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3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1 Excluding the Z/ISE20B-L compatible type has been added to the 20B series. How to Order Rated pressure range ISE20B 0 to 1 MPa ISE20B M5 L M For positive pressure For vacuum/ compound pressure ZSE20B L M M5 q w e r t y u q Rated pressure range w Output specification e Unit specification ZSE20B 0 to 100 kPa ZSE20BF 100 to 100 kPa Symbol Description Symbol Description Nil Units selection function*1 M SI unit only*2 P Units selection function (Initial value psi)*1
IODD file 1 1 ISE20C-L(-M)SMC-ISE20C-L-ymmdd-IODD1.1 2 ISE20C-L-PSMC-ISE20C-L-P-ymmdd-IODD1.1 3 ZSE20C-L(-M)SMC-ZSE20C-L-ymmdd-IODD1.1 4 ZSE20C-L-PSMC-ZSE20C-L-P-ymmdd-IODD1.1 5 ZSE20CF-L(-M)SMC-ZSE20CF-L-ymmdd-IODD1.1 6 ZSE20CF-L-PSMC-ZSE20CF-L-P-ymmdd-IODD1.1 7 ISE20CH-L(-M)SMC-ISE20CH-L-ymmdd-IODD1.1 8 ISE20CH-L-PSMC-ISE20CH-L-P-ymmdd-IODD1.1 1: "ymmdd" indicates the file preparation date
Piping/weight specifications Product No. 02(L) N02(L) F02(L) C01(L) A2(L) B2(L) Port size R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 fluid contact Materials in part Pressure-sensing part Pressure sensor: SUS630, Fitting: SUS304 Body (Rear piping) 51 g 51 g 48 g 47 g 54 g 46 g Weight Body (Bottom piping) 77 g 78 g 74 g 65 g 81 g 72 g Lead wire with connector +39 g Leakage 1 x 10-5Pa m3/s 1 x 10
10 1 2466 LCD * -8No.PS-OMU0008CN-D ISE20C X M 2 3 ISE20C -0.100~1.000 MPa Y ZSE20C 0.0~-101.0 kPa K ZSE20CF -100.0~100.0 kPa T ISE20CH -0.100~2.000 MPa 24 X NPN2 A1 A Y PNP2 A3 C R NPN2+1 B T PNP2+1 E S NPN2+1 D + V PNP2+1 1: F + 4 2 M SI3 1 P psi2 2 3 kPaMpa (2m ) W 2 R1/4 C01 Rc1/8 N02 NPT1/4 A2 URJ1/4 L F02 G1/4 B2 TSJ1/4 2 2 () L() A A1 ZS-46-A1 C A3 ZS-46-E
9.6 8.7 2 x Applicable tubing D D M M L Note) D is maximum diameter.
57.4 45.4 9 18.4 L M L D L L M Q Q D 2 x N 2 x O Q Q Different Diameter Cross: KQ2TX Applicable tubing b Applicable tubing O.D.
/5000/7000 VVQC1000-TR-l (10.5 mm pitch) SV2000-55-1-l-A (16 mm pitch) SY70M-49-1-l-A (19 mm pitch) SY50M-49-1--A*3*4 (12.5 mm pitch) t Tie-rod SS5Y5-M** : Manifold stations (2 to 24 stations) 3 pcs. supplied SV2000-55-1--A*5 (16 mm pitch) Mixed mounting type manifold SS5Y7-M** SY70M-49-1--A (19 mm pitch) Part numbers shown on the left are as follows.
Description Model 1 Body q u ZS-33-D 2 Lead wire with connector (2 m) w ZS-33-P1L 3 IN side Bottom piping adapter (with pin) i ZS-33-P2L 4 OUT side Bottom piping adapter (with pin) For 10 l/min ZS-33-10N For straight piping Flow adjustment valve assembly (with pin) For 25 l/min ZS-33-25N u 5 For 50 l/min ZS-33-50N r Bottom piping For 100 l/min ZS-33-11N i For 10 l/min ZS-33-10NL For bottom
M SI unit only Note 2) Nil Unit selection function Note 3) Made to Order Note 2) Fixed unit: Instantaneous flow: L/min Accumulated flow: L Option 1 Note 3) Since the unit for Japan is fixed to SI due to new W Nil measurement law, this option is for overseas. Unit can be changed.
min Instantaneous flow 2 to 210 L/min Set flow rate range Accumulated flow 0 to 999,999,999 L Flow Instantaneous flow 1 L/min Minimum setting unit Accumulated flow 1 L Accumulated volume per pulse (Pulse width = 50 msec.) 1 L/pulse Accumulated value hold 2 Every 2 minutes or every 5 minutes.
end plate assembly Manifold block assembly U side end plate assembly < End plate assembly >
Bracket C Units specification Pressure range Default setting ISE20C: 0.050 MPa/ZSE20C: 5.1 kPa/ ZSE20CF: 5.0 kPa/ISE20CH: 0.100 MPa Hysteresis ISE20C(H) MPa Self tapping screws: Nominal size 3 x 8L "Nil" or M Self tapping screws: Nominal size 3 x 10L ZSE20C(F) kPa Delay time 0.00 sec.
[L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I PFM7S-(N)01/(N)02/F01 17 2 -61No.PF-OMJ0005CN-I PFM7S-(N)01L/(N)02L/F01L 2 17 -62No.PF-OMJ0005CN-I PFM7-F02 21 2 -63No.PF-OMJ0005CN-I
CO2 0.2 to 5 L/min 0.5 to 12.5 L/min 1 to 25 L/min 2 to 50 L/min Dry air, N2, Ar 0.2 to 10.5 L/min 1 0.5 to 26.3 L/min 1 to 52.5 L/min 2 to 105 L/min 2 Display flow range Instantaneous CO2 0.2 to 5.2 L/min 0.5 to 13.1 L/min 1 to 26.2 L/min 2 to 52 L/min flow Dry air, N2, Ar 0 to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min
7 A*8 201 2~200L/min 8 2 (11) S () C8 8(5/16") *6 02*1 Rc1/4 M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R S () () T V () () -11No.PF-OMO0004CN-E / ZS-33-D 2m ZS-33-F ZS-33-J (
to 25 L/min 2 to 50 L/min Accuracy 3%F.S. max.
For positive pressure 80 ISE 02 N M For vacuum/ compound pressure 80 ZSE 02 N M Option 3 Rated pressure range Operating Note) manual (Booklet) (CD-ROM) Operating Note) manual 80 80F Calibration certificate Calibration certificate 0 to 101 kPa 100 to 100 kPa Symbol Symbol (Booklet) (CD-ROM) K T R Nil Piping Y W R1/4 (M5 female threaded) Rear ported 02 Note) All texts in both English
40 Pilot EXH 177.5 14 (3(R) port) 2 x 5.5 Mounting hole 2 x 1/4 (: Thread type) 1 3 Manual override 23 9 19 3(R) port 1(P) port Conduit terminal VFN212N-lTll-02l-l-l Grommet VFN212N-lGll-02l-l-l Surge voltage suppressor (With "S") 137 41.7 300 19 23 Indicator light (With "Z") 74(Without "Z": 64) 64(Without "Z": 54) Grommet terminal VFN212N-lEll-02l-l-l Lead wire O.D. 3.5 at max.
DOZ is not available. 2 9 Other Option Electrical entry 3 position closed center G: Grommet Lead wire length: 300 mm L: L plug connector With lead wire LN: L plug connector Without lead wire LO: L plug connector Without connector D: DIN terminal 3 3 position exhaust center 4 M: M plug connector With lead wire MN: M plug connector Without lead wire MO: M plug connector Without connector