SY

Port size M5 x 0.8 Rc 1/8 Rc 1/4 SY3000 SY3000-39-20A SY5000 SY5000-39-1A SY7000 SY7000-39-1A SY3000 SY3000-38-20A SY5000 SY5000-38-1A SY7000 SY7000-38-1A Rc 1/4 SY9000 SY9000-39-1A Rc 1/4 SY9000 SY9000-38-1A Series Round head combination screw Gasket Note 1) The SUP port can be on the lead wire side or end plate side for SY3000/5000/7000.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Port size M5 1/8 1/4 VQ SY3000 SY3000-39-20A SY5000 SY5000-39-1A-Q SY7000 SY7000-39-1A-Q SY3000 SY3000-38-20A SY5000 SY5000-38-1A-Q SY7000 SY7000-38-1A-Q VQ4 1/4 SY9000 SY9000-39-1A-Q 1/4 SY9000 SY9000-38-1A-Q Series Round head combination screw VQ5 Gasket Note 1) The SUP port can be on the lead wire side or end plate side for SY3000/5000/7000.

SX

SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no.

V100

PVT317-53-1A 1 pc.

CATALOG

SY5000 SY5000-38-1A PT 1/8 SY5000 SY5000-39-1A PT 1/8 SY5000 SY5000-38-1TA NPTF 1/8 SY5000 SY5000-39-1TA NPTF 1/8 SY7000 SY7000-38-1A PT 1/4 SY7000 SY7000-39-1A PT 1/4 SY7000 SY7000-38-1TA NPTF 1/4 SY7000 SY7000-39-1TA NPTF 1/4 FLAT RIBBON CABLE ASSEMBLY AXT100-FC26(1/2/3) PORT PLUGS Cable Length (L) Assembly Number Note 1.5m AXT100-FC26-1 Cable 26 CoreX28AWG 3m AXT100-FC26-2 Cable 26 CoreX28AWG

Valve Single Unit

SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no. SX3000-77-1A SX5000-77-1A SX3000 SX5000 SY SYJ Lable for block disk The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) EXH port SUP port SX VZ3000-123-1A Label for SUP/EXH block disk Label for EXH block disk Label for SUP block disk Series Assembly part no.

Valve Single Unit

SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no. SX3000-77-1A SX5000-77-1A SX3000 SX5000 SY SYJ Lable for block disk The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) EXH port SUP port SX VZ3000-123-1A Label for SUP/EXH block disk Label for EXH block disk Label for SUP block disk Series Assembly part no.

5-Port Solenoid Valve

Mixed Mounting Manifold Exploded View Model Port size Flow rate characteristics 1, 3/5 (P, E) 4, 2 (A, B) 1 4/2 (P A/B) 4/2 3/5 (A/B E) C [dm3/(sbar)] b C [dm3/(sbar)] b SY30M-38-1A-C6 C8 C6 1.2 0.32 1.4 0.24 SY30M-39-1A-C6 1.2 0.27 1.1 0.27 SY50M-38-1A-C8 C10 C8 2.7 0.36 3.3 0.22 SY50M-39-1A-C8 2.2 0.37 2.2 0.36 SY70M-38-1A-C12 C12 C12 4.8 0.26 4.7 0.25 SY70M-39-1A-C12 4.9 0.28 4.7 0.23

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 10-SY3000 SY3000-38-20A(-Q) 10-SY5000 SY5000-38-1A(-Q) 10-SY7000 SY7000-38-1A(-Q) SUP port 10-SY3000 SY3000-39-20A(-Q) 10-SY5000 SY5000-39-1A(-Q) 10-SY7000 SY7000-39-1A(-Q) EXH port (Both sides) 1 8 1 4 10-SY9000 SY9000-39-1A(-Q) 1 4 1 8 1 4 10-SY9000 SY9000-38-1A(-Q) 1 4 Note) The SUP port of 10-SY3000/5000/7000 may be either on the lead wire side or on the end plate

V

SY5000 SY5000-38-1A PT 1/8 SY5000 SY5000-39-1A PT 1/8 SY5000 SY5000-38-1TA NPTF 1/8 SY5000 SY5000-39-1TA NPTF 1/8 SY7000 SY7000-38-1A PT 1/4 SY7000 SY7000-39-1A PT 1/4 SY7000 SY7000-38-1TA NPTF 1/4 SY7000 SY7000-39-1TA NPTF 1/4 FLAT RIBBON CABLE ASSEMBLY AXT100-FC26(1/2/3) PORT PLUGS Cable Length (L) Assembly Number Note 1.5m AXT100-FC26-1 Cable 26 CoreX28AWG 3m AXT100-FC26-2 Cable 26 CoreX28AWG

4/5 Port Solenoid Valve

M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 10-SS5YJ3-32-M5 10-SS5YJ3-32-C4 10-SYJ333 1/8 10-SS5YJ3-S32-M5 10-SS5YJ3-S32-C4 Base mounted for internal pilot 10-SS5YJ3-41-M5 10-SS5YJ3-41-C4 10-SYJ343 1/8 10-SS5YJ3-S41-M5 10-SS5YJ3-S41-C4 10-SS5YJ3-46-M5 1/8 M5 x 0.8 10-SS5YJ3-46-C4 10-SYJ343 10-SS5YJ3-S46-M5 10-SS5YJ3-S46-C4 Note) Value at manifold base mounted, 2 position

Vacuum System Peripherals:

Note Non plug assembly: ZYY3000-NPA Blanking plate assembly: SX3000-75-1A Individual SUP spacer assembly: SY3000-38-3A SUP/EXH block assembly (for R): SX3000-51-6A SUP block disk: SX3000-77-1A Individual EXH spacer assembly: SY3000-39-3A SUP/EXH block assembly (for S): SX3000-51-7A SUP/EXH block assembly (for RS): SX3000-51-8A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH

0.4

Single wiring 1A Red COM.

Table of Contents

(N) VVZS2000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS2000-1A-3-Bore size (-X12) For VZS3000 New block assembly part no. (N) VVZS3000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS3000-1A-3-Bore size (-X12) Note) -X12 shows the part no. for all common style.

SQ1000/2000

SSQ2000 1A 3 F0 01 !3 Includes gaskets.

0.4

SOL.A 1A () (+) 1B () (+) Station 1 SOL.B 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL.A 2A () (+) 2B () (+) Station 2 SOL.B SOL.A 1.

45

SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no. SX3000-77-1A SX5000-77-1A SX3000 SX5000 SY SYJ Lable for block disk The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) EXH port SUP port SX VZ3000-123-1A Label for SUP/EXH block disk Label for EXH block disk Label for SUP block disk Series Assembly part no.

45

SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no. SX3000-77-1A SX5000-77-1A SX3000 SX5000 SY SYJ Lable for block disk The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) EXH port SUP port SX VZ3000-123-1A Label for SUP/EXH block disk Label for EXH block disk Label for SUP block disk Series Assembly part no.

SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

Valve Single Unit

Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.