Rotary One-touch Fittings Manifold Series KM

-06-08-01S-3 33 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5 76.5 77 78 41 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 44 45 67 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 10 8 KM14-08-10-02S-3 48 88 89 90.5 94 95 98.5 19 71 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

Rotary One-touch Fittings Series KS/KX

17 14 12.8 1 8 1 4 1 8 17 23 23 29 37 55 63 81 75 92 14 4 13.4 10.4 8 1 4 17 17 18.5 15.2 6 26.1 18.0 3 8 1 4 10 3 8 1 2 3 8 1 2 22 18.5 21 7 22 36.3 29.5 24 12 24 20.9 8 22 46.1 46.1 Reference dimensions after R(PT) thread installation.

CATALOG

-03 9.6 10 17.5 33 21.5 15.5 2.5 4 6 KQL04-06 10.4 10 18 33 21.5 16 4.2/4.2 4 8 KQL04-08 10.4 10 18 35 22 16 4.2/4.2 1/8 4.8(3/16) KQL01-05 9.6 10 17.5 33 21.5 15.5 2.5 6 8 KQL06-08 12.8 10 20 36.5 24.5 17 11.4/11.4 5/32 4.8(3/16) KQL03-05 10.4 10 18 33.5 22.5 16 3 6 10 KQL06-10 12.8 10 20 38.5 24 17 11.4/11.4 5/32 6.3(1/4) KQL03-07 10.4 10 18 34 22.5 16 3 8 10 KQL08-10 15.2 12 23 39.5 26

VM

JIS Symbol 2 port One way roller lever VM121-01-02 VM131-01-02 VM121-01-02S VM131-01-02S Polyacetal or hard steel roller 3 port R port (3 port only) 0.5 MPa supply 3.2 mm P.T. 10 N F.O.F. 2.3 mm O.T. 2-4.6 mounting hole 5.5 mm T.T.

KQ2

KQ2W06-01S 30.5 39.1 33.5 42.5 M5 x 0.8 8 3 3 8 1 8 10 6 17 20 12.8 10 1 4 KQ2W06-02S 45.5 46.5 17 14 10.9 8.6 41 M5 x 0.8 3 8 KQ2W06-03S 46.9 48 67 1 8 1 4 KQ2W08-01S KQ2W08-02S 42.6 49 47 51 12 30 47 L1 Applicable tubing 8 14 18.5 15.2 20.5 14.2 12 23 3 8 KQ2W08-03S 17 50.4 52.5 74 1 4 3 8 KQ2W10-02S KQ2W10-03S 56 57.4 59.5 61 66 D1 17 10 76 21 18.5 33.5 23.8 17 26.5 1 2 KQ2W10

F

-03 9.6 10 17.5 33 21.5 15.5 2.5 4 6 KQL04-06 10.4 10 18 33 21.5 16 4.2/4.2 4 8 KQL04-08 10.4 10 18 35 22 16 4.2/4.2 1/8 4.8(3/16) KQL01-05 9.6 10 17.5 33 21.5 15.5 2.5 6 8 KQL06-08 12.8 10 20 36.5 24.5 17 11.4/11.4 5/32 4.8(3/16) KQL03-05 10.4 10 18 33.5 22.5 16 3 6 10 KQL06-10 12.8 10 20 38.5 24 17 11.4/11.4 5/32 6.3(1/4) KQL03-07 10.4 10 18 34 22.5 16 3 8 10 KQL08-10 15.2 12 23 39.5 26

VM

JIS Symbol 2 port One way roller lever VM121-01-02 VM131-01-02 VM121-01-02S VM131-01-02S Polyacetal or hard steel roller 3 port R port (3 port only) 0.5 MPa supply 3.2 mm P.T. 10 N F.O.F. 2.3 mm O.T. 2-4.6 mounting hole 5.5 mm T.T.

KR

(mm) Connection thread R Model L1 L2 D1 Applicable tubing KRW06-02S KRW06-01S 1 8 26 41 67 30 47 74 66 76 145 10 42.5 40 46 48 43.5 49.5 51.5 56.5 58.5 65 57.5 59.5 66 10 20 48 46.5 1 4 17 4.0 14 17 12 14 17 12.8 6 8.6 KRW06-03S 47 14.2 3 8 1 8 KRW08-01S KRW08-02S KRW08-03S KRW10-02S KRW10-03S KRW10-04S KRW12-02S KRW12-03S 1 4 3 8 1 4 3 8 1 2 1 4 3 8 51 52.5 59.5 61 66 62 63.5 15.2 12 23

VM

Voltage AC125V 2 2 4 4 15 10 15 10 AC250V 1.5 1.5 3 3 15 10 15 10 DC8V 1.5 2.5 3 5 15 15 15 15 DC14V 1.5 2.5 3 5 15 10 15 10 DC30V 1.5 2.5 3 5 6 5 6 5 DC125V 0.3 0.05 0.3 0.05 0.5 0.05 0.5 0.05 DC250V 0.2 0.03 0.2 0.03 0.25 0.03 0.25 0.03 JIS Symbol Construction Precautions Component Parts Be sure to read before handling.

