SY

Port size M5 x 0.8 Rc 1/8 Rc 1/4 SY3000 SY3000-39-20A SY5000 SY5000-39-1A SY7000 SY7000-39-1A SY3000 SY3000-38-20A SY5000 SY5000-38-1A SY7000 SY7000-38-1A Rc 1/4 SY9000 SY9000-39-1A Rc 1/4 SY9000 SY9000-38-1A Series Round head combination screw Gasket Note 1) The SUP port can be on the lead wire side or end plate side for SY3000/5000/7000.

SX

SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no.

CATALOG

SY5000 SY5000-38-1A PT 1/8 SY5000 SY5000-39-1A PT 1/8 SY5000 SY5000-38-1TA NPTF 1/8 SY5000 SY5000-39-1TA NPTF 1/8 SY7000 SY7000-38-1A PT 1/4 SY7000 SY7000-39-1A PT 1/4 SY7000 SY7000-38-1TA NPTF 1/4 SY7000 SY7000-39-1TA NPTF 1/4 FLAT RIBBON CABLE ASSEMBLY AXT100-FC26(1/2/3) PORT PLUGS Cable Length (L) Assembly Number Note 1.5m AXT100-FC26-1 Cable 26 CoreX28AWG 3m AXT100-FC26-2 Cable 26 CoreX28AWG

V100

PVT317-53-1A 1 pc.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 10-SY3000 SY3000-38-20A(-Q) 10-SY5000 SY5000-38-1A(-Q) 10-SY7000 SY7000-38-1A(-Q) SUP port 10-SY3000 SY3000-39-20A(-Q) 10-SY5000 SY5000-39-1A(-Q) 10-SY7000 SY7000-39-1A(-Q) EXH port (Both sides) 1 8 1 4 10-SY9000 SY9000-39-1A(-Q) 1 4 1 8 1 4 10-SY9000 SY9000-38-1A(-Q) 1 4 Note) The SUP port of 10-SY3000/5000/7000 may be either on the lead wire side or on the end plate

V

SY5000 SY5000-38-1A PT 1/8 SY5000 SY5000-39-1A PT 1/8 SY5000 SY5000-38-1TA NPTF 1/8 SY5000 SY5000-39-1TA NPTF 1/8 SY7000 SY7000-38-1A PT 1/4 SY7000 SY7000-39-1A PT 1/4 SY7000 SY7000-38-1TA NPTF 1/4 SY7000 SY7000-39-1TA NPTF 1/4 FLAT RIBBON CABLE ASSEMBLY AXT100-FC26(1/2/3) PORT PLUGS Cable Length (L) Assembly Number Note 1.5m AXT100-FC26-1 Cable 26 CoreX28AWG 3m AXT100-FC26-2 Cable 26 CoreX28AWG

Vacuum System Peripherals:

Note Non plug assembly: ZYY3000-NPA Blanking plate assembly: SX3000-75-1A Individual SUP spacer assembly: SY3000-38-3A SUP/EXH block assembly (for R): SX3000-51-6A SUP block disk: SX3000-77-1A Individual EXH spacer assembly: SY3000-39-3A SUP/EXH block assembly (for S): SX3000-51-7A SUP/EXH block assembly (for RS): SX3000-51-8A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH

Table of Contents

(N) VVZS2000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS2000-1A-3-Bore size (-X12) For VZS3000 New block assembly part no. (N) VVZS3000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS3000-1A-3-Bore size (-X12) Note) -X12 shows the part no. for all common style.

SQ1000/2000

SSQ2000 1A 3 F0 01 !3 Includes gaskets.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 10-SS5YJ3-32-M5 10-SS5YJ3-32-C4 10-SYJ333 1/8 10-SS5YJ3-S32-M5 10-SS5YJ3-S32-C4 Base mounted for internal pilot 10-SS5YJ3-41-M5 10-SS5YJ3-41-C4 10-SYJ343 1/8 10-SS5YJ3-S41-M5 10-SS5YJ3-S41-C4 10-SS5YJ3-46-M5 1/8 M5 x 0.8 10-SS5YJ3-46-C4 10-SYJ343 10-SS5YJ3-S46-M5 10-SS5YJ3-S46-C4 Note) Value at manifold base mounted, 2 position

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VZ1000-1A-2 Note No.

Table of Contents

VJ10-36-1A-10 . 2 pcs.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(Valve) SYJ5000-21-1A 1 pc. (Blank plate ass'y) PSS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

Series SV

10 SV1000 A L D Applicable fitting size d Model SX3000-77-1A SX3000-77-1A 16 KQ2P-04 16 32 6 4 SV2000-59-2A SV2000-59-1A 10 SV2000 KQ2P-06 18 35 8 6 SV2000-59-3A SV2000-59-3A 16 KQ2P-08 20.5 39 10 8 SV3000-59-1A SV3000-59-1A 10 SV3000 KQ2P-10 22 43 12 10 SY9000-61-2A SY9000-61-2A 10 SV4000 KQ2P-12 24 44.5 14 12 1mm2 = 1in = 25.4mm KQ2P-01 16 31.5 5 1/8" Manifold Specification Sheets KQ2P

SYJ3000/5000/7000

Type 20 (5 Port/Body ported) How to Order Applicable solenoid valve M5 C4 C6 M5 C4 C6 SS5YJ520 05 SYJ520-A, B port M5 x 0.8 SYJ523-Applicable blanking plate assembly SYJ5000-21-1A Applicable individual EXH spacer assembly SYJ5000-17-1A P, R port thread type Number of stations -+ -+ P port 1/8 02 2 stations R R P Nil 00F 00N 00T Rc G NPT NPTF : : 20 20 stations R port 1/8 SV SZ Type 40 (5

High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

-59-2A 10-SV1000 16 SX3000-77-1A SX3000-77-1A 10 SV2000-59-1A SV2000-59-2A 10-SV2000 16 SV2000-59-3A SV2000-59-3A 10 SV3000-59-1A SV3000-59-1A 10-SV3000 10 SY9000-57-1A SY9000-57-1A 10-SV4000 261 Manifold Option 10-SV Manifold Option Circular connector / Cable assembly (26 pins) D-sub connector / Cable assembly (25 pins) AXT100 MC26 AXT100 DS25 Directional Control Valves Air Grippers

3 Port Air Operated Valve Series SYJA300

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external