0.5

M1 IZS30 A0201 IZS30 (10 replacement felt pads) (With 1 felt pad, 1 rubber grindstone, and 2 replacement felt pads) A0202 IZS30 (1 replacement rubber grindstone) Felt Rubber grindstone 12 IZF21/31 Series Specifications Model IZF21-m IZF21-P IZF31-m IZF31-P NPN PNP NPN PNP Maximum air flow 1.8 m3/min 4.4 m3/min Applied voltage 5 kV Ion generation method Corona discharge type Method of applying

Fan Type Ionizer IZF21/31 Series

Fan Type Ionizer IZF21/31 Series RoHS How to Order IZF 21 B Air suction side lter Model Nil None U With lter1 Symbol Max. air ow 21 1.8 m3/min 31 4.4 m3/min 1: Filter + Filter holder Automatic cleaning unit, Louver (Refer to page 12 for detail.)

Model: 21 (1.8 m³/min), Input/Output: NPN, Input/Output, Power Supply Cable, AC Adapter: w/Power Supply Cable, 3m, Bracket: B (w/Bracket), Automatic Cleaning Unit, Louver: S (w/Automatic Cleaning Unit)

Model: 1.8 m³/min, Input/Output: NPN, Input/Output, Power Supply Cable, AC Adapter: w/Power Supply Cable, 3m, Bracket: w/Bracket, Automatic Cleaning Unit, Louver: w/Automatic Cleaning Unit, Filter: -

5-Port Solenoid Valve

41 p. 141 p. 133 p. 149 p. 41 p. 41 p. 59 p. 67 p. 77 p. 87 p. 97 p. 113 p. 103 p. 125 p. 124-1 p. 156-1 SY7 0 Type 11 SY5 0 Manifold Top ported Bottom ported Top ported From p. 41 p. 141 p. 133 p. 124-1 p. 156-1 p. 149 p. 41 p. 41 p. 59 p. 67 p. 77 p. 87 p. 97 p. 103 p. 113 p. 125 SY7 0 SY3 3 Type 12 SY5 3 From p. 53 p. 124-5 p. 156-7 p. 111 p. 131 p. 139 p. 147 p. 155 p. 64 p. 53

MXQ

Axial piping type (25): MXQ25L-P 17 40 11.5 79 Operating port 2-Rc 1/8 32 Other dimensions are the same as basic style. 20 8-5-39 40 Series MXQ External Dimensions of Adjuster Rubber Stopper (AS/AT) Extension End (mm) Body mounting section Stroke adjustment range (mm) Body mounting section Table mounting section A Applicable size Model P B C F G M D E P 1) H J K Q 1) A D MXQ-AS6(L) 5 16.5

Air Slide Table Series MXQ

D-X Individual -X 123 Series MXQ External Dimensions of Adjuster With Shock Absorber (BS/BT) Extension End Body mounting section Table mounting section Q P A D J M H K B F G G E E1 L C MXQ-BS20 (L) MXQ-BS25 (L) MXQ-BS 8 (L) MXQ-BS12 (L) MXQ-BS16 (L) Body mounting section Table mounting section A Stroke adjustment range (mm) Applicable size Model D H J K Q 1) B C F G M E L E1 P *1) M3 x 12

1

P.43 P.43 P.71 SY70 SY30 Manifold Top ported Bottom ported Top ported Type 51 SY50 From page 43 P.43 P.43 P.71 P.43 SY70 SY33 Type 52 SY53 From page 63 P.63 P.63 P.81 P.63 SY73 SY30 Type 10 SY50 From page 95 P.95 P.95 P.113 P.143 P.163 P.171 P.179 P.187 P.95 P.123 P.133 P.151 SY70 Type 11 SY50 From page 95 P.95 P.95 P.143 P.163 P.171 P.179 P.187 P.95 P.113 P.123 P.133 P.151 SY70 SY33 Type

Air Slide Table Series MXS

Without adjuster Adjuster on extension end Adjuster on retraction end Adjuster on both ends Absorber on extension end Absorber on retraction end Absorber on both ends Adjuster on extension end + Absorber on retraction end Absorber on extension end + Adjuster on retraction end Nil AS AT A BS (1) Option Combinations Functional option Nil F R P FR FP Adjuster option BT (1) Nil AS AT A BS BT

MXS Series Air Slide Table

9.5 31 16 46.8 12 -M4 X 15 20.5 10 15 M4 X 15 MXS16 MXS-BS16 RB1007 11 37 19 53.7 14 -M5 X 18 23 12 18.5 M5 X 18 MXS20 MXS-BS20 RB1411 13 47 26 78.3 19 12 M6 X 25 27 13 25.5 M6 X 25 MXS25 MXS-BS25 RB1412 16 53.5 26.5 79.3 19 12 M8 X 25 33 17 25.5 M8 X 25 Mounted to body MXS-BS 8, 12, 16 C A MXS-BS 20, 25 P A C B P B WIDTH ACROSS FLATS E D Mounted to table WIDTH ACROSS FLATS F D WIDTH ACROSS

MXS

Bore L 6 8 12 16 20 25 6 8 12 16 20 25 3.11-24 Air Slide Table Series MXS Option Specifications Dimensions of Adjuster Option/With Shock Absorber (BS, BT) Extension End Mounted to body Mounted to table D M Q A P J CL H K MLGC B CNA G G E E1 F C CB MXS-BS20 MXS-BS25 MXS-BS 8 MXS-BS12 MXS-BS16 L CV/MVG CXW Mounted to body Mounted to table Adjuster Part No.

SQ1000/2000

(-S) P. 45 P. 46 P. 47 P. 49 C8 L8 Terminal number SOL.

Air Slide Table

Common with the MXQ series. 21 Series MXQR Dimensions: Adjuster Shock absorber (BS, JS, BT, JT) Extension stroke end Body mounting parts Table mounting parts P A D Q M J B H K F MXQR-BS20 MXQR-BS25 G MXQR-BS 8 MXQR-BS12 MXQR-BS16 G E E1 L C Stroke adjustment range (mm) Body mounting parts Table mounting parts A Applicable size Model L E1 B C F G M P 1) H J K Q 1) D E MXQR 6 M2.5 x 8 12.5

Series SV

3-position 0 3 Regulator port P port A port (P port control type A port regulated) B port (P port control type B port regulated) P P port A port (P port control type A port regulated) B port (P port control type B port regulated) P Option A1 A1 With pressure gauge (for odd no. station) With pressure gauge (for even no. station) Without pressure gauge 05 B1 B1 Option 06 00 M1 With pressure

SV

With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)

Table of Contents

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Magnetically Coupled Rodless Cylinder

wire (NPN) 3-wire (PNP) P P A96V A96 s s s s 5V p P P F9NV F9N IC circuit 5V 12V p P P F9PV F9P s p P P 12V F9BV F9B 2-wire s Relay PLC Grommet Yes 24V s 3-wire (NPN) 3-wire (PNP) p P P F9NWV F9NW Diagnostic indication IC circuit 5V 12V p P P F9PWV F9PW 2-color display p P P F9BWV F9BW 2-wire 12V s Lead wire length symbols 0.5m/ Nil (Example) F9NW 3m/ L F9NWL 5m/ Z F9NWZ Solid state switches

CY1

P-44 (JT)

Basic type / Direct mount type Series CY3B/CY3R

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 1236

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Determination of pressure (P) when making intermediate stop P Ps P > Ps (Refer to page 8-31-1.) Note 2) (For intermediate stops, refer to page 8-15-74.)