20

VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 01 02 03 04 05 06 07 11 12 13 21 22 23 24 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 23.4 23 22.5 22.1 22 Nozzle length: 100 mm 98

Micro Mechanical Valve Series VM1000

F.O.F. 4.5 mm 2.0 mm 2.5 mm 6 N Applicable tube Mounting hole 2 x 3.3 Toggle lever VM1000-4N-08 VM1000-4NU-08 VM1100-4N-08 VM1100-4NU-08 Symbol/2 port 3 port Panel mounting hole (A) 2 (A) 2 12 12 10 10 Lock nut thick 2 Max. 5 1 (P) 1 (P) 3 (R) 0.5 MPa supply Lock nut thick 2, across flats 14 Applicable tubing VM1100-4N-08 VM1000-4N-08 T0425 TU0425, T0403, TS0425 Side ported 3 port 2 port

VM

SA Toggle lever VM120-01-08 VM130-01-08 Panel mounting hole JIS Symbol 2 port VA Hexagon nut thick 5, across flats 17 VM 3 port VR R port VH (3 port only) 0.5 MPa supply VHS 2-4.6 mounting hole 10 N F.O.F. 60 T.T.

One-touch Fittings

[mm] Weight [g] With a rib Nylon Urethane 3.2 1/8 KQ2L23-01S 10 7.1 10 14.5 16.7 17.2 13.3 3 2.5 2.5 4.6 1/4 KQ2L23-02S 14 7.1 10 14.5 21.2 20.1 13.3 3 2.5 2.5 14.1 4 1/8 KQ2L04-01S 10 8.2 10 14.8 16.2 17.2 13.3 4.6 3.3 3 4.8 V 1/4 KQ2L04-02S 14 8.2 10 14.8 21.7 21.1 13.3 4.6 3.3 3 14.3 V Applicable tubing 6 1/8 KQ2L06-01S 10 10.4 10 15.5 17.3 19.4 13.3 11.4 9 4.5 5.2 1/4 KQ2L06-02S 14

Stainless Steel 316 Fittings

25.3 23.3 26.7 28.1 29.7 30.1 33.5 29.7 30.1 33.5 31.3 31.7 35.1 31.3 31.7 35.1 33.1 36.3 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 10 14 10 14 10 14 16.3 19.1 16.3 19.1 17.8 20.6 20.2 22 23 2.5 4 1.8 1.6 d 5 8 Applicable tube 3 4 2.3 2.6 H1 H2 4 6 3.3 6 5.8 10 M A L 14 6 8 5.3 6.6 14 17 Connection thread 17 25 17 7.5 10 6.8 30 22 27.1 7.6

20

VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 01 02 03 04 05 06 07 11 12 13 21 22 23 24 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 23.4 23 22.5 22.1 22 Nozzle length: 100 mm 98

30

(mm) Note 2) Effective area (mm2) H (Width across flat) 2 2 3 2 4 5 6 5 8 8 Connection thread R, M Note 1) D M Weight (g) A H L Model KQB2S23-M5 KQB2S04-M5 KQB2S04-01S KQB2S06-M5 KQB2S06-01S KQB2S06-02S KQB2S08-01S KQB2S08-02S KQB2S08-03S KQB2S10-01S KQB2S10-02S KQB2S10-03S KQB2S10-04S KQB2S12-02S KQB2S12-03S KQB2S12-04S KQB2S16-03S KQB2S16-04S 3.2 9 9 10 16.5 17.1 20.4 19.6 3 4 4.1 4 10

One-touch Fittings Series KQ2

Nylon Urethane KQ2W23-M5 30 8 31 10 M5 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 1 8 KQ2W23-01S KQ2W23-02S 10 14 3.2 1 4 KQ2W04-M5 KQ2W04-01S 8 18 30 37.5 32 38.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 4.0 4.0 23 14 10 10 1 4 KQ2W04-02S 43.5 42.5 38 11 26 KQ2W06-M5 KQ2W06-01S 30.5 40 33.5 42.5 M5 0.8 8 3 3 8 1 8 10 6 17 12.8 20 1 4 10 KQ2W06-02S 46 46.5 17 14 10.9 10.9 41 3 8 KQ2W06-03S

Air Fittings Fitting Series For Special Environment

N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 89 47 1 4 17 19.5 33.5 23.5 33 13.5 8.5 13 19 10 125 6 108 10 55 73 106 104 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 22.5 37.5 26 36.5 10 15.5 20.5 14.7 86 126 119

Table of Contents

Type Metric size Inch size Elbow Universal 2 3 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 3.2 4 6 8 10 12 03 05 07 09 11 13 04 06 08 10 12 Control type Meter-out Meter-in 0 1 Use 1/8" tube.