Digital Pressure Switch ( compatible)

IODD file 1 1 ISE20C-L(-M)SMC-ISE20C-L-ymmdd-IODD1.1 2 ISE20C-L-PSMC-ISE20C-L-P-ymmdd-IODD1.1 3 ZSE20C-L(-M)SMC-ZSE20C-L-ymmdd-IODD1.1 4 ZSE20C-L-PSMC-ZSE20C-L-P-ymmdd-IODD1.1 5 ZSE20CF-L(-M)SMC-ZSE20CF-L-ymmdd-IODD1.1 6 ZSE20CF-L-PSMC-ZSE20CF-L-P-ymmdd-IODD1.1 7 ISE20CH-L(-M)SMC-ISE20CH-L-ymmdd-IODD1.1 8 ISE20CH-L-PSMC-ISE20CH-L-P-ymmdd-IODD1.1 1: "ymmdd" indicates the file preparation date

180

3 <10> wy!1!4 Piston assembly MHY-A1003 MHY-A1603 MHY-A2003 MHY-A2503 <16, 20, 25> wy!1!4!6 Order 1 piece of finger assembly per one unit.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Initial value psi Option 2 Bottom ported R1/4 (M5 female threaded) Nil None 02L With bracket NPT1/4 (M5 female threaded) N02L A C01L A2L B2L Rc1/8 ZS-24-A ZS-35-A URJ1/4 Rear ported Bottom ported TSJ1/4 With bracket Note) Input/Output N P A B R T S V NPN open collector 1 output PNP open collector 1 output NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 2 outputs

PSxx-OMU0008CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -21No.PS-OMU0008CN-D ZSE20C(F)/ISE20C(H)-S/-R () NPN 2 DC(+) Max.28 V80 mA 1 V R15 V OUT1 1 k S420 mA OUT2 12 V 300 24 V 600 DC(-) 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -22No.PS-OMU0008CN-D -V/-T () PNP 2 DC(+) Max.80 mA 1 V T15 V OUT1 1 k V420 mA OUT2

High Vacuum Angle Valve

Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, Q(L)S shown as above, and the ultimate pressure of the pump itself. In the case of very low pressure, the exhaust characteristics of the actual pump can be the limiting factor.

Digital Flow Switch

Pressure Characteristics 3 5%F.S. (0 to 0.75 MPa, 0.35 MPa standard) Power supply voltage 12 to 24VDC 10% Ripple (p-p) 10% or less Electrical Current consumption 55 mA or less Protection Polarity protection Display accuracy 3%F.S. Analogue output accuracy 3%F.S.

PFxx-OMO0004CN

[cm] -70No.PF-OMO0004CN-E PFMB7201-02 PFMB7201-N02 17 2x Rc1/4 NPT1/4 -71No.PF-OMO0004CN-E PFMB7201-02L PFMB7201-N02L 2x Rc1/4 NPT1/4 17 -72No.PF-OMO0004CN-E PFMB7201S-02 PFMB7201S-N02 2x Rc1/4 NPT1/4 -73No.PF-OMO0004CN-E PFMB7201S-02L PFMB7201S-N02L 2x Rc1/4 NPT1/4 17 -74No.PF-OMO0004CN-E PFMB7201-F02 21 2x G1/4 -75No.PF-OMO0004CN-E PFMB7201-F02L 2x G1/4 21 -76No.PF-OMO0004CN-E PFMB7201S-F02

PSxx-OMM0002CN

PNP Max.80 mA 1 V -S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -17No.PS-OMM0002CN-F -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -A NPN2 Max.28 V80 mA 1 V -B PNP2 Max.80 mA 1 V -18No.PS-OMM0002CN-F ONOFF () ON OFF ON5OFF 20 P 1 H_1 [Pa] ON OFF [s] -19No.PS-OMM0002CN-F

Digital Pressure Switch

Internal circuit and wiring example Z/ISE80Output specification -N NPN open collector output type Max. 28 V, 80 mA Residual voltage 1 V or less -P PNP open collector output type Max. 80 mA Residual voltage 1 V or less -S/-R (Analogue output mode) Switch output NPN open collector output type 2 output Max. 28 V, 8 mA Residual voltage 1 V or less R: Analogue output 1 to 5 V Output impedance

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual:

Rated Pressure Range: -0.1 to 2 MPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: None, Operation Manual: w/o Operation Manual

ZSE80/ISE80

Initial value psi Option 2 Bottom ported R1/4 (M5 female threaded) None Nil 02L With bracket NPT1/4 (M5 female threaded) N02L A C01L A2L B2L Rc1/8 ZS-24-A ZS-35-A URJ1/4 Rear ported Bottom ported TSJ1/4 With bracket Note) Input/Output N P A B R T S V NPN open collector 1 output PNP open collector 1 output NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 2 outputs

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: Y

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: Y (w/o Operation

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: Y (w/o

Rated Pressure Range: -0.1 to 2 MPa, Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: None, Operation Manual: w/o Operation Manual,

Rated Pressure Range: -0.1 to 2 MPa, Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: None, Operation Manual: w/o Operation Manual, w/

Rated Pressure Range: -0.1 to 2 MPa, Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: None, Operation Manual: w/o Operation Manual,

ZISE20C.eng

Bracket C MPa ISE20C(H) ISE20C: 0.050 MPa/ZSE20C: 5.1 kPa/ ZSE20CF: 5.0 kPa/ISE20CH: 0.100 MPa "Nil" or M Hysteresis Self tapping screws: Nominal size 3 x 8L kPa ZSE20C(F) Self tapping screws: Nominal size 3 x 10L Safety Instructions Bracket A ISE20C(H) Delay time 1.5 ms or less psi P ZSE20C(F) Display color OUT1 ON: Green/OUT1 OFF: Red : Arbitrary display These safety instructions are intended

ZISE20C-L.eng

Safety Instructions Bracket A ISE20C(H) Display color Output ON: Green/Output OFF: Red (Linked to OUT1) P psi ZSE20C(F) : Arbitrary display OUT1 hysteresis OUT1 set value Mode display These safety instructions are intended to prevent hazardous situations and/or equipment damage.