26 P) T kit Terminal block (16

V

S V Q Z 1 0 0 0 / 2 0 0 0 / 3 0 0 0 F I T T I N G B L A N K P L U G DIMENSIONS FITTING BLANK PLUG KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 PART A L D APPLICABLE NUMBER FITTING SIZE D 16 KQP-23-X19 31.5 3.2 3.2 16 KQP-04-X19 32 6 4 18 KQP-06-X19 35 8 6 20.5 KQP-08-X19 39 10 8 COLOR: WHITE 22 KQP-10-X19 43 12 10 M A N I F O L D O P T I O N M A N I F O L D O P T I O N S E R I

VM

Toggle lever VM1010-4N-08 VM1010-4NU-08 VM1110-4N-08 VM1110-4NU-08 JIS Symbol/2 port 3 port Panel mounting hole T.T. (Total Travel) 40 Lock nut thick 2 0.5 MPa supply Lock nut thick 2, across flats 14 Applicable tubing T0425 TU0425, T0403, TS0425 VM1110-4N-08 VM1010-4N-08 Bottom ported 3 port 2 port VM1110-4NU-08 VM1010-4NU-08 Applicable tube 4 N F.O.F. 40 T.T.

Metal Seal/Rubber Seal Series VQ Body Ported

VQD AXT661-14A-F AXT661-14AN-F AXT661-13A-F AXT661-13AN-F Positive common Single (2-wire) Negative common Positive common Double (latching) (3-wire) Negative common Note) Lead wire length: 300 mm DIN Rail Mounting Each manifold can be mounted on a DIN rail. Order it by indicating an option symbol for DIN rail mounting style, -D.