A_HEC-OM-K001

ERR 00: CPU Hung up ERR 01: CPU Check Failure ERR 03: Back-up Data Error ERR 04: EEPROM Writing Error ERR 05: EEPROM Input Over Times Error ERR 11: DC Power Voltage Failure ERR 12: Internal Sensor Value is High ERR 13: Internal Sensor Value is Low ERR 14: Thermostat Alarm ERR 15: Output Failure Alarm (Abnormal output) ERR 17: Cutoff/Short of Internal Sensor ERR 18: Cutoff/Short of External

Table of Contents

01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2

RLQ

Lock ring Lock ring Retraction locking Extension locking 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more on the market) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (rear side) to unlock. 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more on the market

CLA

Cylmoer IS unlocked allln"le of shipment See page 9 lor notes and Instruc~ons 01 engagHlg lOCk unit.

Microspeed Cylinder

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" 38 (1.33) 7 (0.25) Flow rate l/min (ANR) (CFM) 12 (0.42) Controlled flow 0.6 (0.03) 0.2 (0.01) 0.1 (0.006) Effective area

ZR

06 ZZR1 1 RV3 ZR1 1 R1 ZR1 Port location Stations 01 R L Left side Right side 1 Arrangement (Right valve station which is looked from valve side is first station.)

PAB-OM-O003

port Rc,NPT,G 1/8 Female thread, 1/4 PFA tube, LQ1 size 2 with nuts, LQ3 size 2 with nuts Port size Pilot air Supply / Exhaust port Rc,NPT,G 1/8 Female thread Body wetted areas New PFA Diaphragm PTFE Material Check valve New PFAPTFE Liquid contact seals PTFE Maximum discharge rate 1000mL/min Note1) Average discharge pressurer 0 to 0.4MPa Pilot air pressure 0.2 to 0.5MPa Air consumption 15L

Pressure Range: L (0~100kPa), Port Size: T1 (Single Unit Mounting NPTF 1/8), Output Specification: 15 (NPN Open Collector 1 Output), Wiring Specification: L (Grommet Lead Wire 3m)

Pressure Range: 0~100kPa, Port Size: Single Unit Mounting NPTF 1/8, Output Specification: NPN Open Collector 1 Output, Wiring Specification: Grommet Lead Wire 3m

SMC Pneumatic Clean Series

Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.

SMC Pneumatic Clean Series

Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.

SMC Pneumatic Clean Series

Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.

SMC Pneumatic Clean Series

Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.

SMC Pneumatic Clean Series

Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.

SMC

Clean gas filter TS-1500 0.17m 15l/min Measuring instrument Minimum measurable particle diameter Suction flow rate Clean gas filter Hitachi Electronics Engineering Co. Ltd.

HEC_W-E

HEC006 8 to 15L/min And HEC012 10 to 15L/min When the flow rate of the radiating water is not enough, cooling capacity will decline. Meanwhile, when the flow rate is extremely small, alarm (Err14) may occur and the temperature of the radiating water might be extremely high. If a resin tubing is used for piping under these circumstances, the tubing might get softened and exploded.

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

MHR3-10R/MDHR3-10l MHR3-10R/MDHR3-10l 10 10 Pressure 0.6MPa 0.6MPa Pressure 8 8 0.5MPa External hold 0.5MPa Holding force (N) Holding force (N) 6 6 0.4MPa 0.4MPa 4 4 0.3MPa 0.3MPa 0.2MPa 2 2 0.2MPa L 0 10 20 30 40 50 0 10 20 30 40 50 Holding point L (mm) Holding point L (mm) Internal hold MHR3-15R/MDHR3-15l MHR3-15R/MDHR3-15l 20 20 Pressure 0.6MPa Pressure 0.6MPa 15 15 L 0.5MPa 0.5MPa Holding

Series MLGP

Manually unlocking For 20 to 32 Dust cover holding bolt Dust cover Manual unlocking bolt Manual unlocking bolt Lock ring Locking direction Locking direction Lock ring Rod side Head side Rod side Head side MLGP--F: Extension locking MLGP--B: Retraction locking 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15L of more commercially available) into the lock

MLGP

Caution 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a bolt of M3 x 0.5 x 15l or more commercially available) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (head side) to unlock. 1. In order to maintain good performance, operate with clean unlubricated air.

CLQ

Retraction locking Extension locking 2) Supply air pressure of 0.2MPa or more to unlocking port shown in the drawing on the left. 1) Remove the dust cover. 1) Remove the dust cover. 2) Screw a manual unlocking bolt (a conventional bolt of M3 x 0.5 x 15l or more) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (rod side) to unlock. 2) Screw