CATALOG

4 11/16 110 5/32 10 6 75 KM12-03-35-10 21.5 6 17 17 19.5 31.5 31.25 48 13 1/4 95 1/4 10 7 84 KM12-07-35-6 21.5 10 17 17 19.5 31.5 31.25 73.5 13 1/4 11/16 121.2 1/4 10 7 96 KM12-07-35-10 25 6 18.5 18.5 24 37.7 37.5 52.8 15 3/8 102 5/16 12.8 9.5 100 KM12-09-36-6 25 10 18.5 18.5 24 37.7 37.5 83 15 3/8 7/8 132 5/16 12.8 9.5 117 KM12-09-36-10 FOR DIMENSIONS ON OTHER KM MODELS, CONTACT SMC CUSTOMER

KJ

F (inch) Model N L1 L2 H (Width across flats) Port B min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 M KM12-03-35-10 KM12-03-35-6 6 87 10 40 65 5 32 1 4 29 18 29.5 19.5 10.6 12 16 6 17.46 10 110 6 95 10 121 6 102 10 61.5 72 KM12-07-35-10 KM12-07-35-6 48 82 31.25 10 19.5 31.5 21.5 13.2 13 17 7 17.46 1 4 1 4 73.5 92 KM12-09-36-10 KM12-09-36-6 52.8 97 37.5 12.7 23.7 37.7 25 15.2 15 18.5 9.5 22.22 5

F

4 11/16 110 5/32 10 6 75 KM12-03-35-10 21.5 6 17 17 19.5 31.5 31.25 48 13 1/4 95 1/4 10 7 84 KM12-07-35-6 21.5 10 17 17 19.5 31.5 31.25 73.5 13 1/4 11/16 121.2 1/4 10 7 96 KM12-07-35-10 25 6 18.5 18.5 24 37.7 37.5 52.8 15 3/8 102 5/16 12.8 9.5 100 KM12-09-36-6 25 10 18.5 18.5 24 37.7 37.5 83 15 3/8 7/8 132 5/16 12.8 9.5 117 KM12-09-36-10 Courtesy of Steven Engineering, Inc. !

Rotary One-touch Fittings Manifold Series KM

N L1 L2 Weight (g) Port B Min. port size L3 L4 L5 L6 P Q1 Q2 M KM12-03-35-10 KM12-03-35-6 6 87 10 40 67 5 32 1 4 18 29.5 19.5 29 10.6 12 16 6 17.46 10 110 6 95 10 121 6 102 10 61.5 75 KM12-07-35-10 KM12-07-35-6 48 84 10 19.5 31.5 21.5 31.25 13 7 13.2 17 17.46 1 4 1 4 73.5 96 KM12-09-36-10 KM12-09-36-6 52.8 100 12.7 37.5 23.7 37.7 25 15 9.5 15.2 18.5 5 16 3 8 22.22 83 117 132 Metric Thread

5 Port Solenoid Valve Series SY3000/5000/7000/9000

VFR L (10) 8 Dimensions VQ7 Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 KQ2P-10 22 43 12 12 KQ2P-12 24 44.5 14 KQ2P-01 16 31.5 5 KQ2P-03 16 32 6 KQ2P-07 18 35 8.5 KQ2P-09 20.5 39 10 KQ2P-11 22 43 11.5 (24) (35) 5.5 Rail mounting pitch 12.5 No. 0 1 2 3 4 5 6 7 8 9 1 8" 98 24.8 110.5 28 123 31.1 135.5 34.3 148 37.4 160.5 40.6 173 43.8 185.5

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

Silencer Series AN

36.5 1.4 1.4 37 25 dB(A) AN10-C07 1/4 2.8 4 5.2 6 8.2 45 73 76 90 91 AN15-C08 8 45 4 30 dB(A) 30 dB(A) AN20-C10 10 6 57.5 30 dB(A) AN300-KM12 AN20-C11 AN30-C12 3/8 12 5 8.2 71.5 1 Silencer Compact Resin Type/Male Thread Series AN05 to 40 RoHS How to Order 02 AN 20 Thread connection port size Body size Symbol Port size Applicable model AN05 AN10 AN15/20 AN30 AN40 Symbol Thread type M5

5 Port Solenoid Valve Series SV1000/2000/3000/4000

-59-1A SV1000-59-2A 10 Applicable fitting size d A L D Model KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 SV1000 SX3000-77-1A SX3000-77-1A 16 4 16 32 6 SV2000-59-1A SV2000-59-2A 10 6 18 35 8 SV2000 SV2000-59-3A SV2000-59-3A 16 8 20.5 39 10 SV3000 SV4000 SV3000-59-1A SV3000-59-1A 10 10 22 43 12 SY9000-57-1A SY9000-57-1A 10 12 24 44.5 14 1/8" 16 31.5 5 5/32

Series SV

Cable core wire colors 7 1 8 3 2 8 7 1 8 1 7 3 2 8 2 3 2 3 1 7 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 4 5 6 6 5 4 4 5 6 6 5 4 Connections Connections Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Plug connector pin arrangement

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Series AN -KM 100 m Page 5-10-6 High noise reduction type Case adopts UL94-V0 grade flame resistant material. Series AN02 35 dB (A) 50 m Page 5-10-7 High noise reduction type A high noise reduction type silencer keeps the noise level inside a plant below 85 dB (A).

