Air Volume: L (Low Noise Type, 0.46m³/min), Output: P (PNP Output)

1

Manifold overall length Manifold overall length Approx. 29% reduced SY5000 manifold SY5000 3 stations SY3000 manifold SY3000 4 stations Mixed manifold SY5000 3 stations SY3000 4 stations For serial transmission EX260 A B A B A B A B A B A B A B A B A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 Installation space A A A A A A A A B B B B B B B B 12 B 12 B 12 B 12 B 12 B 12 B 136.7 mm

Vacuum

rib O Deep type B Bellows type List o Pad dia.

Vacuum

rib O Deep type B Bellows type List o Pad dia.

Table of Contents

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000

CG5-S

A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulfuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium hydroxide A A A D C A 8 Magnesium hydroxide A A A B B A 9 Acetylene A A A A A A 10 Formic

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS SNKJ-016SUS NTJ-015SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS NTJ-015SUS SNKJ-016SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.

CG5-S

HS SMC SMC 16 29 A B Auto switch mounting positions Minimum strokes for auto switch mounting (mm) Basic type, Foot type, Flange type, Clevis type Mounting bracket Auto switch model B D-H7BA Applicable bore size (mm) 1 pc. (Rod cover side) 2 pcs. (Different sides) 2 pcs.

Type: Bar Type, Indicator: Not Provided, Additional Function: Error Signal Output, Air Flow/Consumption Amount(m³/min): -, Ion Balance: ±30V, Ion Balance Adjusting Function: Automatic, Operating Pressure Range(MPa): null～0.7, Power Supply: DC24V, Accessories/options: ordered separately: Power supply cable included (10 m) / with bracket, I/O specifications: PNP output, Bar length

Type: Bar Type, Indicator: Not Provided, Additional Function: Error Signal Output, Air Flow/Consumption Amount(m³/min): -, Ion Balance: ±30V, Ion Balance Adjusting Function: Automatic, Operating Pressure Range(MPa): null～0.7, Power Supply: DC24V, Accessories/options: ordered separately: Power supply cable included (3 m) / with bracket, I/O specifications: PNP output, Bar length

Air Volume: L (Low Noise Type, 0.46m³/min), Output: P (PNP Output), Power Supply Cable, AC Adapter: Q (AC Adapter + Connector + AC Cable), Bracket: B (Bracket)

Air Volume: L (Low Noise Type, 0.46m³/min), Output: P (PNP Output), Power Supply Cable, AC Adapter: Z (Power Supply Cable , 10m), Bracket: B (Bracket)

Air Volume: L (Low Noise Type, 0.46m³/min), Output: P (PNP Output), Power Supply Cable, AC Adapter: N (w/o Cable)

Air Volume: L (Low Noise Type, 0.46m³/min), Output: P (PNP Output), Power Supply Cable, AC Adapter: H (e-con Connector, Power Supply Cable to be Provided & Prepared by Customer), Bracket: B (Bracket)

Air Volume: L (Low Noise Type, 0.46m³/min), Output: P (PNP Output), Power Supply Cable, AC Adapter: R (AC Adapter + Connector), Bracket: B (Bracket)

Air Volume: Low Noise Type, 0.46m³/min, Output: PNP Output, Power Supply Cable, AC Adapter: w/o Cable, Bracket: -

Air Volume: Low Noise Type, 0.46m³/min, Output: PNP Output, Power Supply Cable, AC Adapter: w/o Cable, Bracket: Bracket

Air Volume: Low Noise Type, 0.46m³/min, Output: PNP Output, Power Supply Cable, AC Adapter: e-con Connector, Power Supply Cable to be Provided & Prepared by Customer, Bracket: Bracket

Air Volume: Low Noise Type, 0.46m³/min, Output: PNP Output, Power Supply Cable, AC Adapter: AC Adapter + Connector, Bracket: Bracket