1

L2 L3 2 x M4 x 0.7 (For 9 stations or more) L2 Note) These figures show the SS5Y3-51S5-05D-C6.

Metal Seal/Rubber Seal Series VQ Body Ported

VVQ1000-1A-3Electrical entry F1: For F kit P1: P, G, T, S kit for 1 to 12 stations/Double wiring P2: G, S kit for 13 to 16 stations/Double wiring P3: G, S kit for 1 to 16 stations/Single wiring L0: L0 kit L1: L1 kit L2: L2 kit Lead wire assembly for extensions is attached. Note) Note) Note) Note) : Stations (1 to 16) No. Part no.

AC Servo Motor Driver

Abbreviation Connection target (application) Description Supply the following power to L1, L2, L3. For the 1-phase 200 to 230VAC power supply, connect the power supply to L1, L2, and keep L3 open.

Base Mounted Metal Seal/Rubber Seal Series VQ

26.7) L4 is L2 plus about 30.

AC Servo Motor Driver (Pulse input type/Positioning type ）

(a) Delta connection For the 3-phase (L1/L2/L3) delta connection, an instantaneous power failure occurs in the voltage between a pair of lines (e.g. between L1 and L2) among voltages between three pairs of lines (between L1 and L2, L2 and L3, or L3 and L1).

AC Servo Motor Driver (CC-Link Type ）

Abbreviation Connection target (application) Description Supply the following power to L1, L2, L3. For the 1-phase 200 to 230VAC power supply, connect the power supply to L1, L2, and keep L3 open.

AC Servo Motor Driver (Network card type ）

(a) Delta connection For the 3-phase (L1/L2/L3) delta connection, an instantaneous power failure occurs in the voltage between a pair of lines (e.g. between L1 and L2) among voltages between three pairs of lines (between L1 and L2, L2 and L3, or L3 and L1).

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

LECSS2-S5 LECSS2-S7 LECSS2-S8 LECSS1-S5 LECSS1-S7 LECSS1-S8 Driver L1 L2 L3 Power supply Main circuit power supply 3-phase 200V to 230VAC, 50/60Hz L1L2L3 1-phase 200V to 230VAC, 50/60Hz L1 L2 1-phase 100V to 120VAC, 50/60Hz L1 L2 When using driver built-in regenerative resistor, connect P( ) and D.

AC Servo Motor Driver (CC-Link Type ）

Abbreviation Connection target (application) Description Supply the following power to L1, L2, L3. For the 1-phase 200 to 230VAC power supply, connect the power supply to L1, L2, and keep L3 open.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Symbol Connection target (application) Description Supply the following power to L1, L2, and L3. For 1-phase 200 V AC to 240 V AC, connect the power supply to L1 and L3. Leave L2 open. Driver LECSS2-T5 to Power LECSS2-T9 L1/L2/L3 Main circuit power 3-phase 200 V AC to 240 V AC, 50 Hz/60 Hz L1/L2/L3 supply 1-phase 200 V AC to 240 V AC, 50 Hz/60 Hz L1/L3 P3/P4 Connect P3 and P4.

Fluoropolymer Piping Equipment

Dimensions Space saving branch tee: LQ3T-SB Metric Size (L2, L2) 2 x B Model Applicable tubing O.D.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

with 02 2 stations "-02T' is l/S" P,A,B bottom and 1/4" A,B side.

JXCx-OMT0023

V td (13.1) L1 60 2 L1 : Proximity dog length [mm] V : Home position return speed [mm/min] Td : Deceleration time [s] L2 2 S (13.2) L2 : Proximity dog length [mm] S : Travel distance per servo motor revolution [mm] 13 54 13.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

E E F G H L1 L1 L2 L2 M B Model M F LQ3T21-SB LQ3T31-SB LQ3T32-SB LQ3T41-SB LQ3T51-SB LQ3T61-SB 6 10 8 12 19 25 16 20 4 17 16 6 12 34.5 33.5 39.5 52.5 49.5 54.5 66 80 38.5 49.5 46.5 52.5 63.5 76 1/4 (E,E) L1,L1 L1,L1 G (E,E) H 21 25 5 22.5 19.5 9 18 47.5 44.5 24 32 41 29 37 49 6 7 8 24 26.5 30 22 24 26 10 14 18 20 28 36 52.5 64 78 50.5 61.5 74 Inch Size (E,E): Reference dimension for the

LEC-OM02904

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

42

side mounting 17.5 17.5 3 1/8" PE. port 3 1/8" PE. port 38 70 38 53 Dimensions Formula: L1 = 25n + 63, L2 = 25n + 76 n: Stations (Maximum 16 stations) Dimensions Formula: L1 = 25n + 63, L2 = 25n + 76 n: Stations (Maximum 16 stations) n L 1 2 3 4 5 6 7 8 L1 88 113 138 163 188 213 238 263 L2 101 126 151 176 201 226 251 276 n L 1 2 3 4 5 6 7 8 L1 88 113 138 163 188 213 238 263 L2 101 126 151

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L3 L4 31 Series VQZ Base Mounted Type Dimensions: VQZ300 VQZ300 (mm) VV3QZ35C Stations Port size (35) (5.5) 2-4.5 Mounting holes 42 (11) Grommet (G) N7T: One-touch fitting for 1/4" n-N7T, N9T, N11T, 02T 34 (7.5) (3) DIN rail clamp screw 23.5 N9T: One-touch fitting for 5/16" N11T: One-touch fitting for 3/8" 02T: 1/4 NPTF U side n A 2 A 2 5 Manual override Scale: 30% 4 (L4) 3 (L3) L2 L1 2

Series VQ Base Mounted Metal Seal/Rubber Seal

(L3) (L4) Vacuum ejector unit style: Equation L1=10.5n+28.7+(number of ejector units X 26.7) L2=10.5n+41.3+(number of ejector units X 26.7) L4 is L2 plus about 30.

Electric Actuators

400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 Standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101PB Scale: 15% 10 6 Work piece mounting reference plane LJ1 LG1 LX LC6D/LC6C Switches LC1 80 5H10

Made to Order

Solid state auto switch : D-H7, D-H7C, D-H7W, D-H7NF, D-H7BA Reed auto switch : D-C7, D-C80, D-C73C, D-C80C, D-A80, D-A9, D-A9V, D-A79W, D-A73 CM2 series C port Stroke A Stroke B A port B port (mm) Bore size (mm) SA SB ZZ 20 48 62 164 25 48 62 168 32 50 64 172 SA + Stroke A SB + Stroke B 40 67.5 88.5 222 ZZ + Stroke (A + B) CM2R series A port B port C port (mm) Bore size (mm) SA SB ZZ 20