KJ

F (mm) Weight (g) 65 72 81 91 97 112 Port B Min. port size L2 L3 L4 L5 L6 P Q1 Q2 M L1 KM12-04-02-6 6 17 40 89 110 99 125 108 139 1 4 6 4 10 18 29.5 19.5 29 10.6 16 12 KM12-04-02-10 10 KM12-06-02-6 6 KM12-06-02-10 10 KM12-08-03-6 6 KM12-08-03-10 10 61.5 47 1 4 17 7.5 6 10 19.5 31.5 21.5 31 13 17 13.5 73 55 3 8 19 9 8 11.5 22.5 35.5 24 34.5 15.5 18.5 14.7 86 Dimensions: KM13 Applicable tubing

Rotary One-touch Fittings Series KS/KX

t e l a m e F ) T P ( c R 8 / 3 T P N 8 / 3 ) T P ( c R 3 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 3 6 8 0 1 ) T P ( R , 6 8 / 1 ) T P ( R , 6 4 / 1 ) T P ( R , 6 8 / 3 ) T P ( R , 6 8 / 1 ) T P ( R , 6 4 / 1 3 ) T P ( R , 6 8 / ) T P ( R , 6 4 / 1 ) T P ( R , 6 8 / 3 ) T P ( R , 6 4 / 1 KM11 4 1 M K h c u o t e n O g n i t t i f g n i t

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

VFS VS VS7 Dimensions VQ7 Applicable fitting size d 4 Model A L D Flat ribbon cable connector assembly KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 KQ2P-10 22 43 12 Cable length (L) Assembly part no.

SY

Specification Standard/Internal pilot Internal pilot/Built-in silencer Symbol Nil Applicable tube size SY5000 SY3000 4 4 4 6 6 4 6 6 8 4 8 Mixed 6 Mounting position Applicable stations Symbol U Symbol The type of lead wire assemblies included is different.

SV

Core wire colors 7 1 8 1 7 3 2 8 7 1 8 3 2 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 2 3 1 7 2 3 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 6 5 4 4 5 6 4 5 6 6 5 4 Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Plug connector pin arrangement Connections Connections

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 16 4 32 6 18 6 35 8 20.5 8 39 10 Series SY3000 SY5000 SY7000 Part No. 22 10 43 12 SY3000-52-2A 24 12 45.5 14 SY5000-52-2A SY3000/5000 DIN rail dimensions and weight SY7000-52-2A VZ1000-11-1Blocking disk indication stickers Refer to L dimensions Enter a number from the DIN rail dimension table below in the .

AN

Model Noise reduction dB(A) Effective area Dimensions (mm) Model Applicable One-touch fitting size Mounting 6(Series KQ) (mm2) A B C Caution AN103-KM6 6(Series KQ) AN103-X233 AN103-X235 8(Series KQ) AN203-KM8 8(Series KQ) AN200-KM8 10(Series KQ) AN200-KM10 10(Series KQ) AN300-KM10 12(Series KQ) AN300-KM12 7 37 11 15 1 If the silencer body (case) is made of plastic and is BC sintered: To mount

Table of Contents

Series SV2000 for EX120 Dedicated Output Serial Wiring. 6 7 8 10 10 10 10 10 10 10 11 11 11 11 11 11 12 12 13 13 13 15 16 16 17 19 20 21 21 23 23 24 24 24 24 24 25 26 27 27 30 30 31 32 33 34 35 36 37 37 39 40 40 41 42 44 45 45 50 50 51 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

2

20 198 10 209 195 198 6 12 7 6 10 IDG20M2, 20HM2 227 66 99 78 40 24 212 14 223 209 IDG30AM2, 30HAM2 IDG30LAM2 IDG50AM2, 50HAM2 IDG50LAM2 302 298 345 337 56 80 56 89 127 89 69 95 69 35 50 35 20 28 20 198 244 198 10 18 10 209 255 209 195 241 195 7 6 14 12 7.5 7 7 6 12 10 113 Made to Order Series IDGA/IDG Reduced purge IDGA Series Air Preparation Equipment Dimensions IDG60LAM2 IDG75LAM2 IDG100LAM2

1

(n: Number of auto switches) Different surfaces Same surface Different surfaces Same surface Air Cylinders D-M9l D-M9lW D-M9lA D-A9l 10 15 Note 1) 45 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 45 + 15 (n 2) (n = 2, 3, 4, 5) D-M9lV 5 15 Note 1) 35 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) D-M9lWV D-M9lAV 10 15 Note 1) 35 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3)