Table of Contents

L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

1

Red VM131-01-35RA VM151-01-35RA VM131U-01-35RA VM151U-01-35RA VM133-M5-35RA VM153-M5-35RA Black VM131-01-35BA VM151-01-35BA VM131U-01-35BA VM151U-01-35BA VM133-M5-35BA VM153-M5-35BA Green VM131-01-35GA VM151-01-35GA VM131U-01-35GA VM151U-01-35GA VM133-M5-35GA VM153-M5-35GA Yellow VM131-01-35YA VM151-01-35YA VM131U-01-35YA VM151U-01-35YA VM133-M5-35YA VM153-M5-35YA Note 1) It is possible

5 Port Solenoid Valve Series SY3000/5000/7000/9000

EB P EA X PE EB P EA EA P EB PE X EA P EB PE X 161.2 139.4 159.4 124.6 174.2 152.4 137.6 Note) Refer to page 340 for dimensions of connector types.

Table of Contents

01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Bottom ported: VV5FR4-01 Station 2Port size CD CU External pilot port (PE port) For wiring specifications, refer to page 1326.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

port) VFR (PE port) Applicable cable O.D. 2.3 to 2.8 (PE port) (Lead wire length) (PE port) Applicable cable O.D.

V100

Ordering Example: VV307-01-052-01-F1 pc. (5 station manifolds base) V0307-1G4 pcs. DXT060-51-13A 1 pc.

VFR

L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

5-Port Solenoid Valve

: Pilot EXH port] [X: External pilot port] Applicable tubing O.D.: 4, 5/32" 4(A) port side : Blue (For rubber seal) : Gray (For metal seal) 2(B) port side : Yellow (65.4) 39.5 26.5 PE PE LOCK FREE A B 4 A A B 4 A A B A B 4 A A B 3/5 3/5 4 A 4 A 52.8 26.9 113.4 116.7 E X 1 X E 1 81.2 (61.7) 01 : 16.2 C : 14.5 P P 47.3 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(E) port] Applicable tubing

Micro Mechanical Valve Series VM1000

Red VM131-01-35RA VM151-01-35RA VM131U-01-35RA VM151U-01-35RA VM133-M5-35RA VM153-M5-35RA Black VM131-01-35BA VM151-01-35BA VM131U-01-35BA VM151U-01-35BA VM133-M5-35BA VM153-M5-35BA Green VM131-01-35GA VM151-01-35GA VM131U-01-35GA VM151U-01-35GA VM133-M5-35GA VM153-M5-35GA Yellow VM131-01-35YA VM151-01-35YA VM131U-01-35YA VM151U-01-35YA VM133-M5-35YA VM153-M5-35YA Note 1) It is possible

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Grommet terminal: Double VFS2210-E-01 02 Closed center VFS2310-E-01 02 Exhaust center VFS2410-E-01 02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 With light/surge voltage suppressor 151 (3 position: 159) Lead wire O.D.

0.55

M-type plug connector (M) DIN terminal (D) (Y) Conduit terminal (T) 103.5 84.5 84.5 PE PE PE PE PE PE 198.2 220.8 Max. 10 216 Max. 10 179.2 201.8 197 (Indicator light) 89.6 100.9 98.5 Pg9 Pg9 Approx. 300 (Lead wire length) 89 112.2 [102.2] 109 Applicable cable O.D. 4.5 to 7 118 122.2 [112.2] Applicable cable O.D. 4.5 to 7 [ ]: Without indicator light Unless otherwise indicated, dimensions

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(For mounting) 2 x 3.2 35 3 Manual override 3 22 A B + + B A PE X P EB EA 42.7 10.2 32.4 [34.6] 97.3 [101.7] G: Approx. 300 H: Approx. 600 M5 x 0.8 (External pilot port) M5 x 0.8 (Pilot EXH port) (Lead wire length) 53.5 [60.5] 50 7.5 16.5 24.5 11 11 20.5 41 (P, EA, EB port) 1/8 L plug connector (L): 10-SY3 40(R)-L-01 3 4 5 M plug connector (M): 10-SY3 40(R)-M-01

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

-06 AS2200-01 70% 100 50 10% 30% 50% 0 CM2 25 200 150 AS2201F -01-06 AS2200-01 100 50 0 SV100 ANA1 -C08 T0604 CM2 32 200 150 AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable related components For details regarding different conditions

2

Model Section Type Round type Standard G27-10-R1 G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G27-10-R1 G36-4-01 G46-4-01 Round type (with color zone) Standard G36-10-01-L G46-10-01-L 0.02 to 0.2 MPa setting G36-4-01-L G46-4-01-L Square embedded type Note 2) Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] 0.02 to 0.2 MPa setting GC3-4AS [GC3P-010AS (Pressure gauge cover only

5 Port Solenoid Valve Series VQZ1000/2000/3000

Model VQZ1000 VQZ2000 VQZ3000 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 For a silencer to be mounted in a single valve unit, refer to page 978.

SY

Grommet (G), (H): SY3240(R)-01 Scale: 35% G H With interface regulator 141 15 68.5 [75] 65.6 68 32.5 24.5 With plug (12.5) (37) 41 L type plug connector (L): SY3240(R)-L-01 M type plug connector (M): SY3240(R)-M-01 Grommet .

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(M): SY3140(R)-M-01-Q VQ5 VQZ VQD VFS VS VS7 VQ7 1.2-33 Base Mounted Type Series SY3000 Dimensions Note)< >: Values with surge voltage suppressor 2 position double Grommet (G), (H): SY3240(R)-01-Q Scale: 35% G H With interface regulator 141 15 68.5 65.6 68 32.5 24.5 With plug (12.5) (37) 41 L type plug connector (L): SY3240(R)-L-01-Q M type plug connector (M): SY3240(R)-M-01-Q 1.2-34 Base

VQZ1000/2000/3000

AN110-01 AN200-02 AN200-02 AN110-01 For a silencer to be mounted in a single valve unit, refer to page 2-7-5.